本研究主要是探討以射頻磁控濺鍍(RF magnetron sputtering)之系統，搭配由附有析出奈米銀顆粒之奈米二氧化鈦粉體所自行製備之陶金靶材，於無加熱的基板上，以80 W功率濺鍍60分鐘，沉積具有光催化與抗菌功能之含有奈米銀顆粒的二氧化鈦光觸媒薄膜於鈉玻璃上。接著針對薄膜沉積進行相關的製程改變，如不同濺鍍基板溫度、退火氣氛與退火溫度，並對於在空氣中退火的薄膜進行不同方式還原處裡後，對這些經過不同製程條件處理之薄膜以X光繞射儀(XRD）分析薄膜的結構及結晶性；場發射掃描式電子顯微鏡（FESEM）觀察薄膜的表面形態；並以能量散佈光譜儀(EDS)半定量分析薄膜元素組成與銀含量變化。在光學性質量測方面，採用紫外光/可見光吸收光譜儀（UV-Vis spectrometer）量測薄膜樣品在不同光源下的光穿透與吸收率。薄膜試片的光催化活性分析則是使用汞氙燈作為光源，進行試片對Acid Black 1染料的降解速率做量測。最後，利用大腸桿菌進行抗菌能力測試。
實驗結果顯示，以本實驗方法所製備的Ag/TiO2薄膜表面形態非常平整，TiO2顆粒很小且平均，銀顆粒也是非常細小均勻地分佈在薄膜中，與以往Ag/TiO2薄膜出現有銀顆粒聚集析出於表面有極大之不同。在本實驗的試片中，以未經任何熱處理的3%銀含量TiO2靶材濺鍍之薄膜，有最佳的光催化效率，其在汞氙燈光源下照射80分鐘後，對50ml的AB1染料(10 ppm)可達18.79%的降解率，且在抗菌實驗中，3%銀含量的TiO2靶材濺鍍之薄膜，於20W的日光燈光源環境下，菌液與薄膜接觸60分鐘後，可達完全沒有菌落殘存的優異抗菌能力。但是推測由於Ag/TiO2薄膜厚度只有70~80 nm以及均勻細小的奈米銀分佈在TiO2周圍，晶粒成長困難，呈現奈米晶與結晶性不佳之問題，即使是經過600C退火處理後也是無法有效改善結晶性，惟仍展現出良好的光催化抗菌能力。經由退火過的試片中發現，在氮氣氣氛下進行退火處理會使Ag/TiO2薄膜中，表面能較高的奈米銀顆粒往表面析出並且聚集成大顆粒，而在空氣中進行退火處裡的話可以避免此問題，但是因為銀有可能會氧化，需要再做還原處理。

This research focused on the use of silver/titanium dioxide composite cermet targets, which were made by hot pressing the Ag nanoparticle-attached TiO2 powders, to deposit the Ag/TiO2 composite films on the sodium lime glass by RF magnetron sputtering for the applications of antibacteria and photocatalysis. The deposition temperature was room temperature and RF power was 80W. The thin films were also grown at different substrate temperatures and undergone the annealing at different temperatures and atmospheres. Vacuum reduction at 400 oC and the reduction by sodium boron hydride were used for the Ag/TiO2 films after oxidation in air.
For all the thin films, the structure and crystallinity of the specimens were determined by X-ray diffraction. The morphology of the films was observed by field emission scanning electron microscopy. An energy-dispersive spectrometer was used to measure the concentration of silver in the films. The absorption spectra of the films were analyzed by the ultraviolet-visible spectrometer. The photocatalytic efficiency of the films under mercury-xenon lamp illumination was evaluated by measuring the decomposition rate of Acid Black 1 in aqueous solution. Finally, the Escherichia coli (E-coli) was chosen for the in-vitro anti-bacterial analyses.
The experimental results indicated that the as-deposited Ag/TiO2 thin films had smooth surface morphologies, uniform and small grains, and the Ag nanoparticles existing at grain boundaries of TiO2. The use of Ag nanoparticles in Ag/TiO2 can avoid the Ag aggregation to form clusters. Once the Ag clusters were formed, the antibacterial performance of the Ag/TiO2 films degraded.
For all the specimens in this research, the Ag/TiO2 film made by sputtering with the 3%Ag/TiO2–made target on the un-heated substrates has the best photo-catalytic efficiency and excellent antibacterial properties. After 80 minutes under the Mercury Xenon lamp irradiation, the degradation rate of 50 ml AB1 dyes (10 ppm) can up to 18.79%. For the antibacterial experiments, the as-sputtered 3%Ag/TiO2 films on the un-heated substrate exhibited excellent antibacterial properties without any remained colonies after bacteria contacted with the film for 60 minutes under the 20W fluorescent light. The as-deposited TiO2 and Ag/TiO2 films all showed the difficulty in crystallization after post-annealing. The reasons for the crystallization problem can be attributed to the thin film thickness of 70~80 nm and the finely distributed Ag nanoparticles around the TiO2 grain boundaries to retard the grain growth. If the as-deposited Ag/TiO2 films were annealed under the nitrogen atmosphere, Ag nanoparticles with high surface energy preferred to aggregate on the film surface. If the as-deposited Ag/TiO2 films were annealed in air, Ag nanoparticles were oxidized and no aggregation occurred. The oxidized Ag/TiO2 films showed good photocatalytic performance after they were reduced by NaBH4. However, the NaBH4-reduced Ag/TiO2 films showed a degraded antibacterial ability.

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