摘 要
本研究主要是探討接觸式原子力顯微鏡(Contact Mode Atomic Force Microscopy,CM-AFM)使用不同探針懸臂外型與尺寸所造成不同的量測誤差與輕敲式原子力顯微鏡(Tapping Mode Atomic Force Microscopy,TM-AFM)矩形懸臂探針在外界振動的影響下所造成不同的量測誤差，並且建立探針與奈米級階梯形標準試片與接CM-AFM及TM-AFM之奈米級模擬量測模型。本文之模擬方法為當探針經過試片表面，利用Morse勢能計算出探針原子對試片原子之作用力，配合本研究之撓角方程式進行CM-AFM模擬量測及定振幅方程式進行TM-AFM模擬量測，得到奈米級階梯形標準試片掃描輪廓曲線。
本文探討CM-AFM探針懸臂不同尺寸及TM-AFM矩形懸臂探針之外界振動干擾對於實驗掃描結果的影響，並且建立奈米級模擬量測模型來模擬與分析。本文將實驗掃描所得輪廓曲線與模擬量測所得輪廓曲線相比較，以驗證本文所建立之模擬量測模型的合理性。在CM-AFM量測部份，本文探討造成模擬掃描階梯輪廓與實驗掃描階梯輪廓之誤差原因，除了探討探針懸臂之幾何尺寸的影響外，還包括實驗中所具有的掃描速度與模擬之誤差及探針斜邊角度會影響試片垂直邊的掃描結果。而有關TM-AFM量測部份，本文探討外界振動造成掃描量測誤差時，以奈米級階梯形標準試片進行TM-AFM掃描實驗量測，並將加速規安置於AFM機台上量測有無隔震設施條件下的外界振動頻率及振幅，且同時進行模擬實驗量測，最後將模擬結果與實驗量測結果相比較，進行外界干擾大小的分析。

Abstract
The study mainly investigates the different measurement errors caused to Contact Mode Atomic Force Microscopy (CM-AFM) when using probe tips with different cantilever shapes and dimensions, and also looks into the different measurement errors caused to Tapping Mode Atomic Force Microscopy (TM-AFM) under the effects of external vibration of the rectangular cantilever. After that, the study establishes the probe tip and nanoscale ladder sample, as well as a nanoscale simulated measuring model connecting CM-AFM and TM-AFM. Regarding the simulation method of the paper, when the probe tip passes by the surface of sample, Morse force is used to calculate the action force of probe electron on sample electron. Using the rotation equation of probe’s cantilever developed by the paper, CM-AFM simulated measurement is undergone; and using vibration equation, TM-AFM simulated measurement is undergone. As a result, a profile curve of the nanoscale ladder sample is achieved.
The paper studies how different dimensions of CM-AFM probe’s cantilever and the external vibration disturbance of rectangular cantilever of TM-AFM’s probe affect the scanning results of experiment, and establishes nanoscale simulated measurement model to perform simulation and analysis. The paper compares the profile curve scanned in experiment with the profile curve measured from simulation in order to prove the rationality of the simulated measurement model established by the paper. As to the part of CM-AFM measurement, the paper investigates the reason for the error caused between the ladder profile scanned from simulation and the ladder profile scanned in experiment. Apart from looking into the effects of geometric dimensions of probe’s cantilever, the study finds out the speed error between the result scanned in experiment and the simulated result, and also investigates how the bevel angle of probe affect the simulated result of the vertical side of sample. As to the part of TM-AFM measurement, the paper makes an investigation that when external vibration has caused error of scanning measurement, nanoscale ladder sample is used to undergo TM-AFM scanning measurement in experiment. And accelerometer is installed at AFM platform to measure the external vibration frequency and amplitude under the conditions of having and having no seismic isolation system. Meanwhile, simulated experimental measurement is made. Finally, the simulated result is compared with the measured result of experiment, and the size of external disturbance is analyzed.

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