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研究生: 蕭名登
Ming-Deng Siao
論文名稱: 二硫化鉬層狀半導體之表面電子聚集 效應與電傳輸特性
Surface Electron Accumulation and Electronic Transport in MoS2 Layer Semiconductors
指導教授: 陳瑞山
Ruei-San Chen
口試委員: 陳瑞山
Ruei-San Chen
李奎毅
Kuei-Yi Lee
趙良君
Liang-Chiun Chao
邱雅萍
Ya-Ping Chiu
邱博文
Po-Wen Chiu
學位類別: 碩士
Master
系所名稱: 應用科技學院 - 應用科技研究所
Graduate Institute of Applied Science and Technology
論文出版年: 2017
畢業學年度: 105
語文別: 中文
論文頁數: 105
中文關鍵詞: 二硫化鉬層狀半導體厚度相依電導率表面電子聚集表面散射
外文關鍵詞: MoS2, Layered semiconductor, Thickness-dependent conductivity, Surface electron accumulation, Surface scattering
相關次數: 點閱:327下載:3
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  • 本論文探討奈米多層結構的二硫化鉬(MoS2)層狀半導體之表面電子聚集效應及其電傳輸特性。本實驗利用機械剝離法產生MoS2奈米結構,發現其電導率與塊材相比高出幾個數量級。透過變溫電導率量測觀察到奈米結構MoS2擁有比塊材低的活化能,結合電導率結果可推測MoS2表面有著較材料內部高的導電特性。由transfer length method (TLM)分析發現MoS2表現出二維的電傳輸特性,並排除可能的接觸電阻效應。MoS2塊材原始表面(non-fresh surface)藉由掃描式穿隧顯微鏡(STM)量測證明了表面具有電子聚集的特性。擁有新撕開的新鮮表面(fresh surface)的塊材從STM量測並無發現表面電子聚集。放置大氣下4個月後由STM量測可得到與原始表面的塊材相同的結果。奈米結構fresh surface的MoS2量測到接近塊材等級的電導率。此外,亦對相近厚度但具有不同電導率的MoS2奈米結構做活化能量測,分析活化能機制與表面態的變化。利用場效應電晶體(FET)量測,可發現fresh surface的MoS2奈米結構相對於non-fresh surface的樣品表現出較高的電子遷移率與較低的電子濃度。推測non-fresh surface的MoS2奈米結構可能存在著較強的表面散射機制。


    Surface electron accumulation (SEA) and thickness-dependent electric properties in the molybdenum disulfide (MoS2) two-dimensional (2D) nanostructures have been observed and investigated. The MoS2 nanoflakes fabricated by mechanical exfoliation exhibit several orders of magnitude higher conductivity than their bulk counterparts. The carrier activation energy of nanostructures is lower than that of the bulk counterparts. The transfer length method was used to determine the current transport in MoS2 following a 2D behavior rather than the conventional 3D mode. Scanning tunneling microscopy measurements confirmed the presence of surface electron accumulation (SEA) in this layer material. Notably, the pronounced n-doping characteristic can be easily removed by producing a fresh surface through mechanical exfoliation. Long-term exposure to air can transform the intrinsic fresh surface into a metallic-like surface, indicating that SEA is not inherent. The FET measurement indicates that the MoS2 nanoflakes with fresh surface exhibit higher mobility and lower electron concentration compare to the nanoflakes with non-fresh surface. A more significant surface scattering in the non-fresh MoS2 nanoflakes was proposed.

    中文摘要 Abstract 致謝 目錄 圖目錄 表目錄 第一章 緒論 第二章 實驗方法 2.1 二硫化鉬單晶介紹 2.2 二硫化鉬層狀半導體之形貌、結構特性檢測 2.3 二硫化鉬層狀半導體元件製作 2.4 奈米材料元件之暗電導特性 第三章 結果與討論 3.1 二硫化鉬層狀半導體單晶之形貌與結構分析 3.2 二硫化鉬層狀半導體元件 3.3 二硫化鉬奈米結構暗電導 3.4 由STM觀察表面電子聚集效應 3.5 奈米結構本質電導率量測 3.6奈米結構新撕表面的樣品之活化能分析 3.7 電子遷移率與表面電子濃度 第四章 結論 參考文獻

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