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| 研究生： |
黃浩誠 Hao-Cheng Huang |
|---|---|
| 論文名稱： |
應用改良之TRIZ理論結合QFD於補償式化學機械拋光終點偵測及補償路徑之改善 Integrating Improved TRIZ Methodology and QFD to Improve Endpoint Detection and Path Compensation of Compensated Chemical Mechanical Polishing |
| 指導教授： |
林榮慶
Zone-Ching Lin |
| 口試委員: |
許覺良
Chaug-Liang Hsu 潘文玨 Wen-Jue Pan |
| 學位類別： |
碩士 Master |
| 系所名稱： |
工程學院 - 機械工程系 Department of Mechanical Engineering |
| 論文出版年： | 2007 |
| 畢業學年度： | 95 |
| 語文別： | 中文 |
| 論文頁數： | 183 |
| 中文關鍵詞： | 化學機械拋光 、萃思理論 、品質功能展開 |
| 外文關鍵詞： | chemical mechanical polishing (CMP), inventive problem solving (TRIZ), quality function deployment (QFD) |
| 相關次數： | 點閱：238 下載：1 |
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本論文主要研究發展出一套產品的創研流程，將群組的概念套用於QFD及TRIZ中，對品質屋及技術衝突矩陣進行改造，再將兩者銜接合併成一完整之研發流程。
以補償式化學機械拋光為載具，作為進行創新研發之案例來闡述本方法之流程步驟。首先定義出所有之改善需求，再將需求及其對應之工程特性建立QFD群組品質屋，依群組品質屋的特徵群組改善優先順序，代入改良之TRIZ理論對應出可行之發明法則，依次對補償參數設定及路徑規劃進行改善，逐步達到所有改善之需求。
經本文研究結果顯示，應用欲改善之發明法則群組的優先順序，可有效幫助產品開發人員縮短產品研發時程；而以物理意義相近的工程特徵群組所對應之群組衝突矩陣，使用上可降低在試誤過程中所耗費的時間，並依群組品質屋之特徵群組改善優先順序依次循環進行，即可有效地達到產品應改善之所有需求。
The thesis mainly studies and develops the innovative research procedures of product, and applies clustering concept to quality function deployment (QFD) and the theory of inventive problem solving (TRIZ), intending to improve the house of quality and the technological conflict matrix. Then, QFD and TRIZ are connected and combined to form complete research and development procedures.
With compensation-oriented chemical mechanical polishing (CMP) as the carrier, the study elucidates the procedures of this method for the innovative research and development case. Firstly, all the needs of improvement are defined. The needs and their corresponding engineering properties are employed to build a QFD-clustered house of quality. The improvement priority of the characteristics cluster of the clustered house of quality is substituted in the modified TRIZ theory, thus producing the corresponding workable invention rules. After that, improvements are made to the presetting of compensation parameters and the planning of paths, gradually meeting all the needs of improvement.
The research results of the study show that the application of the priority of invention rule clusters to be improved can effectively help the product developers shorten the time for the research and development of product. As to the cluster conflict matrix that is corresponding to the engineering characteristic cluster of similar physical meanings, it can decrease the time spent on the trial and exercise process. By improving the priority according to the characteristic cluster of the clustered house of quality in cycles, all the needed improvements of product can be effectively achieved.
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