近年來，隨著地球能源日漸枯竭，可不斷使用再生能源越來越受到重視，其中，太陽能為最受到重視之再生能源之一，於目前所有太陽能電池種類中，矽晶基板太陽能電池所使用之單、多晶矽基板主要運用複線式線鋸切削製程(Multi-wire sawing process)鋸切而成。本研究主要目的為探討線鋸切削製程所使用之導輪(Wire guide roller)溝槽磨耗變化，並以本研究自行製作之導輪磨耗測試機模擬測試比較不同條件之磨耗機制，以進一步增加不同製程參數影響，作為不同製程其導輪壽命評估之參考。本研究設定兩種切削參數(S1、S2)實際進行多晶矽碇之鋸切，量測其溝槽尺寸於不同使用時數下之變化後，以製程模型分析其受力以及各種因子對於其磨耗之影響。由實驗結果可知，導輪於長時間之使用過程中，會因鋼線偏擺以及鋼線運動慣性而對導輪溝槽產生一衝擊，進而使導輪產生磨耗。透過導輪受力以及磨耗模型可明顯得知導輪之外徑(ψroller)、線速度、溝槽間距、張力以及導輪軸距為影響導輪磨耗之因子，其中，以導輪外徑之影響最為顯著。本研究使用之線上導輪溝槽取樣分析手法以及所建立之導輪磨耗模型，未來可運用於不同線鋸製程下之導輪磨耗分析，作為評估導輪使用壽命之參考。

Recent year, multi-wire sawing process has been widely used for fabrication of silicon substrates for solar cell. This research is to investigate and evaluate the wear of wire guide roller (WGR) of wire sawing process. Polyurethane is often used for the material of WGR. Two sawing parameters of free abrasive sawing processes have been chosen to cut the multi-crystalline silicon ingots. The geometric deviation of grooves on wire guide roller has been measured to evaluate the wearing type in different processing time. The mechanical model has also developed to analyze the wear of grooves on wire guide roller. Result of experiment shows that wear of grooves on the wire guide roller significantly affects by the saw wire deflection and impact by wire inertia. The diameter of roller, wire speed, pitch of grooves, tension force and the length between rollers have been found as main factors of wear of wire guide roller. A wear test machine for free and fixed wire sawing has been designed and used to evaluate the wear of the polyurethane material for wire guide roller in different type of fixed and free abrasive wire sawing processes. Results of this study can conclude that the developed method of analysis model of wire guide roller wear can be used to evaluate the wear of grooves on the wire guide roller in the wire sawing process for further life time estimation of wire guide roller.

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