本文旨在應用模糊滑動控制理論於非對稱型單桿氣壓缸及無桿氣壓缸並結合壓電致動器所發展出之長行程奈米精度伺服XYZ三軸定位系統與控制，大行程由氣壓伺服系統進行粗定位，小行程由壓電致動器作補償，整個定位行程是由氣壓缸和壓電致動器加總而來。其中X軸為獨立軸，YZ兩軸固定在一起，構成龍門型三次元定位平台。
實驗證實此系統可成功分別將X、Y軸定位到位置感測器最佳解析度 及Z軸定位到位置感測器最佳解析度 。

The objective of this thesis is to develop a fuzzy sliding mode control (FSMC) for a pneumatic-piezoelectric hybrid servo XYZ positioning system with large stroke and nanometer precision. In the single axis the pneumatic servo system serves to position in coarse stroke and the piezoelectric (PZT) actuator compensates fine stroke. This multi-axis system is constituted with the separated X-axis and the combined Y- and Z-axis.
The experiment results show that the system can achieve excellent positioning response and accuracy of 20 nm and 0.1 um for X-,Y- and Z-axis with high response for maximum stroke.

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