本研究利用磁控式共濺鍍系統沉積NiO-YSZ薄膜，並利用不同還原條件以形成具有奈米孔隙之Ni-YSZ陽極結構，用於固態氧化物燃料電池用來增加三相介面比例，降低反應極化電阻。
利用不同Ar與O2比例下反應式共濺鍍NiO 與8YSZ，並且透過熱氧化處理得到NiO-YSZ薄膜，再經由真空或氫氣氣氛(20%H2+80%Ar)之下還原，熱處理溫度與時間分別為800℃、2小時，可以形成連續奈米孔隙Ni-YSZ之薄膜。以上述方式得到之薄膜利用XRD的繞射分析得知其NiO-YSZ已還原成Ni-YSZ，再以FESEM去觀察其表面型態確定為多孔隙的結構，孔隙大小約略有數十個奈米。最後於碟型8YSZ基材之兩面分別以共濺鍍技術製備Ni-YSZ薄膜陽極，並且以厚膜印刷方式製備La0.7Sr0.3MnO3作為陰極，組成單一個燃料電池，並於單氣室量測系統下，通入甲烷（CH4）與乾燥空氣(Dry air)之混合氣體中，並且通入約3∼5％水氣，進行電池效能的量測。
根據電流密度與電壓曲線(I-V Curve)與電流密度與功率密度(I-P Curve)之曲線，於700℃下已經可以量到其單位面積之發電功率0.4 mW/cm2，並與利用網印製備Ni-YSZ厚膜陽極之固態氧化物燃料電池發電功率0.8mW/cm2比較，雖然測試結果薄膜陽極之固態氧化物燃料電池的發電效率不如厚膜陽極的，但是已經初步地驗證薄膜陽極應用於固態氧化物燃料電池之可行性。

In this research, we use magnetron co-sputter to deposit NiO-YSZ films, and use different reduced conditions to form porous Ni-YSZ anode films for solid oxide fuel cells(SOFC). The anode with nano-porous structure is expected to increase the three-phase area and reduce react polarization resistance in the fuel cell.
In this research, We used different Ar and O2 ratios to form NiO-YSZ film by co-sputter technology and subsequent thermal oxidation. The NiO-YSZ film could be reduced Ni-YSZ film in vacuum or hydrogen atmosphere at the high temperatures. The reduction was under taken at 800℃ for 2hrs.Ni-YSZ films were composed of network structure with continuous pores.
According to XRD analysis the NiO-YSZ could be reduced to Ni-YSZ. Based on FESEM results, the Ni-YSZ films were porous.
We use the Ni-YSZ as anode ,8YSZ disc as electrolyte and La0.7Sr0.3MnO3
as cathode to form a fuel cell. We tested the cell performance in a single chamber system using a mixture of CH4，dry air and water vapor. The maximum power density is 0.4mW/cm2 for this cell measured at 700℃.This result is not as good as the SOFC with thick film anode prepared by screen printing technology. Yet, we already prove feasibility of using Ni-YSZ thin film as the anode in SOFC.

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