本論文旨在改善先前製作的遠紅外線熱輻射發光元件的效能，採用類似的設計概念，但改變部分元件結構，分別利用0.18-μm標準CMOS製程與優化微機電製程，藉此得到較高的發光功率與波長的選擇性。
利用標準CMOS製程製作的晶片，為了增加發光功率，改變元件中加熱層的結構，並重新設計金屬網隔濾波器的參數，將元件大小由先前的1.635×1.85 mm2增加為2.236×2.236 mm2。為了改善先前晶片中，因為元件間共用基板的熱傳導，使熱能散失到其他元件導致發光效能不佳的問題，我們利用晶圓廠提供之MEMS後製程技術，將加熱層底下之基板挖空，以利隔絕並侷限住熱能。另外，較大幅度更動金屬網格結構的週期，並設計出雙層的濾波結構來比較濾波效果。而以微機電製程製作的晶片，並未更動元件結構，主要改善製程控制已獲得較佳的元件特性。
經過量測製成的元件，下線之晶片在3V偏壓下可達到7.81m W⁄〖cm〗^2 的功率密度，微機電製程元件在5V的偏壓下可達到7.86 m W⁄〖cm〗^2 的功率密度，發光總功率可達到0.699 mW。經由FTIR量測之下，兩種製程之元件在頻譜中波峰的位置並未隨金屬網格參數變化有明顯的改變，需做更深入探討以釐清濾波器結構對光譜成份的影響。

In order to improve the performance of the far infrared (FIR) thermal emitters, similar design concept in the prior work are adopted but the device structures and fabrication are investigated to obtain better power conversion efficiency and wavelength selectivity. Both 0.18-μm standard CMOS process and MEMS process with thick poly-silicon heating layer are used to fabricate the FIR light sources.
For FIR emitters on the standard CMOS platform, the area of heating layer is increased from 1.635×1.85 mm2 to 2.236×2.236 mm2. To solve the problem of heat spreading to other devices from the substrate, a back-end MEMS process is utilized to remove the substrate under the heating layer. This can isolate the heating layer and thus improve the heating efficiency. The period of the metal meshed filer is varied to a larger extent and the filter structures with double metal layers are also designed to investigate the filtering characteristics. For FIR emitters on MEMS process with thick poly-silicon layer, the design remains the same as that in the prior work but better fabrication control is pursued to obtain improved device performance.
The output power density of the CMOS devices can achieve 7.81m W⁄〖cm〗^2 at 3-V bias; and that of the MEMS-processed devices can also reach 7.86 m W⁄〖cm〗^2 when the input voltage is 5 V with an output power of 0.699mW. The spectrum measured by the FITR for both types of devices indicates no significant change in the center wavelength by varying the parameters of the metal meshed filters. This needs further investigation to clarify the filtering effect of the metal meshed filters.

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