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研究生: 何承易
Cheng-Yi He
論文名稱: 類鑽石碳薄膜紅光與紅外光光感測器
Diamond-like Carbon Films for Red Light and IR Photodetector
指導教授: 周賢鎧
Shyan-kay Jou
口試委員: 胡毅
Yi Hu
蔡孟霖
Meng-Lin Tsai
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2020
畢業學年度: 109
語文別: 中文
論文頁數: 135
中文關鍵詞: 類鑽石碳PN接面光感測器
外文關鍵詞: Diamond-like Carbon, P-N junction, Photodetector
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  • 摘要 I Abstract III 誌謝 V 目錄 VII 圖目錄 X 表目錄 XVIII 第一章、緒論 1 1.1前言 1 1.2研究動機 3 第二章、文獻回顧 4 2.1 類鑽石薄膜之結構與性質 4 2.3 類鑽石薄膜之拉曼圖譜 5 2.2 類鑽石薄膜之成長機制 7 2.4 類鑽石薄膜製備之方法 9 2.4.1 射頻電漿放電化學氣相沉積法(Radio-Frequency CVD Method) 10 2.4.2 離子化化學氣相沉積法(PIG plasma CVD Method) 10 2.4.3 電漿輔助化學氣相沉積複合法或自我放電法(Plasma CVD-composite method or self discharge method) 10 2.4.4 電弧物理氣相沉積法(Arc PVD method) 11 2.4.5 濺鍍法(Sputtering) 11 2.5 薄膜電阻 12 2.5.1 影響薄膜電阻性質的因素 12 2.5.2類鑽石碳薄膜電阻實例 13 2.6光感測器元件 14 2.6.1光感測器原理 14 2.6.2光感測器種類[23] 16 2.6.3 p-n接面光二極體 17 2.6.4量測V-t曲線雜訊處理 17 2.7.類鑽石碳光感測器元件之文獻探討 18 第三章、實驗儀器與實驗方法 23 3.1實驗材料與藥品規格 23 3.2實驗設備與分析儀器 24 3.3實驗原理 25 3.3.1濺鍍系統(Sputtering system) 25 3.3.1.a 單支磁控式濺鍍槍與基板偏壓濺鍍系統 26 3.3.1.b 共磁控式濺鍍槍濺鍍系統 26 3.3.2場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscopy, FESEM) 27 3.3.3顯微拉曼光譜儀(Micro-Raman spectroscopy) 28 3.3.4紫外光-可見光分析儀(UV–vis Spectrophotometer) 29 3.3.5四點探針(Four-point probe) 31 3.3.6電阻溫度係數(TCR)量測系統 32 3.3.7霍爾效應量測系統 33 3.3.8光感測器量測系統 36 3.4實驗步驟 37 3.4.1實驗流程與分析 37 3.4.2基板清洗 37 3.4.3類鑽石碳(DLC)薄膜製備 38 3.4.4光感測器元件製備 38 第四章、結果與討論 41 4.1類鑽石碳薄膜之結構與性質探討 41 4.1.1表面形貌結果分析 41 4.1.2拉曼圖譜結果分析 44 4.1.3 UV- vis光譜結果分析 47 4.1.4電阻率量測結果分析 50 4.1.5電阻溫度係數(TCR)量測結果分析 52 4.1.6霍爾效應量測結果分析 53 4.2類鑽石碳光感測器元件量測結果分析 57 4.2.1光源632 nm LED 照射類鑽石碳光感測器電性分析 57 4.2.2光源875 nm LED 照射類鑽石碳光感測器電性分析 67 4.2.3光源934 nm LED 照射類鑽石碳光感測器電性分析 82 4.2.4類鑽石碳光感測器之研究結果 86 第五章、結論 94 第六章、未來展望 95 第七章、參考文獻 96 附錄 101

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