簡易檢索 / 詳目顯示

研究生: 趙駿銘
Chun - Ming Chao
論文名稱: 運用層流板提昇OLED 熱蒸鍍膜後均勻度及再現性
Improvement of Thin Film Uniformity and Repeatability through a Laminar Flow Control in OLED Thermal Evaporation
指導教授: 柯正浩
Cheng-Hao Ko
口試委員: 沈志霖
NONE
吳正信
NONE
李敏凡
Min-Fan Lee
學位類別: 碩士
Master
系所名稱: 工程學院 - 自動化及控制研究所
Graduate Institute of Automation and Control
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 68
中文關鍵詞: 有機發光二極體熱蒸鍍層流板膜厚均勻度
外文關鍵詞: Organic Light Emitting Diode (OLED), Thermal Evaporation, Laminar Plate, Thin Film Uniformity
相關次數: 點閱:429下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 在OLED (有機發光二極體)顯示器,因為熱蒸鍍成熟技術,被廣泛運用有機薄膜沉積的製程中,由於有機材料相當昂貴,而材料利用率僅有10%~15%,使OLED 原件在開發過程中,即設立高規格的門檻,且沉積膜厚的安定性及可控性不佳等問題,持續的引響OLED 量產計畫。
    本篇論文利用層流板(雙層開孔隔板)設計,改善材料利用率偏低及蒸鍍的安定性與可控性不佳等缺點。此開孔隔板主要功能,在坩鍋內有機材料受熱產生蒸氣後,限制蒸氣穿過增加的開孔隔板套件,讓材料蒸氣在此路程中能夠獲得足夠熱能,並且維持穩定的蒸氣動能至基版上。
    G6 OLED熱蒸鍍在填充材料之後,原需要數天的膜厚均勻度的調整,以及長時間膜厚均勻度容易偏離等缺點。在線蒸鍍源加入雙層開口隔板設計後,經過實驗測試所得的結果,此方式快速及有效縮減膜厚均勻度的調整時間,並且長時間使用也能維持穩定狀態。日後期望調整隔板開口率配置,配合各種材料,尋求最佳膜厚均勻度狀態,提昇材料利用率。


    Thermal evaporation is a well-developed technology widely used in OLED (organic light-emitting diode) of the thin film deposition processes. The organic materials are highly expensive with a low utilization rate of only 10% to 15%. Additionally, the instability and controllability of the deposition is also a concern on the production of OLED. These barriers will have to be overcomed in order to achieve a better yield in OLED mass production.
    This thesis explores the design of laminar flow plates (dual laminar partition) to improve the stability and controllability of the material deposition. Vapor is generated by the organic material heated in the crucible, and the main feature of the laminar plate is that it limits the vapor through the additional plates. This will ensure the vapor to acquire sufficient heat energy and maintain a stable vapor pressure on the substrate
    In typical OLED process, after the material is refilled through thermal evaporation, the film thickness distribution takes several days, and even so, it cannot maintain a stable film thickness distribution. The addition of dual laminar partition through experiments has proved to improve the film thickness distribution rate and also material utilization which in terms reduces the material waste. Additionally, steady state can be maintained on a long manufacturing period. Future research seeks to optimize the open-ratio of the plate for the optimum film thickness distribution and improves material utilization.

    誌謝i 摘要ii Abstractiii 目錄v 圖目錄viii 表目錄xi 1 緒論1 1.1 前言1 1.2 研究背景3 1.3 研究動機6 1.4 研究方法10 1.5 本文架構11 2 文獻探討12 2.1 OLED發展12 2.2 電激發光元件結構及原理13 2.3 氣體分子運動與氣壓16 2.4 通過單位面積的分子數21 2.5 氣體分子的平均自由徑 (mean free path)23 2.6 理想氣體方程式26 2.7 沉積速度和膜厚均勻度27 2.8 氣體的傳輸現象29 2.9 薄膜沈積機制 (Deposition Mechanism)30 3 實驗設備與方法32 3.1 實驗流程32 3.2 濕式基板表面清洗機34 3.3 基板真空烤爐及冷卻37 3.4 特氣電漿表面處理37 3.5 蒸鍍薄膜製程38 3.6 真空系統41 3.7 橢圓偏光儀 (ellipsometer)43 3.8 實驗材料44 3.9 層流板設計45 4 實驗結果與討論47 4.1 建立對照組47 4.2 層流板測試50 4.3 層流板配置測試54 4.4 層流板再現性確認及可控性確認57 5 結論與未來研究方向63 5.1 結論63 5.2 未來研究方向65 參考文獻66

    [1]石宗祥,「FMM 變形混色/金屬蒸鍍技術突破65吋oxide OLED電視成真」,http://www.mem.com.tw/article_content.asp (2013)。
    [2]OLED TV 開發處,「32吋 FHD oxide OLED電視」,友達光電股份有限公司,http://www.auo.com/ (2012)。
    [3]Tang, C. W. and S. A. VanSlyke, “Organic Electroluminescent Diodes,” Applied Physics Letters, Vol. 51, pp. 913−915 (1987).
    [4]阮世昌, 「OLED產業發展簡介」, 太平洋天財網,(2003)。
    [5]顧鴻壽,光電有機電激發光顯示器技術及應用,新文京開發出版股份有限公司,台北,第113頁,(2001)。
    [6]M. Pope, H. P. Kallmann, P. Magnante, “Electroluminescence in Organic Crystals,” The Journal of Chemical Physics, Vol. 38, pp. 2024 (1963).
    [7]C. W. Tang, S. A. VanSlyke and C. H. Chen, “Electroluminescence of Doped Organic Thin Films,” Journal of Applied Physic, Vol. 65, pp.3610-3616 (1989).
    [8]J.D.Anderson, E. M. McDonald, P. A. Lee, M. L. Anderson, E. L. Ritchie, H. K. Hall, “Electrochemistry and Electrogenerated Chemiluminescence Processes of the Components of Aluminum Quinolate/Triarylamine, and Related Organic Light-Emitting Diodes, “ Journal of the American Chemical Society, Vol.120, pp. 9646-9655 (1998)
    [9]呂椬圳,「噴墨印刷在PLED製程的應用與關鍵技術」,印刷科技,第二十二卷,第一期,第 39-54頁 (2006)。
    [10]陳金鑫,黃孝文, OLED夢幻顯示器,五南圖書出版有限公司,第34-35頁 (2007)。
    [11]M. A. Baldo, D. F. O’Brien, Y. You, A. Shoustikov, S. Sibley, M. E. Thompson, S. R. Forrest, “Highly Efficient Phosphorescent Emission from Organic Electroluminescent Devices,” Nature, Vol. 395, pp. 151-154 (1998).
    [12]黃文璋,「布朗運動簡介」,數學傳播,第十六卷,第四期,第1-6頁 (1992)。
    [13]David Halliday, Robert Resnick and Jearl Walker, Principles of Physics, John Wiley and Sons, NY, pp.19-17 (2011).
    [14]Russell J. Hill, Physical Vapor Deposition, BOC Group, CA, pp. 2, 81-84 (1986).
    [15]L. Holland, Vacuum Deposition of Thin Films, John Wiley and Sons, NY, pp. 143- 146 (1957).
    [16]H. A. Macleod, Thin-Film Optical Filters, Macmillan Publishing, NY, pp. 412-420, (1986).
    [17]李正中,薄膜光學與鍍膜技術,藝軒圖書出版社,台北,第325-337頁 (1999)。
    [18]Maissel and Glang, Handbook of Thin Film Technology, Mcgraw-Hill, NY, pp. 1.32-1.36, (1966).
    [19]Sauerbrey, G., “Use of Quartz Crystal Vibrator for Weighting Thin Films on a Microbalance, “ Z. Physics, Vol. 155, pp. 206-222 (1959).

    無法下載圖示 全文公開日期 2019/07/28 (校內網路)
    全文公開日期 本全文未授權公開 (校外網路)
    全文公開日期 本全文未授權公開 (國家圖書館:臺灣博碩士論文系統)
    QR CODE