研究生: |
何承易 Cheng-Yi He |
---|---|
論文名稱: |
類鑽石碳薄膜紅光與紅外光光感測器 Diamond-like Carbon Films for Red Light and IR Photodetector |
指導教授: |
周賢鎧
Shyan-kay Jou |
口試委員: |
胡毅
Yi Hu 蔡孟霖 Meng-Lin Tsai |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 材料科學與工程系 Department of Materials Science and Engineering |
論文出版年: | 2020 |
畢業學年度: | 109 |
語文別: | 中文 |
論文頁數: | 135 |
中文關鍵詞: | 類鑽石碳 、PN接面 、光感測器 |
外文關鍵詞: | Diamond-like Carbon, P-N junction, Photodetector |
相關次數: | 點閱:178 下載:0 |
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[1] K. Bewilogua, D. Hofmann, " History of diamond-like carbon films from first experiments to worldwide applications," Surface & Coatings Technology, vol. 242, pp. 214 – 225, 2014.
[2] H. moriguchi, H. Ohara and M. Tsujioka, " History and Applications of Diamond-Like Carbon Manufacturing Processes," Sei technical review, vol. 82, pp. 52 –58, 2016.
[3] S. Tamulevičius, Š. Meškinis, T. Tamulevičius and H.G. Rubahn, " Diamond like carbon nanocompositeswith embedded metallic nanoparticles, " Rep. Prog. Phys., vol. 81, no.024501, 2018.
[4] Y. Yuryev, A. Yuryeva, D. Korzhenko and O. Stepanova, " Deposition of Diamond-like Carbon Films from the Magnetron Discharge Plasma, " 7th International Forum on Strategic Technology (IFOST), Tomsk, Russia, 18-21 Sept 2012.
[5] J. Robertson, " Diamond – like amorphous carbon, " Materials Science and Engineering R 37, pp. 129 – 281, 2002.
[6] J. Robertson, " Classification of Diamond – like Carbons, " C. Donnet and A. Erdemir (eds), Tribology of Diamond-Like Carbon Films: Fundamentals and Applications, Springer, 2008.
[7] Paul K. Chu, Liuhe Li, " Characterization of amorphous and nanocrystalline carbon films, " Materials Chemistry and Physics, vol. 96, pp. 253 – 277, 2006.
[8] Matej Janež, Bruno Trindade,Mitjan Kalin, " Electrical and Tribological Properties of DLC Coatings, " Joint European Master in Tribology of Surfaces and Interfaces, Coimbra, Jul, 2015.
[9] F.Li, S.Zhang, J.Kong, Y.Zhang, W.Zhang, " Multilayer DLC coatings via alternating bias during magnetron sputtering, " Thin Solid Films, vol. 519, pp. 4910 – 4916, 2011.
[10] A. C. Ferrari and J. Robertson, " Interpretation of Raman spectra of disordered and amorphous carbon, " The American Physical Society, vol. 61, pp.14095 –14107, 2000.
[11] A. C. Ferrari and J. Robertson, " Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond, " vol. 362, pp. 2477 – 2512, 2004.
[12] J. Robertson, " The deposition mechanism of diamond-like a-C and a-C: H,"Diamond and Related Materials, vol. 3, pp. 361 – 368, 1994.
[13] S. Kar and S. Chaudhuri, " Diamond and Diamond Like Carbon Films, " Transactions of the Indian Ceramic Society, vol. 62, pp. 129 – 139, 2003.
[14] A Razborsek and F Schwager, " Thin film systems for low TCR resistors, " Mettler lnstrumente AG, 8606 Greifensee, vol. 38, no. 8 -10 pp. 689 – 692, 1988.
[15] John S. Fisher and Peter M. Hall, " Termination Materials for Thin FilmR esistors," Proceedings of the IEEE, vol. 59, no. 10 pp. 1468 – 1473, 1971.
[16] Robert D. Gould, Safa Kasap, Asim K. Ray, Thin film, Springer Handbook of Electronic and Photonic Materials, pp. 645 – 703, 2017.
[17] U. Heckmann, R. Bandorf, H. Gerdes, M. Lübke, S. Schnabel, G. Bräuer, " New materials for sputtered strain gauges, " Procedia Chemistry, vol. 1, pp. 64 – 67, 2009.
[18] U. Heckmann, R. Bandorf, M. Petersen, V. Gwozdz, G. Bräuer, " Matching of Maximum Gauge Factor and TCR Zero Crossing of Me-DLC, " IEEE Sensors, Limerick, Ireland, 28-31 Oct, 2011.
[19] M. Petersen, U. Heckmann, R. Bandorf, V. Gwozdz, S. Schnabel, G. Bräuer, C.P. Klages, " Me-DLC films as material for highly sensitive temperature compensated strain gauges, " vol. 20, pp. 814 – 818, 2011.
[20] 劉博文, 光電元件導論, 全威圖書有限公司, 民國 96 年
[21] 林清富, 張炳章, 光電子學, 高立圖書有限公司, 2015.
[22] E. Bogatin, Signal and Power Integrity: Simplified. Prentice Hall, 2010.
[23] E. Monroy, F. Omnes, and F. Calle, " Wide-bandgap semiconductor
Ultraviolet photodetectors, " Semiconductor Science and Technology, vol.18, pp. R33 – R51, 2003.
[24] 江賢龍, 周玉崑, 電子學實習I, 台科大圖書股份有限公司, 民國108年.
[25] R. A. Ismail, A.M. Mousa, Z. T. Hussain, " Preparation and characteristics study of diamond like carbon/silicon heterojunction photodetector by pulsed laser deposition, " Optical and Quantum Electronics, vol.49, no.366, pp.1 –15, 2017.
[26] S. K. Sharma, D. S.Verma, L. U. Khan, S. Kumar, S. B. Khan, Handbook of Materials Characterization, Springer, 2018.
[27] Z. Xu, Z. He, Y. Song, X. Fu, M. Rommel, X. Luo, NA. Hartmaier, J. Zhang and F. Fang, " Topic Review: Application of Raman Spectroscopy Characterization in Micro/Nano-Machining, " Micromachines, vol. 9, no. 361, pp.1–23, 2018.
[28] S. K. N. Abadi, S. I. Hosseini, M. Momeni, H. Khaksaran, " Studying the effects of plasma produced species on the optical characteristics and bonding structure of diamond-like carbon films deposited by direct current unbalanced magnetron sputtering, " Materials Chemistry and Physics, vol. 229, pp. 348 – 354, 2019.
[29] O. D. Coskun, T. Zerrin, " Optical, structural and bonding properties of diamond-like amorphous carbon films deposited by DC magnetron sputtering," Diamond & Related Materials, vol. 56, pp. 29 – 35, 2015.
[30] D. Jiles, Introduction to the Electronic Properties of Materials, Chapman & Hall, 1994.
[31] B. E. Sernelious, K. F. Berggren, Z. C. Jin, I. Hambreg and C.G. Granqvist,
" Band - gap tailoring of ZnO by means of heavy Al doping, " Physical Review B. 37, pp. 10244 – 10248, 1998.
[32] S. Takabayashi, K. Okamoto, K. Motomitsu, A. Terayam,T. Nakatani, H. Sakaue, H. Suzuki, T. Takahagi, " New method to calibrate binding energy using Au nanocolloids in X-ray photoelectron analysis of diamondlike carbon films with different electrical resistivities," Applied Surface Science, vol. 254, pp. 2666 – 2670, 2008.
[33] 李明逵, 矽元件與積體電路製程, 全華圖書股份有限公司, 2007.
[34] 林貞君, 林旻澐, 材料科學與工程導論, 高立圖書股份有限公司, 2014.
[35] R. Chwang, B. J. Smith and C. R. Crowell, " Contact size effects on the Van der Pauw method for resistivity and Hall coefficient measurement," Solid-Slate Electronics, vol. 17, pp. 1217– 1227, 1974.
[36] L. J. Van der Pauw, "A method of measuring the resistivity and Hall coefficient
on lamellae of arbitrary shape, " Philips Technical Review, vol. 20, pp.220 – 224, 1958.
[37] D. Haddock, T Parker, C Spindloe and M Tolley, " Characterisation of Diamond-Like Carbon (DLC) laser targets by Raman spectroscopy, " Journal of Physics: Conference Series 713, pp.1- 6, 2016.
[38] Y. REN, H. K. WANG and F. DEUERLER, " Multi-Peak Fitting Analysis of Visible Raman Spectra on DLC Coatings Deposited by Vacuum Arc, " International Conference on Advanced Materials Science and Technology, Shenzhen, China, 30-31 Oct, 2016.
[39] F.C. Tai, S.C. Lee, J. Chen, C. Wie, S.H. Chang,” Multipeak fitting analysis of Raman spectra on DLCH film,” Journal of Raman Spectroscopy, vol. 40, pp. 1055 – 1059, 2009.
[40] Ai-Lin Shen and Tse-Chuan Chou, " Comparative Analysis of Trends Resulting from the Use of a Multi-Gaussian Curve Fitting Method Applied to the Visible Raman Spectra of Sputtered Amorphous Carbon, " Materials Transactions, vol. 52, no. 2, pp.258 – 260, 2011.
[41] 樊美公, 姚建年, 光功能材料科學, 科學出版社, 2013.
[42] 耿桂宏, 材料物理與性能學, 北京大學出版社, 2010.
[43] 余合興, 半導體材料與元件, 臺灣東華書局股份有限公司, 2007.
[44] R. Chaleawpong, N. Promrosa, A. Zkria, P. Charoenyuenyaoa, E. Abubakr,
T. oshitake, " Diode parameters and ultraviolet light detection characteristics of n-type silicon/p-type nanocrystalline diamond heterojunctions at different temperatures," Thin Solid Films, vol.709, pp.1 – 9, 2020.
[45] S. M. Sze, M. K. Lee, Semiconductor Devices Physics and Technology. John
Wley & Sons, Inc.