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研究生: 顏駿朋
JYUN-PENG YAN
論文名稱: 使用雷射干涉儀探討阿貝誤差對於Y軸向空間誤差的影響
Studying the Effect of the Abbe Error on the Y-Axis Spatial Error Using the Laser Interferometer
指導教授: 李維楨
Wei-chen Lee
口試委員: 石伊蓓
Yi-Pei Shih
鍾俊輝
Chun-Hui Chung
學位類別: 碩士
Master
系所名稱: 工程學院 - 機械工程系
Department of Mechanical Engineering
論文出版年: 2019
畢業學年度: 107
語文別: 中文
論文頁數: 75
中文關鍵詞: 定位誤差阿貝誤差空間誤差
外文關鍵詞: Positioning error, Abbé error, Spatial error
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目前業界對於加工精度的要求日益提高,除了探討加工及量測的性質以提高加工精度之外,最重要及最根本的就是機台幾何誤差的影響。以三軸加工機來說,就有21項靜態幾何誤差。而這些誤差當中基礎且重要的誤差就是定位誤差,基本上所有做精密加工的數值控制加工機,一定會有定位誤差補償的功能,定位誤差如果不能進行準確的補償,則會影響到加工精度及線上量測數值。
本論文主要探討俯仰角度誤差所造成的阿貝誤差對於Y軸空間誤差的影響。利用雷射量測儀量測機台的俯仰角度誤差及空間中不同位置處的定位誤差值的方式, 以驗證俯仰角度所造成的阿貝誤差是影響定位誤差於不同空間而有所差異的主要因素,並利用阿貝誤差及定位誤差來建立Y軸向空間誤差。最後比較有考量阿貝誤差及未考量阿貝誤差的補償值的加工結果,以三次元量測儀量測物件理想值與實際值的差異以檢驗加工機補償後的加工精度,考量阿貝誤差的加工平均誤差為1.7 µm,未考量阿貝誤差的加工平均誤差為3.6 µm,考量阿貝誤差的結果的確有改善機臺加工精度約1.9 µm。


At present, the industry's requirements for machining accuracy are increasing. In addition to studying the nature of machining and measurement to improve the accuracy, the most important and fundamental issue is the influence of the machine’s geometric errors. For a three-axis machine, there are 21 geometric errors. Among these errors, the most critical one is the positioning error. All computer numerical control machine tools have the function of error compensation. If the positioning error cannot be accurately compensated, it will affect the machining accuracy and on-machine measurement results.
The objective of the paper is to use the laser Interferometer to evaluate the effect of the Abbe error, which was caused by the pitch angle error, on spatial errors along the y-axis. The y-axis spatial error was established by using the Abbe error and positioning error. Finally, the machining results of considering the Abbe error in the compensation and those without considering the Abbe error in the compensation were compared. The difference between the ideal dimensions and the actual dimensions of the machined object was measured by a coordinate measuring machine to understand the machining accuracy. The average machining error with the consideration of the Abbe error was 1.7 μm, and that without the consideration of the Abbe error was 3.6 μm. The results show that the improvement was 1.9 μm.

中文摘要 I Abstract II 致謝 III 目錄 IV 圖索引 V 表索引 VIII 第一章 緒論 1 1.1 研究背景動機及目的 1 1.2 文獻回顧 2 第二章 軟硬體及設備 11 2.1 UX300五軸數值控制铣床 11 2.1.1 設備介紹 11 2.1.2 實驗用刀柄、刀具及切削材料 12 2.2 觸發式探頭系統RENISHAW OMP400 14 2.3 三次元座標量測儀 15 2.3.1 探針模塊與探針 16 2.3.2 使用軟體 17 2.4 XL-80雷射量測系統 19 2.5 雷射量測及分析軟體 19 第三章 實驗方法 21 3.1 阿貝原理 21 3.2 雷射量測系統 22 3.2.1 雷射量測原理 22 3.2.2 量測方法 23 3.3 雷射量測資料處理 26 3.4 輸入補償值於機台並加工量測檢驗 29 3.5 三次元量測儀量測方法 34 第四章 實驗結果及討論 38 4.1 量測數據分析結果 38 4.2 輸入補償值於機台並加工量測結果 48 第五章 結論與未來展望 54 5.1 結論 54 5.2 未來展望 54 第六章 參考文獻 55 附錄 57

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