本論文透過常壓電漿表面處理技術於金屬表面進行功能性防蝕鍍膜之工程研究，研究項目包含（1）旋轉式常壓電漿於AZ91D鎂合金表面製備防蝕鍍膜技術、（2）常壓電漿綠色製程於鍍鋁AZ91D鎂合金表面製備防蝕膜層技術及（3）常壓電漿於銅鍍鉻水五金表面製備功能性鍍膜技術之製程研究與開發。
在技術（1）中，本研究使用自行開發之旋轉式常壓電漿鍍膜噴頭系統，透過霧化器將前驅物四乙氧基矽烷（Tetraethoxysilane，TEOS）進行霧化，並以氧氣為載氣氣體將四乙氧基矽烷帶入電漿氣氛中進行裂解，裂解之氧化矽團經氧氣載氣氣體導引出旋轉噴頭後於AZ91D鎂合金表面進行沉積，後以旋轉塗佈機將1H，1H，2H，2H-全氟辛基三乙氧基矽烷（triethoxy-1H，1H，2H，2H-tridecafluoro-n-octylsilane，FAS-13）均勻塗佈在試片表面並於烘箱中乾燥完成試片製備。在該技術實驗結果顯示，甫透過常壓電漿沉積程序所製備之氧化矽膜層表面具有較高親水性，其表面能達到68.4 mN/m，而在氧化矽表面具有高能量情況下進行後續FAS-13塗佈將使鍍膜具有較佳鍵結性（附著測試達到ASTM標準4B等級）。由接觸角及電化學檢測中，FAS-13功能性鍍膜顯示其具有疏水性及疏油性，並且顯示出比AZ91D（8.17x10-2 μA/cm2）更低的腐蝕電流密度（2x10-6 μA/cm2）。因此，實驗結果顯示氧化矽中間層不僅能與鎂合金有良好附著性，且能與FAS-13進行鍵結，從而提升膜層之耐腐蝕性，疏水性和疏油性。
在技術（2）中，研究項目將先以直流式磁控濺鍍系統沉積金屬鋁薄膜於AZ91D鎂合金表面，且透過陽極氧化表面處理製程及常壓電漿表面處理製程等兩項製程程序分別進行抗蝕膜層製備，並評估常壓電漿表面處理製程製備抗蝕膜層之可行性。為確保鋁膜層之濺鍍鍍膜品質，本研究項目透過百格刀檢測法（Adhesion cross cut test, ACCT）進行膜層破壞性檢測，其膜層附著性皆達到4B等級（ASTM標準）。在陽極氧化表面處理製程程序中，陽極氧化膜層隨著時間增加而增厚，且其表面以非晶氧化鋁結構為主。其中，以陽極氧化時間參數為15分鐘之試片具有膜層最佳抗蝕性，而其腐蝕電流密度為2.87 x 10-4 μA/cm2，且電化學阻抗值達4.2x104 Ωcm2。而在常壓電漿表面處理製程中，電化學阻抗頻譜分析（EIS）及動電位極化曲線分析之量測結果顯示，經由電漿表面處理後距離參數為15 mm之試片具有最佳電化學阻抗值6403 Re（Z）/Ohm，及相較低的腐蝕電流密度值5.794 x 10-3 μA/cm2。藉由本研究項目初步結果顯示，陽極氧化表面處理製程之膜層抗蝕性雖仍優於常壓電漿表面處理製程，然而常壓電漿表面處理製程程序於製備過程中並無任何污染源產生且其膜層已具備抗蝕性能，因此本研究項目成功以常壓電漿表面處理技術進行AZ91D鎂合金表面抗蝕膜層之綠色製程開發。
在技術（3）中，該研究項目透過真空濺鍍法沉積氧化矽薄膜於水五金表面作為媒介膜層（Glue layer），並透過常壓電漿表面處理技術對氧化矽進行表面改質以提升表面分子鍵結性，後塗佈AF抗污藥劑（Anti-Fingerprint agent）於試片表面並乾燥完成試片製備。該技術實驗結果顯示，氧化矽膜層經由X-ray檢測為非晶氧化矽結構，且奈米壓痕SPM+表面形貌模式顯示常壓電漿表面前處理並未對氧化矽膜層表面造成形貌破壞，透過FIB觀察膜厚發現經常壓電漿前處理之AF膜層膜厚與未經常壓電漿前處理之厚度分別為34 nm及18 nm，近乎兩倍的差異顯示常壓電漿前處理能增加AF藥劑於氧化矽表面之接枝量。然而，經常壓電漿表面前處理較厚的膜層在光學反射性相較未經電漿處理之試片卻有較高的透光性，亦即膜層接近透明且結構完整具有較少缺陷。此外，透過實際試片演示亦顯示經本技術所製備之抗污膜層具有顯著抗污效果，水性及油性顏料皆難以沾附於所製備之膜層表面。因此，本研究項目成功透過濺鍍法沉積氧化矽薄膜於水五金表面並在常壓電漿表面後塗佈AF抗污藥劑（Anti-Fingerprint agent）達成耐磨性抗污膜層之製備。

This study describes the surface engineering applications of fabricating functionally anti-corrosive coatings by atmospheric pressure plasma jet (APPJ) technology on metals, including the issues of (1) Anti-corrosive thin film fabrication process on AZ91D magnesium alloys, (2) Surface modification process on AZ91D/Al specimen for improving the corrosion resistance, and (3) Functional protective coating deposition process on chrome-plated brass substrate.
For the issue (1), the procedures of fabricating functional composite coating on AZ91D magnesium alloy substrates by a self-developed rotated-type jet head in APPJ system were implemented. Tetraethoxysilane (TEOS) was used as chemical precursor and generated atomized droplets by using a 2.45 MHz piezoelectric oscillator. During the deposition process, the precursor was transferred to the plasma region by O2 carrier gas and finally deposited as a SiOx layer on AZ91D substrate, and subsequently 1H,1H,2H,2H-perfluorooctyltriethoxysilane (FAS-13) was coated on SiOx/AZ91D samples by a spin coater to alter its surface hydrophobicity. In this issue, APPJ-deposited SiOx film showed a hydrophilic surface with a surface energy of 68.4mN/m. With the enhancement of high surface energy by APPJ-deposited SiOx, more functional groups were beneficially generated for grafting the FAS-13 coating. (The coating adhesion quality was ranked as 4B according to ASTM standard.) From the results of contact angle and electrochemical measurement, FAS-13 functional coating revealed the properties of hydrophobicity and oleophobicity, and showed a lower corrosion current density (2x10-6 μA/cm2) than AZ91D (8.17x10-2 μA/cm2). Thus, this issue involves coating the FAS-13 on an APPJ-deposited SiOx intermediate layer that bonds to metals and also supplies -OH groups for silane bonding for improving corrosion resistance, hydrophobicity and oleophobicity is feasibly achieved.
For the issue (2), sputtered-Al film to form the oxide coating as an anticorrosion layer on AZ91D magnesium alloy was performed by two surface modification processes of anodic aluminum oxidation (AAO) method and APPJ method, and reported the feasibility of fabricating an anti-corrosive coating on AZ91D via APPJ technology. To ensure the coating adhesion quality, adhesion cross cut test (ACCT) was applied on AZ91D/Al specimen, and the Al film on AZ91D showed a ranking level of adhesive quality as 4B according to ASTM standard. For the AAO method, the cross-sectional SEM images showed an increase on the thickness of anodized oxide layer with increasing oxidation duration, and the aluminum oxide was mainly composed of amorphous structure. From the results of anticorrosion test, the potentiodynamic polarization measurement and the electrochemical impedance spectroscopy (EIS) showed that the specimen with 15 min anodizing treatment had a lowest corrosion current density (2.87x10-4 μA/cm2) and highest charge transfer resistance (4.2x104 Ω cm2), respectively. These results proved that Al oxide/Al bi-layer coating on AZ91D alloys is significantly improved the corrosion resistance behaviors and the optimal parameter for AAO process is 15 min. For the APPJ method, the potentiodynamic polarization measurement and the electrochemical impedance spectroscopy (EIS) showed that the specimen with 15 mm APPJ treating distance had a lowest corrosion current density (5.79x10-3 μA/cm2) and highest charge transfer resistance (6.4x103 Ω cm2), respectively. Though the specimen fabricated by AAO process possesses properties of a higher corrosion resistance and a thicker protective film, APPJ modification method shows a more environment-friendly process without any chemical waste. Therefore, the results demonstrate that the feasibility of integrating APPJ process on the sputtered-Al film for improving the surface anticorrosion properties of AZ91D magnesium alloy substrate is practically achieved.
Issue (3) demonstrated the procedure of fabricating an anti-finger coating on brass/plated-Cr substrates by the combination of two processes: (a) Sputtering and (b) Atmospheric pressure plasma jet (APPJ). APPJ surface treatment on sputtered-SiOx glue layer on plated-Cr/brass substrate was conducted to improve its surface property to be hydrophilic for chemical bonding with an anti-fingerprint agent (AF-C01), and the thickness of AF coating on APPJ-treated SiOx/plated-Cr/brass sample was somewhat thicker (34 nm) than the sample without APPJ treatment (18 nm). It could be postulated that the APPJ treatment uniformly modifies the SiOx glue layer more hydrophilic and efficiently enhance the grafting yield of AF coating. From the result of SPM+ images, only slight difference for the roughness between the SiOx film without and with APPJ pretreatment was found, which indicates the surface of SiOx layer was not damaged by APPJ treatment. From the optical reflectance spectra (ORS) measurement, the sample without APPJ pretreatment on SiOx glue layer showed the degradation on the optical reflectance as compared to the sample with APPJ pretreatment. This implies that a decrease in defects in the film led to a higher optical transmittance. In addition, the ink coloring test method indicating the properties of hydrophobicity and oleophobicity of bilayer prepared by combining two processes of sputtering and APPJ technologies were obtained. Therefore, this issue involves coating the AF solution on a sputtered-SiOx intermediate layer pretreated by APPJ that bonds to metals and also supplies –OH groups for silane bonding for improving abrasion resistance and hydrophobicity is feasibly achieved.

[1] A.F. Holleman, N. Wiberg, "Lehrbuch der Anorganischen Chemie," Walter de Gruyter, vol. 108, pp. 2696-2696, 2007.
[2] H. Altun, S. Sen, "The effect of PVD coatings on the corrosion behaviour of AZ91 magnesium alloy," Materials and Design, vol. 27, pp. 1174, 2006.
[3] Y. Xin, K. Huo, T. Hu, G. Tang, P. K. Ch, "Mechanical properties of Al2O3/Al bi-layer coated AZ91 magnesium alloy," Thin Solid Films, vol. 517, pp. 5357, 2009.
[4] Y. Liu, F. W. Yang, Z. L. Wei, Z. Zhang, "Anodizing of AZ91D magnesium alloy using environmental friendly alkaline borate-biphthalate electrolyte," The Transactions of Nonferrous Metals Society of China, China, vol. 22, pp. 1778, 2012.
[5] C. E. Barchiche, E. Rocca, C. Juers, J. Hazan, J. Steinmetz, "Corrosion resistance of plasma-anodized AZ91D magnesium alloy by electrochemical methods," Electrochimica Acta, vol. 53, pp. 417, 2007.
[6] G. Song, A. Atrens, D. Stjohn, J. Nairn, Y. Li, "The electrochemical corrosion of pure magnesium in 1 N NaCl," Corrosion Science, vol. 39, pp. 855-875, 1997.
[7] H. K. Lim, D. H. Kim, J. Y. Lee, W. T. Kim, D. H. Kim, "Effects of alloying elements on microstructuresand mechanical properties of wrought Mg-MM-Sn alloy," Journal of Alloys and Compounds, vol. 468, pp. 308, 2009.
[8] T. T. Wan, Z. X. Liu, M. Z. Bu, P. C. Wang, "Effect of surface pretreatment on corrosion resistance and bond strength of magnesium AZ31 alloy," Corrosion Science, vol.66, pp. 33, 2013.
[9] G. Song, A. Atrens, "Corrosion mechanisms of magnesium alloys," Advanced Engineering Materials, vol. 1, pp. 11, 1999.
[10] A. Atrens, G.L. Song, M. Liu, Z. Shi, F. Cao, M.S. Dargusch, "Review of recent developments in the field of magnesium corrosion," Advanced Engineering Materials, vol.17, pp. 400, 2015.
[11] K. Z. Chong, T. S. Shih, "Conversion-coating treatment for magnesium alloys by a permanganate-phosphate solution," Materials Chemistry and Physics, vol. 80, pp. 191, 2003.
[12] R. Arrabal, E. Matykina, T. Hashimoto, P. Skeldon, G. E. Thompson, "Characterization of AC PEO coatings on magnesium alloys," Surface and Coatings Technology, vol. 203, pp. 2207, 2009.
[13] R. G. Hu, S. Zhang, J. F. Bu, C. J. Lin, G. L. Song, "Recent progress in corrosion protection of magnesium alloys by organic coatings," Progress in Organic Coatings, vol. 73, pp. 129, 2012.
[14] X. Zhong, Q. Li, B. Chen, J. Wang, J. Hu, W. Hu, "Effect of sintering temperature on corrosion properties of sol-gel based Al2O3 coatings on pre-treated AZ91D magnesium alloy," Corrosion Science, vol. 51, pp. 2950, 2009.
[15] Y. L. Kuo, K. H. Chang, C. Chiu, "Carbon-free SiOx ultrathin film using atmospheric pressure plasma jet for enhancing the corrosion resistance of magnesium alloys," Vacuum, vol. 146, pp. 8, 2017.
[16] F. Liu, D. Shan, Y. W. Song, E. H. Han, W. Ke, "Corrosion behavior of the composite ceramic coating containing zirconium oxides on AM30 magnesium alloy by plasma electrolytic oxidation," Corrosion Science, vol. 53, pp. 3845, 2011.
[17] P. Liu, X. Pan, W. H. Yang, K. Y. Cai, Y. S. Chen, "Al2O3–ZrO2 ceramic coatings fabricated on WE43 magnesium alloy by cathodic plasma electrolytic deposition," Materials Letters, vol. 70, pp. 16, 2012.
[18] J. E. Gray, B. Luan, "Corrosion of AZ91D magnesium alloy with a chemical conversion coating and electroless nickel layer," Journal of Alloys and Compounds, vol. 336, pp. 88, 2002.
[19] T. S. Cale, G. B. Raupp, and T. H. Gandy, "Characterization and corrosion studies of fluoride conversion coating on degradable Mg implants," Vacuum Science and Technology, pp. 1128, 1992.
[20] D. Wang, G. P. Bierwagen, "Review Sol–gel coatings on metals for corrosion protection," Progress in Organic Coatings, vol. 64, pp. 327, 2009.
[21] J. H. Syu, J. Y. Uan, M. C. Lin, Z. Y. Lin, "Optically transparent Li–Al–CO3 layered double hydroxide thin films on an AZ31 Mg alloy formed by electrochemical deposition and their corrosion resistance in a dilute chloride environment," Corrosion Science, vol.68, pp. 238, 2013.
[22] M. Campo, M. Carboneras, M. D. López, B. Torres, P. Rodrigo, E. Otero, J. Rams, "Corrosion resistance of thermally sprayed Al and Al/SiC coatings on Mg," Surface and Coatings Technology, vol. 203, pp. 3224, 2009.
[23] H. Altun, S. Sen, The effect of DC magnetron sputtering AlN coatings on the corrosion behaviour of magnesium alloys, "The effect of DC magnetron sputtering AlN coatings on the corrosion behaviour of magnesium alloys," Surface and Coatings Technology, vol.197, pp. 193, 2005.
[24] Y. L. Kuo, K. H. Chang, "Atmospheric pressure plasma enhanced chemical vapor deposition of SiOx films for improved corrosion resistant properties of AZ31 magnesium alloys," Surface and Coatings Technology, vol. 283, pp. 194, 2015.
[25] S. E. Babayan, J. Y. Jeong, V. J. Tu, J. Park, G. S. Selwyn, R. F. Hicks, "Deposition of silicon dioxide films with an atmospheric-pressure plasma jet," Plasma Sources Science and Technology, vol. 7, pp. 286, 1998.
[26] S. E. Babayan, J. Y. Jeong, A. Schutze, V. J. Tu, M. Moravej, G. S. Selwyn, R. F. Hicks, "Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure plasma jet," Plasma Sources Science and Technology, vol. 10, pp. 573, 2001.
[27] J. Schafer, R. Foest, A. Quade, A. Ohl, K-D Weltmann, "Local deposition of SiOx plasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)," Journal of Physics D: Applied Physics, vol. 41, pp. 1, 2008.
[28] T. Takamatsu, K. Uehara, Y. Sasaki, H. Miyahara, Y. Matsumura, A. Iwasawa, N. Ito, T. Azuma, M. Kohno, A. Okino, "Investigation of reactive species using various gas plasma," RSC Advances, vol. 4, pp. 39901-39905, 2014.
[29] 林暐霖, "台灣隱形冠軍企業成長動態之研究─以彰化水五金產業為例; The growth dynamic of hidden champion enterprise in Taiwan ─A case study of plumbing hardware industry in Changhua," 2017.
[30] William Crookes, "On Radiant Matter," The Popular Science Monthly, vol. 16, pp. 157, 1880.
[31] I. Langmuir, "Oscillations in Ionized Gases," Proceedings of the National Academy of Sciences, vol. 14 (8), pp. 627–637, 1928.
[32] G.S. Selwyn et.al, "Materials Processing Using an Atmospheric Pressure,RF-Generated Plasma Source," Contributions to Plasma Physics, vol. 6, pp. 610, 2001.
[33] 劉志宏、黃駿、許文通、蔡禎輝與張所鋐, "以大氣電漿進行材料表面微米級圖案化之加工技術," 機械工業雜誌, vol. 306, pp. 66, 2008.
[34] 楊士賢, "以脈衝式電漿輔助化學氣相沉積法製備氟化非晶碳膜之研究," 中原大學化學工程學系碩士論文, 2005.
[35] B. Eliasson、U. Kogelschatz, "Non Equilibrium Volume Plasma Chemical Processing," IEEE Transaction on Plasma Science, vol. 19 (6), pp. 1063-1077, 1991.
[36] 洪昭南、郭有斌, "電漿反應器與原理," 化工技術, vol. 9 (10), pp. 156-176, 2001.
[37] 洪昭南、徐逸明, "常壓電漿原理、技術與應用," 國立成功大學化學工程系, 2011.
[38] C. L. Ko, Y. L. Kuo, J. Y. Guo, J. L. Wang, S. Y. Chen, "Funtional FAS-13/SiOx composite coatings for improved anticorrosion and hydrophobicity/ oleophobicity on AZ91D magnesium alloys," Japanese Journal of Applied Physics, vol. 58, pp. SAAD03-1- SAAD03-6, 2019.
[39] 盛信儒, "大氣等離子技術資料," 淞耀企業股份有限公司, 2017.
[40] Y.I. YUN, et.al, "Aging behavior of oxygen plasma-treated polypropylene with different crystallinities," Journal of Adhesion Science and Technology, vol. 18, pp. 1279–1291, 2004.
[41] DP Dowling, "Surface Processing Using Cold Atmospheric Pressure Plasmas," Elsevier, pp. 171-183, 2014.
[42] A. Grill, "Cold Plasma in Materials Fabrication: From Fundamentals to Applications," John Wiley & Sons, Inc., New York, 1994.
[43] J. L. Vossen and W. Kern, "Thin Film Processes II," Academic Press, Inc., Bonton, 1991.
[44] 何主亮, "材料進階實驗（一）電漿基礎實驗-電漿基礎實驗,".
[45] J. R. Roth, "Industrial Plasma Engineering /1, Principles," Bristol: Institute of Physics, 2003.
[46] S. Kanazawa, M. Kogoma, T. Moriwaki, and S. Okazaki, "Stable glow plasma at atmospheric pressure," Journal of Physics D: Applied Physics, vol. 21, pp. 836-840, 1988.
[47] T. Yokoyama, M Kogoma, T Moriwaki, S. Okazaki, and T. Yokoyama, "The mechanism of the stabilisation of glow plasma at atmospheric pressure," Journal of Physics D: Applied Physics, vol. 23, pp. 1125-1128, 1990.
[48] Brian Chapman, "Glow Discharge Processes-Sputtering and Plasma Etching," John Wiley & Sons, New York, (1980).
[49] Peter M. Martin, "Handbook of Deposition Technologies for Films and Coatings," William Andrew, 2009.
[50] Milton Ohring, "The Materials Science of Thin Films," Academic Press, San Diego, 1992.
[51] T. Nenadovic, B. Gakovic, B. Todorovic, T. Jokic, "Sputtering yield and morphological changes of TiB2 coatings induced by different incident beams," Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 115, pp. 523-527, 1996.
[52] A. Rockett, Lecture notes, "Sputter deposition of thin films," University of Illinois, U.S.A., 1998.
[53] Rui Miguel Dos Santos Martins, "In-situ X-Ray diffraction studies during growth of Ni-Ti Shape Memory Alloy films and their complementary ex-situ characterization," Universidade de Lisboa, 2008.
[54] D. L. Smith, "I Thin film Deposition Principles and Practice," The McGraw Hill Companies, Inc., pp. 470-507, 1999.
[55] A. Schutze, J. Y. Jeong, S. E. Babayan, J. Park, G. S. Selwyn, and R. F. Hicks, "The atmospheric-pressure plasma jet: A review and comparison to other plasma sources," IEEE Transactions on Plasma Science, vol. 26, pp. 1685-1694, 1998.
[56] H. Schmid, B. Kegel, W. Petasch, and G. Liebel, "Low pressure plasma processing in microelectronics," presented at the Proc. Joint 24 th Int. Conf. Microelectronics (MIEL) and 32nd Symp. Devices Materials SD'6, Slovenia, 1996.
[57] M. A. Liebermann, A. L. Lichtenberg, "Principles of Plasma Discharges and Materials Processing," John Wiley & Sons, Inc., New York: Wiley, 1994.
[58] J. R. Roth, J. Rahel, X. Dai, and D. M. Sherman, "The physics and phenomenology of one atmosphere uniform glow discharge plasma (OAUGDP (TM)) reactors for surface treatment applications," Journal of Physics D-Applied Physics, vol. 38, pp. 555-567, 2005.
[59] J. R. Roth, S. Nourgostar, T. A. Bonds, "The one atmosphere uniform glow discharge plasma (OAUGDP) - A platform technology for the 21st century," IEEE Transactions on Plasma Science, vol. 35, pp. 233-250, 2007.
[60] D. Pappas, "Status and potential of atmospheric plasma processing of materials," Journal of Vacuum Science & Technology A, vol. 29, pp. 020801-020801-17, 2011.
[61] K. G. Kostov, R. Y. Honda, L. M. S. Alves, and M. E. Kayama, "Characteristics of Dielectric Barrier Discharge Reactor for Material Treatment," Brazilian Journal of Physics, vol. 39, pp. 322-325, 2009.
[62] B. M. Penetrante, M. C. Hsiao, B. T. Merritt, G. E. Vogtlin, P. H. Wallman, M. Neige, "Pulsed corona and dielectric-barrier discharge processing of NO in N-2," Applied Physics Letters, vol. 68, pp. 3719-3721, 1996.
[63] J. S. Chang, P. A. Lawless, and T. Yamamoto, "Corona Discharge Processes," IEEE Transactions on Plasma Science, vol. 19, pp. 1152-1166, 1991.
[64] N. Tippayawong and P. Khongkrapan, "Development of a laboratory scale air plasma torch and its application to electronic waste treatment," International Journal of Environmental Science and Technology, vol. 6, pp. 407-414, 2009.
[65] T. B. Reed, "Induction-Coupled Plasma Torch," Journal of Applied Physics, vol. 32, pp. 821-824, 1961.
[66] N. Jiang, A. L. Ji, and Z. X. Cao, "Atmospheric pressure plasma jet: Effect of electrode configuration, discharge behavior, and its formation mechanism," Journal of Applied Physics, vol. 106, p. 013308-1-013308-7, 2009.
[67] M. J. Owen, "Why Silicones Behave Funny," Chemtech, vol. 11, pp. 288-292, 1981.
[68] J. P. Mollie, "Silicone materials for electronic components and circuit protection," Kluwer Academic Publishers, 1999.
[69] A. L. Smith, "The Analytical Chemistry of Silicones," Wiley-Inter science, vol. 112, 1991.
[70] R. Bärsch, J. Lambrecht, H. J. Winter, "On the Evaluation of Influences on the Hydrophobicity of Silicone Rubber Surfaces," presented at the 10th International Symposium on High Voltage Engineering, Montreal, 1997.
[71] J. Kindersberger, M. Kuhl, and R. Bärsch, "Evaluation of the Conditions of Non-Ceramic Insulators after Long-Term Operation under Service Conditions," presented at the 9th International Symposium on High Voltage Engineering, Graz, 1995.
[72] H. L. Chen and L. A. Wang, "Hexamethyldisiloxane film as the bottom antireflective coating layer for ArF excimer laser lithography," Applied Optics, vol. 38, pp. 4885-4890, 1999.
[73] H. Nagai, M. Hori, T. Goto, T. Fujii, and M. Hiramatsu, "Fabrication of multilayered SiOCH films with low dielectric constant employing layer-by-layer process of plasma enhanced chemical vapor deposition and oxidation," Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers, vol. 42, pp. 2775-2779, 2003.
[74] Y. Y. Ji, Y. C. Hong, S. H. Lee, S. D. Kim, S. S. Kim, "Formation of super-hydrophobic and water-repellency surface with hexamethyldisiloxane (HMDSO) coating on polyethyleneteraphtalate fiber by atmosperic pressure plasma polymerization," Surface and Coatings Technology, vol. 202, pp. 5663-5667, 2008.
[75] S. Yeo, T. Kwon, C. Choi, H. Park, J. W. Hyun, D. Jung, "The patterned hydrophilic surfaces of glass slides to be applicable for the construction of protein chips," Current Applied Physics, vol. 6, pp. 267-270, 2006.
[76] S. J. Jian, C. S. Kou, J. Hwang, C. D. Lee, W. C. Lin, "Orientating layers with adjustable pretilt angles for liquid crystals deposited by a linear atmospheric pressure plasma source," Review of Scientific Instruments, vol. 84, pp. 063501-1-063501-7, 2013.
[77] X. Y. Xu, L. Li, S. G. Wang, L. L. Zhao, and T. C. Ye, "Deposition of SiOx films with a capacitively-coupled plasma at atmospheric pressure," Plasma Sources Science and Technology, vol. 16, pp. 372-376, 2007.
[78] F. F. Shi, "Recent advances in polymer thin films prepared by plasma polymerization Synthesis, structural characterization, properties and applications," Surface and Coatings Technology, vol. 82, pp. 1-15, 1996.
[79] N. Tomozeiu, "SiOx thin films deposited by r.f. magnetron reactive sputtering: structural properties designed by deposition conditions," Journal of Optoelectronics and Advanced Materials, vol. 8, pp. 769-775, 2006.
[80] M. Goldman and N. Goldman, "Corona discharges," Gaseous Electronics,Eds, vol. 1, pp. 219-290, New York, 1978.
[81] Sid Ahmed Ahmedou Saleck, Olivier Rouaud, Michel Havet, "Electrohydrodynamic enhancement of heat and mass transfer in food processes," CIGR Section VI-3rd International Symposium – Food and Agricultural Products: Processing and Innovations, 2007.
[82] M. Hur, S. H. Hong, "Comparative analysis of turbulent effects on thermal plasma characteristics inside the plasma torches with rod- and well-type cathodes," Journal of Physics D: Applied Physics, vol. 35, pp. 1946-1954, 2002.
[83] J.F. Puna, Maria Teresa Santos, "Thermal Conversion Technologies for Solid Wastes: A New Way to Produce Sustainable Energy," Waste Management, 2010.
[84] U. Kogelschatz, "Filamentary, Patterned, and Diffuse Barrier Discharges," IEEE Transactions on Plasma Science, vol. 30, pp. 1400-1408, 2002.
[85] Kogelschatz, Ulrich, Baldur Eliasson, Walter Egli, "From ozone generators to at television screens: history and future potential of dielectric-barrier discharges," Pure Applied Chemistry, vol. 71, pp. 1819-1828, 1999.
[86] J. Y. Jeong, S. E. Babayan, J. P. V. J. Tu, R. F. Hicks, G. S. Selwyn, "Etching materials with an atmospheric-pressure plasma jet," Plasma Sources Science and Technology, vol. 7, pp. 282–285, 1998.
[87] F. Lisco, A. Shaw, A. Wright, J.M. Walls, F. Iza, "Atmospheric-pressure plasma surface activation for solution processed photovoltaic devices," Solar Energy, vol. 146, pp. 287–297, 2017.
[88] N. Jidenko, C. Jimenez, F. Massines, J. P. Borra, "Nano-particle size-dependent charging and electro-deposition in dielectric barrier discharges at atmospheric pressure for thin SiOx film deposition," Journal of Physics D: Applied Physics, vol. 40, pp. 4155-4163, 2007.
[89] S. E. Babayan, J. Y. Jeong, V. J. Tu, J. Park, G. S. Selwyn, R. F. Hicks," Deposition of silicon dioxide films with an atmospheric-pressure plasma jet," Plasma Sources Science and Technology, vol. 7, pp. 286-288, 1998.
[90] U. Lommatzsch and J. Ihde, "Plasma Polymerization of HMDSO with an Atmospheric Pressure Plasma Jet for Corrosion Protection of Aluminum and Low-Adhesion Surfaces," Plasma Process and Polymers, vol. 6, pp. 642-648, 2009.
[91] C. Regula, J. Ihde, U. Lommatzsch, R. Wilken, "Corrosion protection of copper surfaces by an atmospheric pressure plasma jet treatment," Surface and Coatings Technology, vol. 205, pp. S355–S358, 2011.
[92] L. Zhou, G.H. Lv, C. Ji, S. Ze Yang, "Application of plasma polymerized siloxane films for the corrosion protection of titanium alloy," Thin Solid Films, vol. 520, pp. 2505- 2509, 2012.
[93] C. Huang, C.H. Liu, C.H. Su, W.T. Hsu, S.Y. Wu, Thin Solid Films, vol. 517, pp. 5141-5145, 2009.
[94] Y. W. Hsu, H. C. Li, Y. J. Yang, C. C. Hsu, "Deposition of Zinc Oxide Thin Films by an Atmospheric Pressure Plasma Jet," Thin Solid Films, vol. 519, pp. 3095–3099, 2011.
[95] Y. S. Lin, S. S. Wu, T. H. Tsai, "High‐Rate Deposition of Electrochromic Organotungsten Oxide Thin Films for Flexible Electrochromic Devices by Atmospheric Pressure Plasma Jet: The Effect of Substrate Distance," Plasma Processes and Polymers, vol. 8, pp. 728–739. 2011.
[96] G. W. Lin, Y. H. Jiang, P. K. Kao, I. C. Chiu, Y. H. Wu, C. C. Hsu, I. C. Cheng, J. Z. Chen "Oxidation of sputtered metallic Sn thin films using N2 atmospheric pressure plasma jets", Materials Research Express, vol. 2, pp. 1-10, 2015.
[97] Thomas S. Williams, Hang Yu, Robert F. Hicks, "Atmospheric pressure plasma activation as a surface pre-treatment for the adhesive bonding of aluminum 2024", Journal of Adhesion Science and Technology, vol. 28, pp. 653-674, 2014.
[98] L.P.H. Jeurgens, W.G. Sloof, F.D. Tichelaar, E.J. Mittemeijer, "Structure and morphology of aluminium-oxide films formed by thermal oxidation of aluminium", Thin Solid Films, vol. 418, pp. 89–101, 2002.
[99] Standard Test Methods for Rating Adhesion by Tape Test, ASTM D 3359-17.
[100] Y. J. Wang, "Improvement of Corrosion Properties on Aluminum-Sputtered AZ91D Magnesium Alloy by Anodic Aluminum Oxidation", National Taiwan University of Science and Technology, 2016.
[101] W. A. Zisman, "Relation of the equilibrium contact angle to liquid solid constitution," Contact Angle, Wettability, and Adhesion, vol. 43, pp. 1-51, 1964.
[102] D.Y. Kwok and A.W. Neumann, "Contact angle measurement contact angle interpretation," Advances in Colloid and Interface Science, vol. 81, pp. 167-249, 1999.
[103] S. Siboni, C. Della Volpe, D. Maniglio, M. Brugnara, "The solid surface free energy calculation；II. The limits of the Zisman and of the "equation-of-state" approaches," Journal of Colloid and Interface Science, vol. 271, pp. 454-472, 2004.
[104] P. Zdenka, S.K. Karin, S.S. Majda, K. Tatjana, "Determining the surface free energy of cellulose materials with the powder contact angle method," Textile Research Journal, vol. 74, pp. 55-62, 2004.
[105] 新創達科技有限公司網頁資訊, "表面能計算原理說明," Available: http://www.sindatek.com/Bmyl.htm。
[106] 田福助, 吳溪煌, "電化學-理論與應用," 高立圖書有限公司, 1988.
[107] 柯賢文, "腐蝕及其防制, " 全華圖書股份有限公司, 2012.
[108] C. Liu, Q. Bi, A. Matthews, "An electrochemical impedance spectroscopy study of the corrosion behavior of PVD coated steels in 0.5 NaCl aqueous solution: Part I. Establishment of the equivalent circuits for EIS data modelling," Corrosion Science, vol. 45, pp. 1243-1256, 2013.
[109] S. Mao, H. Yang, J. Li, H. Ting, Z. Song, "The properties of aluminum coating on sintered NdFeB by DC magnetron sputtering," Vacuum, vol. 85, pp. 772-775, 2011.
[110] G. Wu, X. Wang, "Corrosion behavior of Ti-Al-N/ Ti-Al duplex coating on AZ31 magnesium alloy in NaCl aqueous solution," Materials Characterization, vol. 60, pp. 803-807, 2009.
[111] A. Hozumi, H. Sekoguchi, N. Kakinoki, O. Takai, J, "Preparation of transparent water-repellent films by radio-frequency plasma-enhanced chemical vapour deposition," Materials Science, vol. 32, pp. 4253, 1997.
[112] S.A. Kulinich, M. Farzaneh, "Hydrophobic properties of surfaces coated with fluoroalkylsiloxane and alkylsiloxane monolayers," Surface Science, vol. 573, pp. 379-390, 2004.
[113] A. Hozumi, K. Ushiyama, H. Sugimura, O. Takai, "Fluoroalkylsilane Monolayers Formed by Chemical Vapor Surface Modification on Hydroxylated Oxide Surfaces," Langmuir, vol. 15, pp. 7600-7604, 1999.
[114] D. G. Howells, B. M. Henry, Y. Leterrier, J. A. E. Manson, J. Madocks, H. E. Assender, "Mechanical properties of SiOx gas barrier coatings on polyester films," Surface and Coatings Technology, vol. 202, pp. 3529-3537, 2008.
[115] K. L. Mittal, "Polymer Surface Modification: Relevance to Adhesion," CRC Press, 1996.
[116] Y. L. Cheng, T. W. Qin, H. M. Wang, Z. Zhang, "Comparison of corrosion behaviors of AZ31, AZ91, AM60 and ZK60 magnesium alloys," Transactions of Nonferrous Metals Society of China, vol. 19, pp. 517-524, 2009.
[117] T. Ishizaki, J. Hieda, N. Saito, N. Saito, O. Takai, "Corrosion resistance and chemical stability of super-hydrophobic film deposited on magnesium alloy AZ31 by microwave plasma-enhanced chemical vapor deposition," Electrochimica Acta, vol. 55, pp. 7094-7101, 2010.
[118] Y. Zhang, Y. Shao, T. Zhang, G. Meng, F. Wang, "The effect of epoxy coating containing emeraldine base and hydrofluoric acid doped polyaniline on the corrosion protection of AZ91D magnesium alloy," Corrosion Science, vol. 53, pp. 3747-3755, 2011.
[119] T. Schauer, A. Joos, L. Dulog, C.D. Eisenbach, "Protection of iron against corrosion with polyaniline primers," Progress in Organic Coatings, vol. 33, pp. 20-27, 1998.
[120] W.S. Araujo, I.C.P. Margarit, M. Ferreira, O.R. Mattos, P.L. Neto, "Undoped polyaniline anticorrosive properties," Electrochimica Acta, vol. 46, pp. 1307-1312, 2001.
[121] C. Ma, X. Liu, C. Zhou, "Cold-sprayed Al coating for corrosion protection of sintered NdFeB," Journal of Thermal Spray Technology, vol. 23, pp. 456-462, 2013.
[122] S.C. Pun, W. Wang, A. Khalajhedayati, J.D. Schuler, J.R. Trelewicz, T.J. Rupert, "Nanocrystalline Al-Mg with extreme strength due to grain boundary doping, Materials Science and Engineering: A," vol. 696, pp. 400-406, 2017.
[123] B.R. Strohmeier, "An ESCA method for determining the oxide thickness on aluminum-alloys," Surface and Interface Analysis, vol. 15, pp. 51-56, 1990.
[124] C. Ocal, B. Basurco, S. Ferrer, "An ISS-XPS study on the oxidation of Al (111); identification of stoichiometric and reduced oxide surfaces," Surface Science, vol. 157, pp. 233-243, 1985.
[125] B.M. Bisht, H. Bhandri, P. Sambyal, S.P. Gairola, S. Dhawan, "Highly durable and novel anticorrosive coating based on epoxy reinforced with poly(aniline-co-pentafluoroaniline)/SiO2 composite," American Journal of Polymer Science, vol. 6, pp. 75-85, 2016.
[126] S.J. Lee, S.J. Kim, "Improvement of corrosion properties of AL-4.08MG Alloy in seawater by two step anodizing in electrolyte with varied concentration," Acta Physica Polonica A, vol. 129, pp. 742-746, 2016.
[127] C.R.S. Mathieu, J. Hazan, P. Steinmetz, "Corrosion behavior of high pressure die-cast and semi-solid cast AZ91D alloys," corrosion science, vol. 44, pp. 2737-2756, 2002.
[128] Z. Song, Z. Xie, G. Yu, B. Hu, X. He, X. Zhang, "A novel palladium-free surface activation process for electroless nickel deposition on micro-arc oxidation film of AZ91D Mg alloy," Journal of Alloys and Compounds, vol. 623, pp. 274-281, 2015.
[129] H. Meifeng, L. Lei, W. Yating, T. Zhixin, H. Wenbin, "Corrosion properties of surface-modified AZ91D magnesium alloy," Corrosion Science, vol. 50, pp. 3267-3273, 2008.
[130] J.-B. Jorcin, M.E. Orazem, N. Pébère, B. Tribollet, "CPE analysis by local electrochemical impedance spectroscopy," Electrochimica Acta, vol. 51, pp. 1473-1479, 2006.
[131] M. Chen, Y. Chen, W. Zhang, S. Zhao, J. Wang, J. Mao, W. Li, Y. Zhao, N. Huang, G. Wan, "Controlling the corrosion rate and behavior of biodegradable magnesium by a surface-immobilized ultrathin 1-hydroxyethylidene-1,1-diphosphonic acid (HEDP) film," RSC Advances, vol. 6, pp. 15247-15259, 2016.
[132] S.K. Thamida, H.C. Chang, "Nanoscale pore formation dynamics during aluminum anodization," Chaos, vol. 12, pp. 240-251, 2002.
[133] A. Shi, S. Koka, J. Ullett, "Performance evaluation on the weathering resistance of two USAF coating systems (standard 85285 topcoat versus fluorinated APC topcoat) via electrochemical impedance spectroscopy," Progress in Organic Coatings, vol. 52, pp. 196-209, 2005.
[134] Y. Chen, X.H. Wang, J. Li, J.L. Lu, F.S. Wang, "Long-term anticorrosion behaviour of polyaniline on mild Steel," Corrosion Science, vol. 49, pp. 3052-3063, 2007.
[135] Y.C. Xin, C.L. Liu, W.J. Zhang, J. Jiang, T.Y. Guoyi, X.B. Tian, P.K. Chua, "Electrochemical behavior Al2O3/Al coated surgical AZ91 magnesium alloy in simulated body fluids," Journal of the Electrochemical Society, vol. 155, pp. C178-C182, 2008.
[136] Y. Ishibashi, M. Nose, M. Hatakeyama, S. Sunada, "Effects of aluminum sputtering on the corrosion resistance of AZ91 alloy," Archives of Metallurgy and Materials, vol. 60, pp. 953-955, 2015.
[137] R. Yoshita, Y. Ishibashi, M. Hatakeyama, M. Nose, S. Sunada, "Effect of heat-treatment on the corrosion resistance of AZ91 coated with aluminum sputtering film," Chiang Mai Journal of Science, vol. 43, pp. 420-424, 2016.
[138] J.R. Davis, "Corrosion of aluminum and aluminum alloys," ASM International, 1999.
[139] J.C. Scully, "Corrosion: aqueous processes and passive films," Academic Press, 1983.
[140] J.W. Diggle, R.L. Meek, "Oxides and oxide films," Journal of the Electrochemical Society, vol. 121, pp. 58C, 1974.
[141] H. Yang, X. Guo, G. Wu, S. Wang, W. Ding, "Continuous intermetallic compounds coatings on AZ91D Mg alloy fabricated by diffusion reaction of Mg–Al couples," Surface and Coatings Technology, vol. 205, pp. 2907-2913, 2011.
[142] Y. K. Pan, C. Z. Chen, D. G. Wang, X. Yu, Z. Q. Lin, "Influence of additives on microstructure and property of microarc oxidized Mg-Si-O coatings," Ceramics International, vol. 38, pp. 5528-5533, 2012.
[143] B-Z. Laufer, D.D.S., M.&D., J. I. Nicholls, Ph.D., J. D. Townsend, D.D.S., M.S.D., "SiO, -C Coating: A composite-to-metal bonding mechanism, University of Washington," School of Dentistry, Seattle, pp. 320-327, 1988.
[144] L. Bao, H. Fan, Y. Chen, J. Yan, T. Yang, Y. Guo, "Effect of surface free energy and wettability on the adhesion property of waterborne polyurethane adhesive," The Royal Society of Chemistry, vol. 6, pp. 99346-99352, 2016.
[145] Anatoliy Evtukh, Hans Hartnagel, Oktay Yilmazoglu, Hidenori Mimura, Dimitris Pavlidis, "Vacuum Nanoelectronic Devices: Novel Electron Sources and Applications," WILEY & SONS, 2015.
[146] M. R. Chashmejahanbin, A. Salimi, A. Ershad Langroudi, "The study of the coating adhesion on PP surface modified in different plasma/acrylic acid solution," International Journal of Adhesion and Adhesives, vol. 49, pp. 44-50, 2014.
[147] W. X. Chen, J. S. Yu, G. L. Chen, X. P. Qiu, W. Hu, H. Y. Bai , and J. Z. Shao, "Development of a novel protocol for the permanent hydrophilic modification of a BOPP film for high quality printing with water-based ink," The Royal Society of Chemistry, vol. 5, pp. 87963–87970, 2015.
[148] Shen Tang, Oh-June Kwon, Na Lu and Ho-Suk Choi, "Surface Free Energy Changes of Stainless Steel after One Atmospheric Pressure Plasma Treatment," Chemical Engineer, vol. 21, pp. 1218-1223, 2004.
[149] Vadym Prysiazhnyi, "Atmospheric Pressure Plasma Treatment and Following Aging Effect of Chromium Surfaces," Surface Engineered Materials and Advanced Technology, vol. 3, pp. 138-145, 2013.
[150] David Shaw, Andrew West, Jerome Bredin and Erik Wagenaars, "Mechanisms behind surface modification of polypropylene film using an atmospheric-pressure plasma jet," Plasma Sources Science and Technology, vol. 25, pp. 1-6, 2016.
[151] Guiyuan Wang, Hairen Wang and Zhiguang Guo, "A robust transparent and anti-fingerprint superhydrophobic film," Chemical Communications, vol. 49, pp. 7310-7312, 2013.
[152] Ömer Kesmez, Neslihan Tamsü Selli, Ayşe Tunalı, Esin Akarsu, Murat Akarsu, Ertuğrul Arpaç, "Fingerprint resistant coatings for stainless steel substrates," Progress in Organic Coatings, vol. 112, pp. 51-56, 2017.
[153] Giuseppe Pintaude, "Introduction of the Ratio of the Hardness to the Reduced Elastic Modulus for Abrasion," INTECH, pp. 217-230, 2013.
[154] Linda Y.L. Wu; S.K. Ngian; Z. Chen; D.T.T. Xuan, "Quantitative Test Method for Evaluation of Anti-Fingerprint Property of Coated Surfaces," Applied Surface Science, vol.257, pp. 2965-2969, 2010.
[155] M. Hoffmann, G. Jonschker, M. Overs, "Hydrophobic and/or oleophobic coating on microstructured glass surfaces providing an anti-fingerprint effect," European Patent Application, EP1555249, 2005.
[156] P. Suresh Kumar, J. Sundaramurthy, X. Zhang, D. Mangalaraj, V. Thavasi, S. Ramakrishna, "Superhydrophobic and antireflecting behavior of densely packed and size controlled ZnO nanorods," Alloys and Compounds, vol. 553, pp.375-382, 2013.