本論文主要利用純度為99.95%釕靶材，藉由反應式射頻磁控濺鍍系統來研究二氧化釕成長於奈米碳管上之複合物分析，和對於此複合物做初步電容測試探討。利用不同的濺鍍條件，基板成長的溫度不同，可控制晶系結構和成長速率；及不同氧流量可控制晶體大小，也能影響成長速率。使用場發射式電子顯微鏡(FESEM)、顯微拉曼散射儀(Micro-Raman Scattering System)、X光繞射分析(X-ray Diffraction)、穿透式電子顯微鏡(TEM)及X光光電子能譜儀(XPS)對二氧化釕晶體做結構和特性分析。從FESEM中可看到可看到二氧化釕形貌隨著氧流量增加，從奈米顆粒狀演變到管狀結構。從拉曼譜線中有變寬與紅移的現象，推測二氧化釕的大小結構關係與異質材料之間有應力存在所導致。從X光繞射分析可知道二氧化釕有晶面優選項上之細微變化。從TEM影像與繞射圖中可證實二氧化釕如何疊在單根奈米碳管上，同時也對單根二氧化釕晶柱做細微放大穿透觀察，並以繞射圖案確定碳管上為二氧化釕晶體。至於成分分析部分以X光光電子能譜儀來做鑑定。此外，試著以反應式射頻磁控濺鍍系統，對二氧化釕/奈米碳管復合物做初步的電容測試。了解在循環伏安中有電容應答行為，初步整理以反應式射頻磁控濺鍍系統濺鍍二氧化釕於奈米碳管上之複合物，並比較二氧化釕/奈米碳管複合物的單位重量電容值(140 F/g)比單純奈米碳管的(30 F/g)高，這是由於二氧化釕成長於奈米碳管上造成作用面積大量增加，電化學電容值因此提升，初步證實以此方法製備之二氧化釕/奈米碳管複合物是有電容效用。

RuO2 nanocrystals (NCs) were deposited on carbon nanotubes (CNTs) by reactive radio frequency magnetron sputtering using a Ru target with 99.95% purity under different conditions. The surface morphology, structural and spectroscopic properties of the as-deposited NCs were characterized using field-emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS) and micro-Raman spectroscopy. FESEM micrographs showed that the surface morphology of the as-deposited RuO2 varied from nanoparticle-like to tube-like NCs as the oxygen flux increased from 2 to 10 sccm. XRD pattern confirmed the formation of pure rutile RuO2 NCs on CNTs. The TEM image of RuO2-coated CNTs revealed that RuO2 NCs had been deposited onto the surface of the CNTs with uniform size distribution and random directions. XPS spectra showed the coexistence of higher oxidation states of ruthenium in the as-deposited RuO2 NCs. The lattice vibrational properties were studies by micro-Raman spectroscopy. The red-shifts of the peak positions and broadening of linewidths of the Raman features were attributed to both the size and residual stress effects.
In addition, a preliminary study has been carried out to understand the potential application of the RuO2/CNT composites as the electrode materials in electrochemical capacitors. The average specific capacitance obtained for the RuO2/CNT composites reaches to a value of about 140 F/g, which is much larger than that of the pure CNTs (30 F/g). The enhancement of the specific capacitance can be attributed to the presence of RuO2 on the surface of CNTs. This in turn modifies the structure and morphology of CNTs, allowing the RuO2 to be available for the electrochemical reactions and improves the efficiency of the composites. The progressive redox reactions occurring at the surface and bulk of RuO2 through faradic charge transfer between electrolyte and electrode results in the enhancement of the specific capacitance of RuO2/CNT composites comparing to pure CNTs. This preliminary study demonstrates the potential applications of the RuO2/CNT composites as the electrode material in electrochemical capacitors.

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