摘要

本實驗主要是以熱蒸噴霧法，將奈米銀線與奈米碳管溶於乙醇中，並噴覆於加熱的鈉玻璃基板上，再以PI溶液披覆於其上後，放置於90℃烘箱中經24小時烘乾後，完成奈米線/聚亞醯胺表面電極的製作。實驗中分別討論奈米銀線表面電極(Ag NW/PI)系統、奈米碳管表面電極(CNT/PI)系統、(奈米銀線＋奈米碳管)混摻型表面電極系統、披覆ITO薄膜之奈米銀線表面電極(ITO/Ag NW/PI)系統、批覆ITO薄膜表面電極(ITO/PI)系統，對表面電極進行電阻率量測與機械作用力下之破壞分析。
(Ag NW/PI)表面電極系統經噴覆30次得到的最低電阻率為0.016 Ω-cm與最低電阻率為0.16 Ω-cm的(CNT/PI)表面電極系統進行比較，發現(Ag NW/PI)系統可以得到較低的電阻率。對熱蒸噴霧12次所製備出的混摻型表面電極，進行其電阻率之比較，其中以摻雜奈米銀線比例較多的表面電極，有較低的電阻率，如Ag:CNT= 3:1所製得之表面電極電阻率為0.62 Ω-cm。
挑選熱蒸噴霧12次具有電阻率為0.17 Ω-cm的奈米銀線表面電極披覆導電ITO，形成( ITO/Ag NW/PI)系統的電阻率為0.012 Ω-cm，比原先未披覆ITO的(Ag NW/PI)系統有較低的電阻率，因此覆上ITO，可以改善表面電極的電阻率，主要原因為ITO的導電材料有較低電阻率。若將ITO於相同濺鍍條件下，披覆於PI基板上，所形成ITO/PI系統其電阻率為9×10-4 Ω-cm。
研究壓痕荷重與循環彎折測試對表面電極之變形行為，發現覆有ITO的表面電極，破裂面為最明顯，係因為ITO的脆性與ITO/PI的剛性不匹配造成變形不同與界面應力產生，導致覆有ITO表面電極會有崩裂的情形產生。

關鍵字: 奈米銀線、奈米碳管、聚亞醯胺、表面電極、ITO、電阻率

Abstract
In this study, nanowires/polyimide surface electrodes were prepared by thermal atomization spraying with two kinds of solutions of silver nanowires and carbon nanotubes on soda lime glass plates followed by casting of polyimide solution and oven drying at 90oC for 24h. Five kinds of surface electrode systems were investigated: silver nanowire/polyimide (Ag NW/PI) system, carbon nanotube/polyimide (CNT/PI) system, (Ag NW+CNT/PI) blend-type system, ITO-coated (Ag NW/PI) system or (ITO/Ag NW/PI) system, and ITO/polyimide (ITO/PI) system. Electrical resistivity of these surface electrodes and their response under mechanical tests were evaluated.
The (Ag NW/PI) and (CNT/PI) systems had electrical resistivities of 0.016 Ω-cm and 0.16 Ω-cm, respectively, after spraying for 30 times. The Ag NW-covered surface electrode had lower resistivity. For the blended surface electrodes with Ag:CNT= 1:3, 1:1, and 3:1 in volume ratio, the surface electrode had lower resistivity at a higher silver ratio. For the electrode with Ag:CNT= 3:1, it had the lowest resistivity of 0.62 Ω-cm.
The (ITO/Ag NW/PI) system displayed low electrical resistivity of 0.012 Ω-cm, after the 12-time sprayed (Ag NW/PI) system with electrical resistivity of 0.17Ω-cm was coated with low-resistivity ITO films. If the ITO films were coated on polyimide substrates by magnetron sputtering under the conditions of sputter power of 60 W, substrate temperature of 200oC, and deposition duration of 30 min, the obtained ITO/PI system had low resistivity of 9×10-4 Ω-cm.
The fractural behaviors of different surface electrode systems were investigated under the effects of indentation loading and cyclic bending tests. Due to the brittleness of the ITO ceramic and the mismatch in the stiffness for the ITO and polyimide, the ITO/PI and ITO/Ag NW/PI systems showed severe cracking.

Keywords: Silver nanowire, carbon nanotube, polyimide, surface electrode, ITO, electrical resistivity

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