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研究生: 楊文賢
Wen-hsien Yang
論文名稱: 長行程奈米精度之氣壓-壓電混合精密伺服XYZ三軸定位系統設計與智慧型控制
Development of a Novel Intelligent Pneumatic-Piezoelectric Hybrid Servo XYZ Positioning System with Large Stroke and Nanometer Precision
指導教授: 江茂雄
Mao-Hsiung Chiang
口試委員: 唐永新
Yeong-Shin Tarng
鍾清枝
Tsing-Tshih Tsung
學位類別: 碩士
Master
系所名稱: 工程學院 - 自動化及控制研究所
Graduate Institute of Automation and Control
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 104
中文關鍵詞: 氣壓-壓電伺服XYZ三軸定位平台壓電致動器模糊滑動控制定位控制
外文關鍵詞: pneumatic-piezoelectric hybrid servo positioning, piezoelectric actuator, fuzzy sliding mode control, positioning control.
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本文旨在應用模糊滑動控制理論於非對稱型單桿氣壓缸及無桿氣壓缸並結合壓電致動器所發展出之長行程奈米精度伺服XYZ三軸定位系統與控制,大行程由氣壓伺服系統進行粗定位,小行程由壓電致動器作補償,整個定位行程是由氣壓缸和壓電致動器加總而來。其中X軸為獨立軸,YZ兩軸固定在一起,構成龍門型三次元定位平台。
實驗證實此系統可成功分別將X、Y軸定位到位置感測器最佳解析度 及Z軸定位到位置感測器最佳解析度 。


The objective of this thesis is to develop a fuzzy sliding mode control (FSMC) for a pneumatic-piezoelectric hybrid servo XYZ positioning system with large stroke and nanometer precision. In the single axis the pneumatic servo system serves to position in coarse stroke and the piezoelectric (PZT) actuator compensates fine stroke. This multi-axis system is constituted with the separated X-axis and the combined Y- and Z-axis.
The experiment results show that the system can achieve excellent positioning response and accuracy of 20 nm and 0.1 um for X-,Y- and Z-axis with high response for maximum stroke.

目   錄 中文摘要 I 英文摘要 II 致  謝 III 目  錄 IV 表目錄 VII 圖目錄 VIII 符號索引 XII 第一章 緒論 1 1.1 研究動機 1 1.2 文獻回顧 2 1.2.1 氣壓系統之回顧 2 1.2.2 壓電致動器之回顧 3 1.2.3 氣壓-壓電系統之回顧 4 1.2.4 控制理論之回顧 5 1.3 研究方向及本文架構 6 1.3.1 研究方向 6 1.3.2 本文架構 6 第二章 實驗架構與設備 8 2.1實驗設備 9 2.1.1 單桿氣壓缸及無桿氣壓缸 9 2.1.2 氣壓流量比例伺服閥 11 2.1.3 壓電致動器 12 2.1.3.1 壓電材料簡介 12 2.1.3.2 壓電致動器簡介 12 2.1.3.3 壓電致動器之優缺點 14 2.1.3.4 壓電致動器之磁滯現象 15 2.1.3.5 壓電致動器之蠕動現象 16 2.1.4 光學尺 17 2.1.4.1 光學尺構造與原理 17 2.1.4.2 計數與解碼電路 18 2.1.5 電腦控制介面與實驗環境 19 2.2 氣壓伺服三軸定位平台架構 20 2.3 氣壓-壓電伺服三軸定位平台架構 22 第三章 控制理論 24 3.1 模糊控制理論 24 3.1.1 模糊系統 24 3.1.2 模糊控制器的基本架構 25 3.1.3 模糊化機構 26 3.1.4 模糊知識庫 29 3.1.5 模糊推論引擎 30 3.1.6 解模糊化機構 32 3.2 模糊滑動控制理論 34 3.2.1 可變結構控制 34 3.2.2 滑動模態控制控制 34 3.2.2.1 滑動條件 35 3.2.2.2 迫近條件 36 3.2.2.3 等效控制 37 3.3 模糊滑動平面控制理論 38 3.3.1模糊滑動平面控制理論 38 3.3.1.1 歸屬函數的建立 39 3.2.2.1 解模糊化 41 3.2.2模糊滑動平面控制器 43 3.2.2.1 參數Φ、 、 設定 44 第四章 控制器設計 46 4.1 氣壓伺服定位控制器設計 47 4.1.1 模糊滑動平面規則庫之選取 47 4.1.2 模糊滑動平面參數之選取 49 4.2 壓電伺服精密定位控制器設計 51 4.3 氣壓-壓電伺服定位控制器設計 54 第五章 實驗結果與討論 55 5.1 氣壓伺服定位實驗 56 5.2 壓壓伺服定位實驗 63 5.3氣壓-壓電伺服定位實驗 66 第六章 結論與建議 77 參考文獻 79 作者簡介 87

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