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| 研究生： |
黃文甫 Wen-Fu Huang |
|---|---|
| 論文名稱： |
精密反射式三角雷射探頭之設計與製作研究 Research on the design and manufacture of a precision reflective type triangulation laser probe |
| 指導教授： |
修芳仲
Fang-Jung Shiou |
| 口試委員: |
羅有綱
Yu-Kang Lo 曾垂拱 Chwei-Goong Tseng |
| 學位類別： |
碩士 Master |
| 系所名稱： |
工程學院 - 機械工程系 Department of Mechanical Engineering |
| 論文出版年： | 2005 |
| 畢業學年度： | 93 |
| 語文別： | 中文 |
| 論文頁數： | 107 |
| 中文關鍵詞： | 3軸自動量測系統 、非接觸式量測 、三角量測原理 、雷射探頭 、光路放大 、鏡面工件量測 |
| 外文關鍵詞： | triangulation measurement principle, non-contact measurement, mirror-like surface workpiece measurement, 3 axis automatic measurement system, laser probe, optical path amplification principle |
| 相關次數： | 點閱：258 下載：14 |
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本研究主要之目的為發展一反射式非接觸式三角雷射探頭，用於量測鏡面等級粗糙度表面之工件。本論文中所設計及製造的雷射探頭原型主要應用光路放大原理，來增加其量測精度。本研究提出一獨特設計之光路，使光點於位置感測器(PSD)光感測面上的位移變化量和工件表面的位置變化成2倍之比例。
本研究所發展之探頭本體尺寸為84mm × 85mm × 30mm，所使用的微聚焦雷射之聚焦長度為65mm。雷射探頭之工作距離為20mm，以位置感測器(PSD)2mm長的光感測面中心為中點，探頭量測範圍為±0.5mm。經由12-bit A/D卡解析後，解析度可達0.2441μm。透過HP5529A雷射干涉儀系統搭配三次元量床進行探頭校驗結果顯示，雷射探頭的精度透過重現性校驗所得的結果進行補正後，可達約1μm。
本研所究發展之探頭結合於一PC控制之3軸精密定位平台，以建構一自動量測系統。本量測系統之軟體，以Visual Basic 6.0程式語言撰寫，可透過RS232介面來控制3軸定位平台、設定量測路徑並對探頭誤差進行補正及計算量測時X、Y、Z三軸向的座標值。
本論文所發展的量測系統成功地應用於量測塊規組件之高度差及一些3D輪廓試件。由量測結果顯示，透過對不同粗糙度表面進行探頭誤差補正後，本探頭之量測精度可達約2μm。
The object of this study is mainly to develop a non-contact reflective type triangulation laser probe to measure some workpiece with mirror-like surface roughness. The design and fabrication of the prototype of the developed laser probe was based on the optical path amplification principle, to increase the measurement accuracy. This study proposes a specific configuration of the optical path amplification so that the ratio of the position variation on the position sensitive detector (PSD) surface to the position variation on the workpiece surface is two times.
The physical size of developed laser probe is 84mm × 85mm × 30mm. A micro-focused diode laser with focus length 65mm was used in this study. The working distance of the laser probe is 20mm. The measuring range is ±0.5mm by setting reference position at the middle position on the PSD with an optical-sensitive length of 2 mm. A resolution of is 0.2441μm is obtainable using a 12-bit A/D card. According to the calibration result with the help of a HP5529A laser interferometer system on a coordinate measuring machine, the accuracy of the laser probe was about 1μm after error compensation based on the repeatability measurement result.
The developed probe is integrated with a PC-based X-Y-Z precision stage to construct an automatic measurement system. A set of measuring software, programmed with Visual Basic 6.0 language, was developed to position the three stages through RS232 interface, to configure the measuring path, to calculate the error compensation with respect to different surface, and to calculate the coordinates of x-, y-, and z-axis during measuring, respectively.
The developed system was successfully applied to measure the height difference of three gauge blocks and the 3D profile of some test carriers. Based on the experimental results, the accuracy of this probe is about 2μm after error compensation depending on the surface roughness of the test object.
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