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研究生： 許子晨
Tzu-Chen Hsu
論文名稱： 希爾伯特-黃即時頻譜分析於原子力顯微鏡回授應用之研究
Hilbert-Huang Instantaneous Frequency Analysis Application on Atomic Force Microscopy Feedback Loop
指導教授： 張以全
I-Tsyuen Chang
口試委員: 林紀穎
Chi-Ying Lin
劉孟昆
Meng-Kun Liu
田維欣
Wei-Hsin Tien
學位類別： 碩士
Master
系所名稱： 工程學院 - 機械工程系
Department of Mechanical Engineering
論文出版年： 2018
畢業學年度： 106
語文別： 中文
論文頁數： 88
中文關鍵詞： 原子力顯微鏡 、系統識別 、比例積分控制器 、帶拒濾波器 、希爾伯特-黃轉換
外文關鍵詞： atomic force microscope, system identification, PI controller, band-rejection filter, Hilbert Huang transform
相關次數： 點閱：213  下載：3 
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  •  上一筆

    • 本論文對原子力顯微鏡做控制器設計並進行訊號處理。在文中,首先介紹原 子力顯微鏡的系統架構以及操作模式,接著提出利用MATLAB/SIMULINK 模擬 出原子力顯微鏡的系統。此外,並設計出傳統比例-積分控制器與藉由系統識別而 設計出的帶拒濾波器來對原子力顯微鏡的壓電掃描器進行定位控制。最後,利用 希爾伯特黃轉換對探針的運動訊號進行分析,計算出探針運動的瞬時頻率。發現 藉由瞬時頻率,可以反推出掃描樣本的高度。由此關係可以改用頻率進行回授, 並由此凸顯表面變化,保持AFM靈敏度,最終加快AFM掃描速度。

    This thesis proposes the controller design and the signal processing on the atomic force microscope. In this thesis, first, the structure and the operating mode of the atomic force microscope system. Next, the entire model of this research is de- veloped and simulated by using MATLAB/SIMULINK , In addition, the traditional PI controller and the band-rejection filter designed by the system identification are designed and utilized to control the z piezoelectric scanner position. Finally, Hilbert Huang transform is used to analyze the motion signal of the tip and caculate the instantaneous frequency of the motion signal. We found that with the instantaneous frequency, the height of the scanned sample can be deduced. From the relationship, we can change to use frequency for feedback control and highlight the surface vari- ations,maintain the AFM sensitivity, and ultimately speed up the AFM scanning.

    論文摘要 ...................................... I Abstract....................................... II 誌謝 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . III 目錄 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . IV 圖目錄 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . VII 表目錄 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . XI 1介紹....................................... 1 1.1 研究目的 ................................. 1 1.2 原子力顯微鏡............................... 1 1.2.1 探針與懸臂樑........................... 2 1.2.2 光學位移感測器.......................... 3 1.2.3 壓電掃描器 ............................ 4 1.2.4 掃描模式 ............................. 5 1.3 控制器設計 ................................ 6 1.3.1 PID控制器 ............................ 7 1.3.2 帶拒濾波器 ............................ 7 1.4 希爾伯特-黃轉換 ............................. 8 1.4.1 本質模態函數........................... 8 1.4.2 經驗模態分解........................... 9 1.4.3 希爾伯特頻譜........................... 11 1.5 文獻回顧 ................................. 12 1.5.1 AFM控制器............................ 12 1.5.2 AFM應用 ............................. 13 1.5.3 HHT應用 ............................. 14 1.5.4 AFM分析 ............................. 15 2 AFM系統介紹.................................. 18 2.1 懸臂樑與探針............................... 18 2.2 質量彈簧阻尼系統 ............................ 19 2.3 凡得瓦力 ................................. 21 2.4 壓電掃描器................................ 23 2.4.1 XY掃描器............................. 23 2.4.2 Z軸掃描器............................. 25 2.5 AFM振幅計算 .............................. 26 2.6 AFM方塊圖................................ 27 3 控制器設計之模擬架構............................. 28 3.1 系統模擬架構............................... 28 3.1.1 系統參數給定........................... 28 3.1.2 凡得瓦力設定........................... 31 3.1.3 加入凡得瓦力........................... 32 3.1.4 振幅計算 ............................. 34 3.1.5 樣本表面設計........................... 36 3.1.6 SIMULINK架構.......................... 37 3.2 控制器設計 ................................ 41 3.2.1 比例積分控制器.......................... 41 3.2.2 帶拒濾波器 ............................ 43 4 AFM訊號分析.................................. 51 4.1 EMD分析................................. 51 4.2 FFT分析.................................. 57 4.3 EMD進行回授............................... 59 5 結論與未來展望................................. 67 5.1 結論.................................... 67 5.2 未來展望 ................................. 67 參考文獻 ...................................... 70

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