研究生: |
吳國豪 Kuo-Hao Wu |
---|---|
論文名稱: |
於定向自組裝多圖案混合式微影中使用多 種嵌段共聚物材質之導引樣板設計技術 SIMULTANEOUS TEMPLATE ASSIGNMENT AND LAYOUT DECOMPOSITION USING MULTIPLE BCP MATERIALS IN DSA-MP LITHOGRAPHY |
指導教授: |
方劭云
Shao-Yun Fang |
口試委員: |
呂學坤
Shyue-Kung Lu 王乃堅 Nai-Jian Wang 李毅郎 Yih-Lang Li |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 電機工程系 Department of Electrical Engineering |
論文出版年: | 2017 |
畢業學年度: | 105 |
語文別: | 英文 |
論文頁數: | 59 |
中文關鍵詞: | 實體設計 、定向自組裝 、嵌段共聚物 、引導模板 、多圖案微影 、布局分解 |
外文關鍵詞: | physical design, directed self-assembly, block copolymer, guiding templates, multiple patterning, layout decomposition |
相關次數: | 點閱:248 下載:1 |
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定向自組裝多圖案混合式微影(directed selfassembly technology with multiple patterning lithography)非常適用於製造 10 奈米以下的導通孔層(contact/via layer)。然而,先前的相關研究只使用多圖案微影及一種嵌段共聚物(block copolymer),導致可使用的引導模板(guiding templates)的種類被限制,導通孔層的可製造性因此不能有效提高。為了解決這個問題,多種嵌段共聚物配合多圖案微影之混合方法被提出,幫助定向自組裝相容的圖案匹配更有彈性。本論文中,我們提出第一個工作,使用多種嵌段共聚物,同時處理定
向自組裝-多圖案微影混合技術中的引導模板分配及佈局分解(layout decomposition)問題。我們分別提出一個保證最佳性基於整數線性規劃的演算法和一個較有效率基於經驗法則的演算法。實驗結果顯示相較於只使用一種嵌段共聚物的先前研究,採取兩種嵌段共聚物能夠大幅較低衝突(conflict)數量。此外,提出的經驗演算法也能有效率得到好的解。
In sub 10-nm technology nodes, the directed selfassembly technology with multiple patterning lithography (DSA-MP) is a promising solution for contact/via layer fabrication. However, previous studies using multiple patterning with a single block copolymer (BCP) material still suffer from low via manufacturability due to limited types of feasible guiding templates. To mitigate the problem, multiple patterning in combination with two different BCP materials has been proposed, which
contributes to more flexible DSA-compatible pattern matching. In this paper, we propose the first work of simultaneous guiding template assignment and layout decomposition with multiple BCP materials for general via layouts in DSA-MP. An optimal integer linear programming (ILP) formulation and a practical and sophisticated heuristic algorithm are proposed. Experimental results indicate that adopting
two different BCP materials can greatly reduce conflict numbers compared with existing works using a single BCP material, and the proposed heuristic method can efficiently obtain good solutions.
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