透明導電氧化物薄膜(Transparent conductive oxides, TCO)為一種兼具透明與導電兩種特性的材料，故被廣泛地應用於不同的電子設備上，如發光二極體、觸控面板與太陽能電池。然而在硒化銅銦鎵(Copper Indium Gallium Diselenide, CIGS)薄膜太陽能電池的製程中吸收層最佳之成長溫度為500°C到600°C，透明導電氧化物並不適合應用於如此高溫之製程且仍有許多改善的空間。此外，在堆疊型太陽能電池的研究中，透明接點亦為重要之需求，故高結合性以及高透光性之電極是必須的。在本研究中，以四種不同微米尺度之圖案的鉬金屬網狀電極取代堆疊型太陽能電池中的透明導電氧化物薄膜。除了評估鉬金屬網狀電極之微觀結構、晶體取向、表面粗糙度與電性外，也比較鉬金屬網狀電極在不同濺鍍參數(功率和工作壓力)下之效能。所有圖案的鉬金屬網狀電極，在穿透率的試驗中不論是在可見光或其他波長範圍，皆表現出高達97％之高透光性以及30 Ω/□的片電阻。

Transparent conductive oxide (TCO) electrodes find application in a wide variety of devices, like light-emitting diodes, displays and solar cells. TCOs however are not suitable for high temperature manufacturing processes like CIGS (Copper Indium Gallium Diselenide) thin film processing, which takes place at 500°C to 600°C and suffer from a number of different drawbacks. The electrode on which CIGS is deposited must be stable at these temperatures. To realize a tandem cell, both, front and back contact of a cell must be transparent. In this work a molybdenum metal mesh electrode with four pattern derivatives is presented, which are designed towards this implementation in a tandem cell setup. The electrode consists of 2 micron wide fingers arranged in an industry typical H-grid pattern and in a hexagonal shaped pattern, with each of these patterns being comprised of a derivative with and without tapered busbars. The electrode’s micro structure, crystal orientation, surface roughness, electrical properties and optical properties are investigated. The manufacturing process as well as a comparison of this works electrodes with various competing electrode types is also presented. All electrode derivatives show excellent transmittance of up to 97% within and beyond the visible spectrum while retaining acceptable sheet resistances of about 30 Ω/□.

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