本文主要探討模型預測控制(Model Predictive Control, MPC)於雙行程致動器系統之伺服設計方法與應用。由於MPC可將限制條件納入，並針對多輸入多輸出系統求解其最佳控制變化量，而這些良好的特點正好符合雙行程系統伺服控制設計需求，所以近年來有許多文獻將此控制方法應用於雙行程致動器系統。為了在追跡控制的過程中有效率調節主致動器與次致動器的工作量，使其達到高速、高精密追跡效能，本研究提出一新型成本函數，在最佳化的過程中同時考量主致動器與參考輸入之間的誤差權重及總行程的誤差權重，藉此提高雙行程系統追跡控制效能。為了減輕MPC求解時的龐大運算量本研究依線性系統理論提出一較保守的輸出限制方法以便系統實現。由點對點定位實驗結果證實能有效達到良好的追跡控制效能，所提之輸出限制方法亦能有效克服飽和與運算量的問題。除此之外，本研究針對精密加工實際應用設計一複合週期參考輸入進行深入探討，並採用能處理多週期信號的反覆模型預測控制器來提升誤差收斂速度與改善週期性追跡誤差。實驗結果顯示所提出之MPC設計可大幅提升追跡控制效能，當週期性運動伴隨著輸出干擾時，以MPC進行限制條件處理確可有效降低週期性干擾的影響。為了方便討論本文亦提出一個簡易同步性效能量化評估方式，證實所提控制器確能達到良好的追跡效能。

This thesis discusses the servo design of a dual stage actuator (DSA) based on model predictive control (MPC). Because MPC is a MIMO optimal control method which can considers the influences of the system constraints in the controller design process, recently many researchers have applied this advanced control technique to dual stage actuator system (DSA) servo design for better control performance. To ef-ficiently manage the control action of the primary actuator and the secondary actuator for achieving high speed and high precision tracking, this study proposes a new per-formance index function in the MPC design. The idea is to include the tracking error of the primary actuator into the optimization process besides the DSA tracking error. To reduce the computational burden caused by the conventional hard constraints, this study also proposes a conservative output constraint condition on the secondary actu-ator for implementation. Point-to-point tracking control experimental results demon-strate that adding the proposed performance index and constraint condition has sub-stantially improved the tracking performance and alleviated the saturation issues. In addition, this study has applied a complex reference profile to further evaluate the practicability of the MPC for DSA servo design. A repetitive model predictive control is proposed to handle the multi-period tracking errors. Experimental results show that the proposed MPC design significantly improves the control performance even subject to output disturbances. Finally, a quantitative assessment method is presented for the synchronization performance of DSA systems.

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