金屬玻璃材料具有高強度、低表面能及優良的玻璃模造特性，因此被認為可用來複製各種微奈米應用所需的成形模具。本實驗目標以微奈米轉印技術配合金屬玻璃材料之應用，製作具毫米及微米、奈米複合結構的金屬玻璃模具。所製作之金屬玻璃模具，將可用來一次轉印成形具有微米及奈米複合結構的高分子元件，如具抗反射奈米結構的微米光柵或微透鏡陣列。
在此研究中，Mg58Cu31Gd11金屬玻璃被應用於熱壓複合結構轉印製程，透過微電鑄技術製作的微、奈微結構作為模仁，使用熱壓轉印技術轉印至金屬玻璃上，並配合CNC立式中心機所加工之定位模座、下模具及上支撐架，二次轉印出金屬玻璃複合結構。在二次轉印金屬玻璃的過程中，發現一次轉印的微結構深度會受到影響，透過模擬預測與實驗量測得到相符的趨勢。這項研究中利用金屬玻璃可重複加工性、擁有良好複製性與精細的結構成形特性，成功利用較低成本的方式製作出複合結構金屬玻璃模具，未來將可作為微/奈米複合結構熱壓轉印上的應用。

Bulk metallic glasses (BMGs) have exhibited high strength, low surface energy and superior glass-forming ability. Therefore, BMGs have been considered to replicate molds for micro/nano forming applications. The aim of this study is to apply micro/nano imprint technology and BMGs to fabricate hybrid micro and nano structure BMG molds. The mold can be used to form polymer devices with hybrid micro and nano structures, for examples micro grating and lens arrays with antireflective nanostructures on their surfaces, in single imprint process.
In this research, Mg58Cu31Gd11 metallic glass was applied to thermal imprint process to fabricate hybrid structures. The forming characters and operating parameters were studied by using electroformed Ni molds to fabricate micro or nano structures on Mg-base BMG substrates. Then, a mm scale lens array mold fabricated by CNC machines was used to imprint the substrates twice to generate the hybrid structures. For fixing the mold and substrate to align the hybrid structures and prevent the sliding between the mold and substrate during the imprint process, a special holder, including the stamp align kit, lower mold and upper supporting frame, was designed and fabricated by CNC machines. It was found that the diameter and depth of the micro/nano structures fabricated in the first imprint could be changed after the second imprint. A theoretical simulation was performed and showed the same trend as the experimental results.
The study proves bulk metallic glasses can be imprinted repeatedly to achieve work pieces with hybrid micro/nano structures. Using this process, bulk metallic glass molds with hybrid structures could be fabricated for thermal imprint process and used to manufacture special designed products with multi scale features in the future.

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