本論文主旨為開發可攜帶式非接觸式表面量測系統，對拋光後的表面輪廓及粗糙度做評估分析。雷射光源經過擴束透鏡，利用光柵形成一條至三條的平行光線，投射於待測物表面後，反射在成像屏幕上，再以CCD 工業相機擷取屏幕上之影像進行分析處理。
本研究以LabVIEW作為主要撰寫程式，搭配NI Vision Assistant，可將擷取到的影像作影像濾波初步規劃，並將產生的程式碼於LabVIEW 做圖形化程式撰寫。
本論文分為粗糙度量測與曲面輪廓量測兩部分。粗糙度的量測為利用反射光能量法，分析粗糙度值與其反射成像的關係，找到適合的門檻值以用於評估試片之粗糙度，並且嘗試將量測系統整合於機械手臂上，作加工後的即時量測。
曲面輪廓量測可針對2D的圓柱面，量測其曲率，或檢測平面拋光試片的平整度。利用不同曲面會反射雷射光條紋於屏幕上不同位置，建立曲面的反射光點位置與表面參數的關係方程式，之後分別對待測物之高度、X軸及Y軸旋轉角進行關係方程式的驗證。
本系統所使用粗糙度量測門檻值為90，可針對粗糙度0.02μm-0.2μm的試片進行量測；曲面量測則由關係方程式量測圓柱體，經實驗結果與接觸式量測系統所取得的數據比較，達到相當程度吻合。

The purpose of this study is to develop a portable non-contact surface measurement system that can be used to evaluate the surface profile and roughness after polishing. The laser beam, passing through the collimating lens and by changing the grating mask, one to three parallel beams can be generated. The beams projected on the object and then reflected on the imaging screen. Then, the image on the screen were captured by the CCD industrial camera for further analysis.
In this study, LabVIEW is used as the main programming tool. With the help of the NI Vision Assistant software, the captured image can be filtered in the first stage and the generated code can be written in LabVIEW with graphical program.
This study is divided into two parts: surface roughness measurement and surface contour measurement. The surface roughness of a test object is measured by using the reflected light intensity method, the suitable threshold value, which was used to evaluate the roughness of the test piece, has been found by analyzing the relationship between the roughness value and the reflection image. The measurement system is attempted to be integrated with the robot arm for the possible in-process measurement after the surface finishing processing has been achieved.
Regarding the surface contour measurement, different curved surfaces will reflect the laser light fringes at different positions on the screen. A relationship equation between the position of light spots, which reflect from the curved surface and the surface parameter, and then the height, the X-axis and the Y-axis rotation angle of the object, has been verify by the derived relational equations, respectively.
According to the experimental results, the threshold value of the roughness measurement for our system was 90, the test piece with the surface roughness of 0.02μm-0.2μm can be measured. With regard to the surface profile measurement, the result was verified by the relational equation. The actual measurement of the cylindrical profile of a test object is consistent with the data obtained by the contact measurement system.

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