本研究主要為研製一精密散射式多感測器三角雷射探頭。本雷射探頭的開發，在光路設計上以Scheimpflug原理為基礎，將使投射至感測器表面的雷射光點產生恆聚焦且具有光路放大之效果；在構造上以單雷射光源搭配六個線電荷耦合元件(Linear CCD)感測器；在量測方式上提出多種量測模組，其中包含單與雙感測器量測模組和近似環形的五個與六個感測器量測模組，以尋找出雷射探頭的最佳量測方式，且雷射探頭利用雙感測器模組計算其散射光強度，可量得待測物表面之傾斜角度。
本研究所研製之雷射探頭，其量測範圍為±2 mm，解析度2 μm。本研究以Visual Basic 6.0程式語言開發人機介面來整合三軸微定位平台與自製雷射探頭，以建構一自動化非接觸式三維量測系統。
在提出的多種量測模組中，針對不同表面粗糙度、斜率、複斜面進行量測比較，根據實驗結果以五個CCD的偏態與峰度濾除法為最佳量測模組，可穩健地得到量測結果與提升量測精度。
在量測誤差比對方面，以三次元座標量測儀(C.M.M)之量測結果作為比對的基準，根據實驗結果得知階高載具、圓孔載具、標準霧化鋼球、凸高輪廓載具、3D曲面輪廓載具、30°斜面輪廓載具之量測誤差分別為10 μm、14 μm、26 μm、11 μm、64 μm及1.39°，量測系統成功地應用於微細雕刻面、孔洞元件、硬幣外型等三維輪廓量測上。

The object of the study is to develop a non-contact scattered type triangulation laser probe with multi-detectors. The developed system was configured and assembled based on the Scheimpflug principle. The probe system mainly consists of a micro-focus laser, six collimating lenses, six line charge coupled devices (CCDs), a signal processing circuit, and an A/D interface card. Through the specific arrangement of the six CCDs, four different measurement modules and six methodologies used to obtain the optimal reading for the developed system were possible, namely the standard triangulation probe module, double triangulation probe module, pentagon-shaped triangulation probe module, and an approximately circular triangulation probe module. Three methodologies, namely the averaging method, the median method, and the method using skewness and kurtosis analysis, have been proposed for the pentagon-shaped triangulation probe module. Angle measurement of a inclined surface was possible using the double triangulation probe module.
The measuring range of the developed laser probe is ±2 mm and the resolution is 2 μm. A set of measuring software programmed with Visual Basic 6.0 language was developed to configure the scanning path, to process the measured data of the laser probe.
According to the performance test results of four different measurement modules, the pentagon-shaped triangulation probe module using the methodology of skewness and kurtosis analysis to obtain the optimal reading, resulted in the best result. The measurement uncertainty of the developed laser probe system, with respect to different surface roughness and slope, was generally smaller than ±20 microns within the measuring range using the pentagon-shaped triangulation probe module with the methodology of skewness and kurtosis analysis.
The measurement errors of the development laser probe were analyzed by digitizing four designed test specimens, which were verified by a Coordinate Measuring Machines (C.M.M). Based on the test results, the measurement error of the stepped specimen was about 10 μm, and that of the 2D geometry specimen was about 14 μm, and that of the calibrated matt ball was about 26 μm, and that of the 3D freeform surface was about 64 μm. The developed system was applied successfully to the 3D measurement of some tiny and thin workpieces, such as a small engraved surface, a hollowed workpiece with discontinuity area, and a coin.

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