研究生: |
趙駿銘 Chun - Ming Chao |
---|---|
論文名稱: |
運用層流板提昇OLED 熱蒸鍍膜後均勻度及再現性 Improvement of Thin Film Uniformity and Repeatability through a Laminar Flow Control in OLED Thermal Evaporation |
指導教授: |
柯正浩
Cheng-Hao Ko |
口試委員: |
沈志霖
NONE 吳正信 NONE 李敏凡 Min-Fan Lee |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 自動化及控制研究所 Graduate Institute of Automation and Control |
論文出版年: | 2014 |
畢業學年度: | 102 |
語文別: | 中文 |
論文頁數: | 68 |
中文關鍵詞: | 有機發光二極體 、熱蒸鍍 、層流板 、膜厚均勻度 |
外文關鍵詞: | Organic Light Emitting Diode (OLED), Thermal Evaporation, Laminar Plate, Thin Film Uniformity |
相關次數: | 點閱:429 下載:0 |
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在OLED (有機發光二極體)顯示器,因為熱蒸鍍成熟技術,被廣泛運用有機薄膜沉積的製程中,由於有機材料相當昂貴,而材料利用率僅有10%~15%,使OLED 原件在開發過程中,即設立高規格的門檻,且沉積膜厚的安定性及可控性不佳等問題,持續的引響OLED 量產計畫。
本篇論文利用層流板(雙層開孔隔板)設計,改善材料利用率偏低及蒸鍍的安定性與可控性不佳等缺點。此開孔隔板主要功能,在坩鍋內有機材料受熱產生蒸氣後,限制蒸氣穿過增加的開孔隔板套件,讓材料蒸氣在此路程中能夠獲得足夠熱能,並且維持穩定的蒸氣動能至基版上。
G6 OLED熱蒸鍍在填充材料之後,原需要數天的膜厚均勻度的調整,以及長時間膜厚均勻度容易偏離等缺點。在線蒸鍍源加入雙層開口隔板設計後,經過實驗測試所得的結果,此方式快速及有效縮減膜厚均勻度的調整時間,並且長時間使用也能維持穩定狀態。日後期望調整隔板開口率配置,配合各種材料,尋求最佳膜厚均勻度狀態,提昇材料利用率。
Thermal evaporation is a well-developed technology widely used in OLED (organic light-emitting diode) of the thin film deposition processes. The organic materials are highly expensive with a low utilization rate of only 10% to 15%. Additionally, the instability and controllability of the deposition is also a concern on the production of OLED. These barriers will have to be overcomed in order to achieve a better yield in OLED mass production.
This thesis explores the design of laminar flow plates (dual laminar partition) to improve the stability and controllability of the material deposition. Vapor is generated by the organic material heated in the crucible, and the main feature of the laminar plate is that it limits the vapor through the additional plates. This will ensure the vapor to acquire sufficient heat energy and maintain a stable vapor pressure on the substrate
In typical OLED process, after the material is refilled through thermal evaporation, the film thickness distribution takes several days, and even so, it cannot maintain a stable film thickness distribution. The addition of dual laminar partition through experiments has proved to improve the film thickness distribution rate and also material utilization which in terms reduces the material waste. Additionally, steady state can be maintained on a long manufacturing period. Future research seeks to optimize the open-ratio of the plate for the optimum film thickness distribution and improves material utilization.
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