本研究以磁控濺鍍之方式，製作氧化白金(Oxide Platinum)、純白金(Pure Platinum) 以及共濺鍍Pt + YSZ 等三種不同電極於多孔性陽極氧化鋁(anodic aluminum oxide) 矽基板(AAO-Si)(＊) 上，並以約500~700nm 深之孔洞作為基底，探討多孔陣列形式對電極與固態氧化物電解質(solid oxide electrolyte) 8YSZ鍍製後，其對於濺鍍孔隙分佈結構及材料性質的影響，並再以電極-電解質-電極組合(Electrode/Electrolyte/ Electrode assembly) 之疊構設計，進行元件電性、表面以及成份分析來探討離子導電之性質。
本實驗欲使用電極多孔之特性以增加其三相點表面積，因此利用SEM 觀察其表面型態後可知，在三種不同電極鍍製10 分鐘後，白金和共濺鍍電極可以得到多孔洞，而氧化白金則需要於退火300oC下持溫30分鐘方可形成孔洞的特性。
另外，在利用不同電極的元件電性分析上，氧化白金及白金電極之元件在交流阻抗圖譜中是以電感形式呈現，此表示電極與電極間形成導通的現象，而共濺鍍電極元件上發現電解質薄膜在足夠厚度下可量測出阻抗值，此證明在AAO-Si 基板乃因粗糙度之關係，進而造成短路之問題。而元件以共濺鍍電極的情況下，分別在下電極部分採用不同形式之電極涵蓋率(電極面積/AAO面積)，以探討AAO 基板和YSZ 間應力變化的現象與離子導電效應。電極涵蓋率50% 之元件利用交流阻抗圖譜分析的結果發現，YSZ及AAO基板的接觸並未見離子導電促進效應產生，其原因為多孔性基板結構造成應力消失或晶格失配度過大。相對的，電極涵蓋率100% 的設計使三相點催化表面積增加而使得離子導電性質有所提升。
此外，本論文亦嘗試利用上述元件架構來應用於氧氣幫浦以製作成元件，因此在AAO-Si 基板中之支撐層的Si 基板需製成多孔形式，而穿孔的方式必須利用微機電的方式做腐蝕穿孔或雷射加工穿孔的方式來形成，其因腐蝕不易以及可靠度不高故不堪使用，為解決此元件製程問題，本實驗亦對其進行改良之設計，即利用工業級純鋁板3×3cm，中間製作直徑17mm圓形AAO的通氣基板，其孔深約100μm，此形式結構性強且表面也較為平整，而後再進行濺鍍白金以製備其電極。其結果發現元件在常溫下就具備離子導電的行為，另在進行透氧能力之量測下發現，其確實有氧氣含量上升之現象，但量測值卻比理論計算上來得多。同時，本實驗在進行無電場下測試時，發現同樣有氧氣含量的上升，因此推斷此元件架構有漏氣之現象發生。但在外加電場下氧氣含量的上升明顯優於無外加電場，而AC交流阻抗圖譜中也顯示離子導電效應的增加，故得知元件具備氧氣抽送之效應，可做為氧氣幫浦元件之雛形參考。

This study use the magnetron sputtering method to produce three kinds of electrodes: platinum oxide (PtO), pure platinum (Pt), and co-sputtering electrodes (Pt+8YSZ). These three kinds of electrodes were on the basis of stack-up design about 500~700nm deep holes with 1×1cm porous anodic aluminum oxide silicon substrate (AAO-Si) to investigate the characteristics of porous electrode and the solid oxide electrolyte, internal structure and properties of materials, then use the stack-up design "Electrode - electrolyte – electrode assembly" to make for electrical analysis, surface analysis and composition analysis was conducted to investigate ion conduction properties.
The surface analysis by SEM showed the surface morphology of the three electrodes, sputter in 10 minutes. Pure platinum and co-sputtering electrodes formed more holes, while platinum oxide shall have to form under 300oC to hold temperature for 30 minutes to ensure there are properties of holes.
In addition, electrical analysis of the electrode shows the platinum oxide and platinum in the AC impedance spectra of inductor are rendered which formed between the electrode and the electrode conduction phenomenon. In the co-sputtered of electrodes condition, electrolyte membrane is found due to a sufficient thickness of the impedance can be measured indicating the existence of AAO-Si substrate roughness then cause the short circuit problems.
The total amount of Co-sputtered electrodes is counted to measure the resistance and analyze each part of the down electrode layer with fully and half layer between the AAO and YSZ without touching relationship to explore the electrolyte /AAO substrate has tensile stress and improve the performance of ionic conduction effect. However, it showed a touch YSZ /AAO the resistance is more than without large to conclude that there are two possibilities, one of is a porous between YSZ thin films and AAO tensile stress disappear or mismatch caused too large. On the contrary, the design of full-thickness down electrode surface area of the catalyst triple point increase in the ion conducting properties improved.
This paper tried to use the above element structure to put in use the oxygen pump and made the components together, so the porous substrate needed to be measured, then the AAO-Si substrates in the production of a porous Si substrate to be a way to make use of micro-electromechanical corrosion perforation, or laser perforated processing methods, but both of these ways are required high cost, as a result we cannot use them.
Improved techniques is conducted as an experiment, use industrial grade pure aluminum 3×3cm, diameter 17mm round about the middle of making the AAO ventilation substrate hole depth of approximately 100m, this make structural is strength, and the surface is relatively smooth. Platinum electrodes sputtered parameter was used to pump oxygen at room temperature. It has the ionic conduction phenomena .
Another oxygen pump element can be measured, revealing that oxygen content increased. However, the measured value is much more than theoretical calculations. In the meantime, we tested it without electric field and we found that oxygen content increased. This indicate that the component have the leakage phenomenon. But in the electric field will increase oxygen content significantly better than without electric field, while the AC impedance spectrum of ionic conductivity effects also increases, so that element is oxygen pumping effects, and will be served as prototype reference.

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