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研究生: 陳欣宏
HSIN-HUNG CHEN
論文名稱: 硫化鎵之晶體成長及光學特性研究
Crystal growth and optical properties of Ga2S3
指導教授: 何清華
Ching-Hwa Ho
口試委員: 黃鶯聲
Ying-Sheng Huang
趙良君
Liang-Chiun Chao
程光蛟
Kwong-Kau Tiong
學位類別: 碩士
Master
系所名稱: 應用科技學院 - 應用科技研究所
Graduate Institute of Applied Science and Technology
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 70
中文關鍵詞: 三六族半導體硫化鎵化學氣相傳導法熱調制光譜技術
外文關鍵詞: III-VI Semiconductor, Ga2S3, chemical vapor transports method, thermoreflectance technique
相關次數: 點閱:436下載:25
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本論文利用化學氣相傳導法 (Chemical vapor transport method, CVT) 成長硫化鎵晶體,目前成功成長出Ga2S3晶體,之後進行晶體結構與光學特性分析。藉由能量散佈儀 (Energy dispersive X-ray spectrometer, EDS) 量測可以確定成長材料之元素比與預期相符合。而利用X-ray晶格繞射 (X-ray diffraction, XRD) 以及拉曼散射光譜 (Raman scattering spectra) 分析可確定Ga2S3為單斜結構 (Monoclinic structure)。
光學量測上,從熱調制光譜 (Thermoreflectance, TR) 以及穿透實驗 (Transmittance) 可觀察出此Ga2S3為直接能隙半導體,在300 K下藉由熱調制光譜可發現三個躍遷分別在3.07 eV、3.24 eV及3.29 eV,稱為A、B及C,進而執行熱調制光譜之溫度相依實驗,發現此三個躍遷訊號的溫度-能量移動幅度不同,從20K-300K分別移了約240 meV、170 meV及150 meV,再藉由極化相依的熱調制光譜實驗,得知此B與C有極化相關性,因此判斷此三個訊號為不同的來源。由光激發螢光光譜 (Photoluminescence, PL) 的結果,可觀察到許多低於能隙的發光訊號,故可推斷樣品有缺陷態存在,在溫度相依的PL實驗中在近能隙位置觀察到束縛激子及自由激子的訊號。藉由本論文之研究,對Ga2S3晶體的能帶結構與光學特性,能有更進一步的了解。


Crystalline Ga2S3 has been grown by chemical vapor transport method using ICl3 as a transport agent. X-ray diffraction and Raman spectroscopy confirmed monoclinic structure for the as-grown gallium sulfide crystals. Energy dispersive spectroscopy (EDS) analysis verified the stoichiometry of the Ga2S3 compound.
The experimental near band edge structure of Ga2S3 was characterized by thermoreflectance (TR), photoluminescence (PL) and transmittance measurements. The experimental results confirmed that Ga2S3 is a direct semiconductor, which show three band-edge transitions of A = 3.07 eV、B = 3.24 eV and C = 3.29 eV at room temperature. Polarized TR measurements revealed B and C transitions are polarization dependent. From optical measurements of polarized TR, PL and transmittance, we can confirm A, B and C transitions in Ga2S3 are originated from different origins. Besides, by PL measurements, many lower-energy transitions which can be attributed to be the defect-state transitions are observed. The temperature dependences of PL measurements at low temperatures also identify the emissions of bound exciton and free exciton transitions of Ga2S3.
On the basis of experimental results, the optical properties of monoclinic Ga2S3 have thus been realized.

中文摘要 I Abstract II 誌謝 III 目錄 IV 圖目錄 VII 表目錄 X 第一章 前言 1 1.1 Ga2S3材料背景介紹 1 1.2 Ga2S3材料特性介紹 3 第二章 單晶硫化鎵之晶體成長 8 2.1 Ga2S3材料單晶成長方法 8 2.2 Ga2S3材料單晶的系統成長配置 10 2.2.1 高真空系統 10 2.2.2 長晶反應系統 13 2.3 長晶程序 15 2.3.1 元素比例及石英管清洗作業 15 2.3.2 Ga2S3的化合及單晶成長 17 第三章 調制光譜技術介紹 19 3.1 調制光譜簡介 19 3.2 理論依據 21 3.2.1 介電函數與反射率關係 21 3.3 量測原理 23 3.4 熱調制反射光譜技術 25 3.4.1 石英基板金膜製備之方式 25 3.4.2 熱調制光譜實驗的儀器架設流程 26 3.4.3 低溫系統 31 第四章 光學特性量測 32 4.1 光激發螢光光譜 32 4.1.1 光激發螢光光譜儀器架設流程 34 4.2 拉曼散射光譜 36 4.3 光吸收光譜 39 第五章 結果與討論 41 5.1 Ga2S3材料晶體結構特性分析 41 5.1.1 Ga2S3晶體外觀 41 5.1.2 能量散射光譜儀分析 43 5.1.3 X光晶格繞射(XRD)分析 45 5.2 拉曼光譜分析 49 5.3 Ga2S3近能隙傳導機制之探討 52 第六章 結論 65 參考文獻 66

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