原子力顯微鏡系統主要採用高響應速度與高解析度的壓電致動器作為致動元件，常用於樣品表面之形貌輪廓掃描；此系統一般在固定幀率掃描下會產生周期性誤差，故有研究者提出以反覆控制器進行伺服設計來改良掃描成果。然而使用反覆控制器的一個問題是基頻中與其諧波的高增益容易激發系統高頻模態導致共振現象並降低成像品質。本研究為基於反覆控制器的控制架構下引入正位移回授控制器的設計方法改進上述共振問題並探討此壓電致動系統的運動控制效能。本研究將所設計之控制器演算法撰寫於客製之高速現場可程式化邏輯閘陣列系統，輔以高頻寬之光碟讀取頭作為位移感測器，完成取樣率高達1 MHz的閉迴路控制系統實現。由200 Hz方波追跡實驗結果可知，採用先設計反覆控制器再結合正位移回授控制器之設計法可得到較佳的上升時間；另外一個藉由先結合正位移回授控制器再依此閉迴路控制系統設計並加入反覆控制器的設計法則可獲得較佳的安定時間。

Piezoactuators are ubiquitous in atomic force microscopes (AFM) commonly used to scan the sample surface of a fixed frequency raster pattern and measure the mechanical properties of the surface. To improve the imaging quality, repetitive control (RC) has been proven as an effective control method for compensating the periodic errors associated with the periodic scanning process. However, the repetitive controller may also easily excites the resonant modes of the AFM system in light of using high control gain at the harmonics of the fundamental frequency in periodic signals. To alleviate the resonance problem, a positive position feedback (PPF) controller is incorporated into the repetitive control system for improved control performance. In this study, we propose an RC-PPF control system and analyze the performance compared with different control schemes. The experiments on tracking 200 Hz square waves demonstrate that (1) the control scheme that adds a PPF controller to an existing RC system can achieve a faster transient response; (2) the control scheme that designs a RC system using the feedback control system integrated with an existing PPF controller can result in a better resonance suppression control.

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