中文摘要
本研究主要研製一種非接觸式量測裝置，由一半導體雷射光源與六個位置感測器(Position Sensitive Detector, PSD)及光學鏡片所組成，依據光三角法(Triangulation Method)將該雷射光源、位置感測器及光學透鏡裝置在承載本體上，使位置感測器感測平面延伸線及光學透鏡軸線相交於雷射光之光軸上；而位置感測器之配置為在同一平面相隔72度各放置一個位置感測器形成正五角形之形式，並在180度之位置也放置一個位置感測器，共計六個位置感測器。藉此組成一具可克服陰影效應、可同時量測點位置、一維傾角、並經由計算量測訊號的峰度(Kurtosis)與偏度(Skewness)的方式來提升量測精度之非接觸式雷射探頭。
完成雷射探頭本體製作後，將雷射探頭配合手動三次元量測座標儀(C.M.M)，再將個人電腦結合12 Bits A/D卡，接收探頭之量測訊號，整合成為一量測探頭系統。本探頭可規劃出四種量測方式，分別為單、雙、五及六個接收器進行量測。
經實驗結果證實，本新型雷射探頭各別PSD對傾斜面(0°~60°)以及粗糙度的不確定度之誤差為10-15 μm。在各不同模組的量測結果中，以6個感測器量測模組來量測之結果最佳，且在±2 mm量測範圍內，精度可達20 μm以內。

Abstract
The objective of this study is mainly to design and manufacture a non-contact measurement probe system. The probe system consists of the following parts: a diode Laser, 6 position sensitive detectors (PSD) and 6 optical lenses. These parts are designed, fabricated and assembled on the probe based on the Scheimflug principle. The laser beam, the extend line of PSD and the line perpendicular to the optical axis of condensing lens intersect at the laser beam. There are 6 PSDs in total, five of them are put in an interval of 72 degree, that forms a pentagon shape, and the 6th PSD is put on the 180 degree position at the same plane on the probe. Based on the calculation of the Kurtosis and Skewness of the PSDs' signals, the measurement accuracy could be improved.
The developed laser probe system was integrated with the CMM. The measurement signal received by the probe was connected to the PC with a 12 bits A/D card, to construct a non-contact measurement system. The developed laser probe system has 4 different measurement modules, namely the standard triangulation probe module, the double triangulation probe module, the 5-PSD triangulation probe module, and 6-PSD triangulation probe module.
According to the experiment results, the measurement uncertainty of the developed laser probe system with respect to different surface roughness and slope was about 10-15 μm within the measuring range of ±2 mm. Among the measurement modules, 6-PSD measurement module had the best result. The measurement accuracy was smaller then 20μm within the measuring range of ±2 mm.

參考文獻
1. Y. Ttakagi, Y. Kojima, M. Yoshida and H. Awane, ”A Laser-applied Three-Dimensional Profile Measureing System”, Hitachi Review Vol. 35, pp.25~28, 1996.
2. W. Dremel, G. Haeusler and M. Maul, ”Triangulation with large dynamic range”, Proc. SPIE Vol. 665, pp.182~187, 1986.
3. M. Rioux, G. Bechthold, D. Taylor and M. Duggan, ”Design of a large depth of view three-dimensional camera for robot vision”, Opt. Eng. Vol. 26, pp.1245~1250, 1987.
4. T. Koezuka, Y. Kakinoki and M. Nakashima, ”High-Speed, Wide Area 3-D Vision System for PWB Inspection”, FUJITSU Sci.tech.j., Vol. 26, pp.16~25, 1990.
5. 莊葆華, ”非接觸雷射探頭研製”, 機械月刊第二十二卷第二期 pp.149~155, 1996.
6. Lino Marques, Urbano Nunes and Anibal T. de Almeida, “A New 3D Optical Triangulation Sensor for Robotics”, Advanced Motion Control, pp.512~517, 29 July~1 July, 1998.
7. S. H. Wang, C. J. Jin, C. J. Tay, C. Quan, H. M. shang, ”Design of an optical probe for testing surface roughness and micro-displacement”, Journal of the International Societies for precision Engineering and Nanotechnology, Vol. 25, pp.258-265, 2001.
8. 李碩仁、鄭元進, ”單點雷射探頭多探測器量測系統研製”, 機械月刊第二十五卷第十二期 pp.374~382, 1999.
9. K. H. Goh et al, ”The applicability of a laser triangulation probe to non-contacting inspection” INT. J. PROD RES., Vol. 24, pp.1331~1348, June, 1986.
10. T. Miyoshi et al, ”Development of Non-Contace 3-D Digitizing System” Journal of Advanced Automation Technology. Vol. 3, pp.165~169, March, 1987.
11. K. Saito, T. Miyoshi, ”Noncontact 3-D Digitizing and Machining System For Free-From Surfaces” ,Annals of CIRP, Vol. 40, pp.483~486, 1991.
12. 王祟丞, ”四軸非接觸式量測系統之研製”, 國立中興大學機械工程所碩士論文, 1997.
13. 蔡青憲, ”非接觸式雷射探頭系統整合於四軸機台量測系統之研製”, 國立台灣科技大學機械工程所碩士論文, 2001.
14. 薛同周, ”非接觸式三次元量測量測能力評估”, 元智大學工業工程研究所碩士論文, 1994.
15. Fumio Murakami, ”Accuray Assessment of a Laser Triangulation Sensor”, IMTC, pp.488~805, 1996.
16. 蕭興義, ”三次元量測儀曲面非接觸式量測法之可行性研究”, 國立台灣大學機械工程研究所碩士論文, 1989.
17. 林信介, “三次元量床雷射探頭校準之研究”, 國立中興大學機械工程系碩士論文, 2002.
18. Kyung-Chan Kim et al, ”Compensation of Surface Inclination for Detecting in Optical Triangulation Sensors” IMTC, pp.1292~1296, 2000.
19. 陳明俊, ”接觸式與非接處式探頭系統整合於CNC工具機上之混合量測研究”, 國立台灣科技大學就械工程所碩士論文, 2001.
20. 史雷, ”產品開發的未來趨勢—逆向工程與快速原型系統”, 機械月刊第二十八卷第四期pp.337~347, 2000.
21. 胡錦標、林宸生、謝宏榮等, ”精密光電技術” ,高立書局, 民國79年12月.
22. 林宸生, ”光電精密量測”, 全欣資訊書局, 民國82年7月.
23. Jurgen Haas, System Manual for Optical Scanning Probe OTM3A-20, Wolf&Beck Sensorik Company, Adelberg (Germany), 1988.
24. Bao Iha Zhuang, Ji Iha Zhang, cheng Zhi Jiang, ”Precision Laser Triangulation Range Sensor wish Double Detectors for Measurement on CMMs”, SPIE, Vol. 2349, 1994.
25. Hamamatsu技術手冊.
26. Hamamatsu-PSD Principle and Features, http://www-cdr.stanford.edu/MADEFAST/catalogs/hamamatsu/psd-principle.html
27.張健邦, ”統計學”, 三民書局股份有限公司, 民國83年9月.
28.張素梅, ”統計學(上)”, 三民書局股份有限公司, 民國86年2月.
29. 行政院國家科學委員會精密儀器發展中心, ”光學鏡片製作與檢測實用技術”, 新竹, 2003.
30. 耿繼業,何建娃, ”幾何光學”, 全華科技圖書股份有限公司, 台北, 2001.
31. 富士寫真光機株式會社網站http://www.fujinon.co.jp/jp/index.htm