本研究主要目的是整合雙CCD視覺系統與XXY對位平台，並且建構定位誤差補償控制之設計。因為考量到XXY對位平台的部分機構件有加工或組裝誤差的累積，亦或是長時間的使用導致整體運動精度不佳等問題，而導致XXY對位平台單軸移動誤差或多軸同步移動誤差等問題產生，雖然XXY對位平台移動誤差並不會造成機構件上的損壞，但是若要將XXY對位平台使用在高精度要求的環境中，勢必要減少這些不必要的誤差，所以減少XXY對位平台的移動誤差便是本研究之首要課題。

本研究主要分為兩大部分，XXY對位平台的運動控制系統及使用兩台工業攝影機所組成的雙視覺系統。本研究中的XXY對位平台運動控制系統，是使用National Instruments公司所研發的PCI-7350運動控制卡，並且搭配東方馬達公司所生產的ARM46SAK步進伺服馬達驅動器來控制XXY對位平台的運動狀況。雙CCD視覺系統的部分，主要是利用影像處理技術將位於XXY對位平台上的標靶利用重心法找尋出其座標位置，獲取標靶座標後再回饋給運動控制系統，最後將XXY對位平台所需要完成的目標位置指令建構出來，以達成對位。

本研究的實驗主要分為兩個部分，第一部分，首先分別將單軸移動誤差、多軸移動誤差以及視覺系統誤差利用雷射測距儀找尋出來，再來先針對單軸移動以及多軸移動，利用數據內插法的方式，將準確的移動量補償至運動控制系統，其目的主要是將XXY對位平台的定位誤差進行補償。第二部分，主要是利用雙CCD鏡頭所擷取的圖像以及影像處理的技術，並且透過圖像座標與世界座標轉換來獲取XXY對位平台實際的移動量，最後採用平均法與數據內插法來將兩個CCD所擷取的圖像數據進行誤差補償，以實現整合雙CCD視覺系統與XXY對位平台。

The main purpose of this study is to integrate a dual CCD visual system and an XXY alignment stage to construct the of the positioning error compensation design of the stage.Due to the accumulations of machining or assembly errors in some of the mechanical components of the XXY alignment stage or the poor overall motion accuracies caused by long-term uses, the XXY alignment stage has single-axis movement errors, multi-axis synchronous movement errors, and other problems.Although the movement errors of the XXY alignment stage will not cause damages of the mechanical components, it is necessary to reduce these unnecessary errors if the XXY alignment stage is used in an environment with high precision requirements.The movement errors of the XXY alignment stage is the main subject of this study.

This research is mainly divided into two parts, the motion control system of the XXY alignment stage and the dual vision system composed of two industrial cameras.The XXY alignment stage motion control system in this study is driven by the ARM46SAK stepper servo motors produced by Oriental Motor Corporation, and the motors are controlled by the PCI-7350 motion control card developed by National Instruments through the motor drivers.The part of the dual CCD visual system mainly uses image processing techniques to determine the coordinate positions of the target located on the XXY alignment stage by the center of gravity method, and then the target coordinates are sent back to the motion control system, which controls the XXY alignment stage. Thus, the target position commands can be followed to achieve the stage alignments.

The experiments of the study are mainly divided into two parts.In the first part, the single-axis movement errors, the multi-axis movement errors, and visual system errors are measured by using a laser rangefinder.By using the interpolation method based on the error data, the exact movement amounts to the motion control system are modified.The main purpose is to compensate the positioning errors of the XXY alignment stage.The second part mainly uses the images captured by the dual CCDs and the image processing techniques to obtain the actual movement amounts of the XXY alignment stage through the conversion of the image coordinates and the world coordinates, and then the average method and the data interpolation are used to compensate the errors of the image data captured by the two CCDs.This process realizes the integration of the dual CCD visual system and the XXY alignment stage.

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