本論文主要將可攜帶式非接觸式雷射表面量測系統整合於機器手臂上，以實現對拋光後工件的即時量測。本研究開發的量測系統能夠同時對表面粗糙度和表面輪廓進行評估分析。
本研究主要使用LabVIEW作為主要程式開發平台，並整合NI Vision Assistant以及MATLAB等軟體。透過NI Vision Assistant，可對擷取到的影像進行初步的影像濾波規劃。輪廓量測程式使用MATLAB進行撰寫，用以計算輪廓預估方程式，並將其整合至LabVIEW主程式中。所有這些步驟的程式碼皆在LabVIEW中以圖形化方式進行撰寫，以確保整體流程更加清晰且易於管理。
本量測系統的功能可分為兩個主要部分，分別是表面粗糙度量測和輪廓量測。表面粗糙度量測部分，本研究使用以中心點為主的九個點遮罩，並運用反射光能量法，分析反射光斑的亮度資訊，找出與實際粗糙度值之間的關係，以進行擬合趨勢方程式，用以預估物件表面粗糙度。本研究發現利用線性型式擬合趨勢方程式，當門檻值於60時，可靠度達到0.9837，可針對0.02μm-0.17μm範圍之試片進行量測。
關於輪廓量測部分，本研究利用不同曲面會反射雷射光斑於屏幕上的不同位置，藉以建立曲面的反射光點位置與表面參數之間的關係方程式。輪廓量測則由關係方程式可應用於量測圓柱體、標準鋼球及實驗室自製之鞍型面工件，經實驗結果與三次元量測儀所取得的數據進行誤差比對，達到相當程度吻合。

This study mainly focuses on integrating a portable non-contact laser surface measurement system with a robotic arm to achieve on-machine measurement of the polished workpieces. Simultaneously, the developed system can be applied to evaluate and analyze the surface roughness and contour of the polished workpiece.
In this research, the LabVIEW software has been used as the main programming platform, and the other software, such as NI Vision Assistant and MATLAB, have been integrated with the LabVIEW. Through NI Vision Assistant, preliminary image filtering is conducted on the captured images. The contour measurement program is developed by using the MATLAB to calculate the contour estimation equation, which is integrated with the LabVIEW main program. All the codes for these measuring procedures are written in a graphical manner within LabVIEW, to ensure a clearer and more manageable overall process.
The functions of the developed laser measurement system can be divided into two main parts, namely the roughness measurement and the contour measurement. Regarding the roughness measurement, the method of a nine-point mask with the central point as the focus has been utilized. The reflective light intensity method is employed to analyze the brightness information of the reflected light spot, to identify the relationship between the intensity distribution and the actual surface roughness values. The surface roughness of the test objects can be estimated by the linear regression equation. The research found that using a linear fitting equation with a threshold value of 60 achieved a reliability of 0.9837, for the measurements of the objects within the range of 0.02μm to 0.17μm.
Concerning the contour measurement, a relationship equation between the image-coordinates of the reflected points on the screen and the coordinates of the workpiece surface has been established by finishing a calibration. The contour measurement can be obtained by applying this relationship equation to measure the cylindrical surface, the spherical surface of a standard steel ball, and the profile of a laboratory-manufactured saddle-shaped workpiece. The experimental results are compared with the data obtained from a coordinate measuring machine, demonstrating a satisfied consistency.

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