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研究生: IKA NOVITASARI
IKA NOVITASARI
論文名稱: DESIGN OF ACTIVE III-V/SOI PHOTONIC DEVICES BASED ON TAPERED COUPLER AND GACC METHODS
DESIGN OF ACTIVE III-V/SOI PHOTONIC DEVICES BASED ON TAPERED COUPLER AND GACC METHODS
指導教授: 李三良
San-Liang Lee
口試委員: 葉秉慧
PING-HUI YEH
徐世祥
SHIH-HSIANG HSU
學位類別: 碩士
Master
系所名稱: 電資學院 - 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2019
畢業學年度: 107
語文別: 英文
論文頁數: 76
中文關鍵詞: SOIActive III-VTapered Coupler methodGACC Method
外文關鍵詞: SOI, Active III-V, Tapered Coupler method, GACC Method
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The hybrid active photonic devices that combine the strengths of both III-V and silicon-on-insulator (SOI) material platforms are the enabling technologies to realize the light sources and other functional devices in photonic integrated circuits (PICs). The adhesive bonding is a good solution for hybrid lasers by bonding active III-V layer and SOI layer in order to the couple and transfer the light from one waveguide to another.
In this thesis, the hybrid active III-V/SOI photonic devices are designed by using two different coupling methods, including the tapered coupler method and grating-assisted codirectional coupler (GACC) method. Both methods use the adhesive bonding to combine the active III-V and passive SOI structures. The key concept of both methods is to control the effective refractive indices of the active III-V and SOI waveguides to match the phase velocity of the modes in the two waveguides. By doing so, the light can easily transfer from one waveguide to other. The simulation result shows that the design of hybrid active III-V/SOI devices with the Si rib waveguide thick of 400 nm can reach the highest coupling efficiency of 98% for 97-µm device length. The device has succeeded in transferring almost all the light from an active III-V waveguide into Si waveguide. Meanwhile, the structure design of hybrid an active III-V/SOI photonic devices with the general Si RIB waveguide thick of 220 nm could achieve of 87.8% for 120 µm device length. It shows that tapered coupler is a good candidate method to transfer mode from an active III-V waveguide into the Si waveguide. However, the fabrication process for tapered design in the III-V layer is difficult and requires high-precision photolithography to minimize the light propagation loss.
To avoid the use of fine taper structure, the GACC is investigated by adding the directional grating coupler between the active III-V and SOI waveguides. The simulation results show that the GACC methods with 220 nm Si RIB waveguide and the grating period of 3.975 (duty cycle of 50%) could achieve the coupling efficiency of 35% for 80 µm device length. Although the result is not as good as using tapered coupler methods, the GACC methods are easier in the fabrication process and it needs shorter device length to couple the mode into SOI waveguide than using tapered coupler method. The coupling efficiency can be enhanced by optimizing the layer structure.


The hybrid active photonic devices that combine the strengths of both III-V and silicon-on-insulator (SOI) material platforms are the enabling technologies to realize the light sources and other functional devices in photonic integrated circuits (PICs). The adhesive bonding is a good solution for hybrid lasers by bonding active III-V layer and SOI layer in order to the couple and transfer the light from one waveguide to another.
In this thesis, the hybrid active III-V/SOI photonic devices are designed by using two different coupling methods, including the tapered coupler method and grating-assisted codirectional coupler (GACC) method. Both methods use the adhesive bonding to combine the active III-V and passive SOI structures. The key concept of both methods is to control the effective refractive indices of the active III-V and SOI waveguides to match the phase velocity of the modes in the two waveguides. By doing so, the light can easily transfer from one waveguide to other. The simulation result shows that the design of hybrid active III-V/SOI devices with the Si rib waveguide thick of 400 nm can reach the highest coupling efficiency of 98% for 97-µm device length. The device has succeeded in transferring almost all the light from an active III-V waveguide into Si waveguide. Meanwhile, the structure design of hybrid an active III-V/SOI photonic devices with the general Si RIB waveguide thick of 220 nm could achieve of 87.8% for 120 µm device length. It shows that tapered coupler is a good candidate method to transfer mode from an active III-V waveguide into the Si waveguide. However, the fabrication process for tapered design in the III-V layer is difficult and requires high-precision photolithography to minimize the light propagation loss.
To avoid the use of fine taper structure, the GACC is investigated by adding the directional grating coupler between the active III-V and SOI waveguides. The simulation results show that the GACC methods with 220 nm Si RIB waveguide and the grating period of 3.975 (duty cycle of 50%) could achieve the coupling efficiency of 35% for 80 µm device length. Although the result is not as good as using tapered coupler methods, the GACC methods are easier in the fabrication process and it needs shorter device length to couple the mode into SOI waveguide than using tapered coupler method. The coupling efficiency can be enhanced by optimizing the layer structure.

 TABLE OF CONTENTS ABSTRACT I ACKNOWLEDGMENTS II TABLE OF CONTENTS III LIST OF FIGURES V LIST OF TABLES VIII CHAPTER 1 - INTRODUCTION 1 1.1. Background 1 1.2. Currently Work and Motivations 2 1.3. Thesis Contribution and Purpose 3 1.4 Thesis Limitations 3 1.5 Thesis Architecture 4 CHAPTER 2 - LITERATURE REVIEW 5 2.1 Photonic Hybrid Silicon Lasers 5 2.1.1 Passive layers (SOI Layers) 5 2.1.2Active layers (III-V Layers) 7 2.1.3Bonding wafer for hybrid SOI/III-V layer 8 2.2 Hybrid active III-V/SOI fabrication process 13 2.3 Tapered Coupler Methods for Active III-V/SOI Devices 15 CHAPTER 3 – GRATING-ASSISTED CODIRECTIONAL COUPLER (GACC) 17 3.1 Grating-Assisted Codirectional Coupler (GACC) 17 3.2 Coupled Mode Analysis 18 CHAPTER 4 – ACTIVE III-V/SOI PHOTONIC DEVICE CHARACTERISTICS 22 4.1 Control Tapered Coupler Method 22 4.1.1Device Characteristics 22 4.1.2 Parameter set-up for Simulation 26 4.2 Grating-Assisted Codirectional Coupler (GACC) Method 27 4.2.1 Device Characteristics 27 4.2.2 Parameter set-up for Simulation 29 CHAPTER 5 - SIMULATION RESULTS OF TAPERED COUPLER METHODS 30 5.1 Simulation Results of Tapered Coupler Method (active III-V/SOI) 30 5.1.1Si waveguide thickness of 500 nm 30 5.1.2Si waveguide thickness of 400 nm 40 5.1.3Si waveguide thickness of 220 nm 43 5.2 Simulation of control tapered coupler (only in the SOI layers) 49 5.2.1Si waveguide thickness of 500 nm 49 5.2.2Si waveguide thickness of 400 nm 51 5.2.3Si waveguide thickness of 220 nm 52 CHAPTER 6 - SIMULATION RESULTS OF GACC METHODS 55 6.1 An InP bottom cladding thickness of 0.1 µm 56 6.2 An InP bottom cladding thickness of 0.35 µm 57 6.3 An InP bottom cladding thickness of 1 µm 58 CHAPTER 7 - CONCLUSIONS AND FUTURE WORK 60 5.1 Conclusions 60 5.2 Future Work 60 REFERENCES 62

REFERENCES
[1] G. H. Duan, C. Jany, A. L. Liepve, A. Accard, M. Lamponi, D. Make, P. Kaspar, G. Levauvre, N. Girard, F. Lelarge, J. Fedeli, A. Descos, B. B. Bakir, and D. J. Thomson, “Hybrid III-V on Silicon Laser for Photonic Integrated Circuits on Silicon”, IEEE Journal of Selected Topics in Quantum Electronics, Vol.20, No.4, Aug. 2014.
[2] Y. D. Koninck, G. Roelkens, and R. Baest, “Cavity Enhanced Reflector Based Hybrid Silicon Laser”, IEEE Photonics Society Annual Meeting 2010, 2010.
[3] Maximize Market Research PVT.LTD., “Silicon On Insulator (SOI) Market-Global Industry Analysis and Forecast (2018-2026)-by Product, Application, and Geography”,2018
(https://www.maximizemarketresearch.com/market-report/silicon-on-insulator-soi-market/11657/)
[4] K. Ouellette, “RF and SOI Technologies fro 5G”, RFSOI Conference, SOI Consortium, Shanghai, Sept.2018
[5] B. Vandana, “Study of Floating Body Effect in SOI Technology”, International Journal of Modern Engineering Research (IJMER), Vol.3, Issue 3, pp.1817-1824, June 2013
[6] W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated with CMOS Technology”, IEEE Journal of Selected Topics in Quantum Electronics, Vol.16, No.1, Feb.2010
[7] J. Sampath, ”Silicon-On-Insulator (SOI) – Rulling the Wafers Markets”,Frost and Sullivant Market Insight, Jul. 2007 (http://www.frost.com/prod/servlet/market-insight-print.pag?docid=101472159)

[8] L. Vivien, F. Grillot, E. Cassan, D. Pascal, S. lardenois, A. Lupu, S. Laval, M. Heitzmann, and J. M. Fedeli, “Comparison Between Strip and RIB SOI Microwaveguides for Intra-Chip Light Distribution”, Elsevier : Optical Materials 27 (2005), 756-762, Oct. 2004
[9] H. Subbaraman, X. Xu, A. Hossain, X. Zhang, Y. Zhang, D. Kwong, and R. T. Chen, “Recent Advances in Silicon-Based Passive and Active Optical Interconnect”, Opt.Express, Vol.22, No.3, pp.2487-2511, 2015
[10] S. Mauthe, H. Schmid, B. Mayer, S. Wirths, C. Convertino, Y. Baugmgartn, L. Czornomaz, M. Sousa, P. Staudinger, H. Riel, and K. E. Moselund, “Monolithic Integration of III-V on Silicon for Photonicand Electronic Applications” IEEE Explore : 76th Device Research Conference, Jun. 2018
[11] M. Tilli, M. Paulasto, T. Motooka, and V. Lindroos, , “Handbook of Silicon Based MEMS Materials and Technologies 2nd edition”, 2015
[12] M. Chiao, “Packaging (and Wire Bonding)”, Springer Science+Business Media LLc, 2008
[13] L. Sanchez, F. Fournel, B. Montmayeul, and L. Bally” Collective Die Direct Bonding for Photonic on Silicon”, Americas International Meeting on electrochemistry and Solid State Science, Mexico, Sept. 2018
[14] R. Bo, H. Yan, and L. Yanan, “Research Progress of III-V Bonding to Si”, Journal of Semiconductors, Vol.37, No.12, 2016
[15] L. Megalini, B. C. Cabinian, H. Zhao, D. C. Oakley, J. Bowners, and J. Klamkin, “Large-Area Direct Hetero-Epitaxial Growth of 1550 nm InGaAsP Multi-Quantum-Well Structures on Patterned Exact-Oriented (001) Silicon Substrates by Metal Organic Chemical Vapor Deposition”, Journal of Electronic Materials, Vol.47, No.2, pp.982-987, 2018

[16] S. Keyvaninian, S. Stankovic, D. V. Thourhout, M. Muneeb, P. J. V. Veldhoven, and G. Roelkens, “Ultra Thin DVS-BCB adhesive Bonding of III-V Wafers, Dies, and Multiple Dies to a Patterned Silicon on Insulator Substrate”, Optical Materials Express, 2013
[17] R. C. Waugh, “Development of Infrared Techniques for Practical Defect Identification in Bonded Joints”, Springer International Publishing Switzerland 2016, Switzerland, 2016
[18] A. Pizzi and K. L. Mittal, “ Handbook of Adhesive Technology”, Oct. 2018
[19] G. Roelkens, A. Abbasi, U. D. Dave, P. Cardile, A. D. Groote, Y. D. Koninck, S. Dhoore, X. Fu, A. Gassenq, N. Hattasan,S. Kumari, B. Kuyken, P. Mevhet, D. Sanchez, T. Spuesens, S. Uvin, A. Subramanian. M. Muneeb, L. Li, Q. huang, R. Baets, and M. Tassaert, “III-V-On-Silicon Photonic Devices for Optical Communication and Sensing”, Photonics ISSN 2304-6732, Sept. 2015
[20] S. Stankovic, R. Jones, J. Heck, M. Sysak, D. V. Thourhout, and G. Roelkens, “Die-to-Die Adhesive Bonding for Evanescently-Coupled Photonic Devices” Electrochemical and Solid-State-Letters, 16(8):H326-H329, May 2011
[21] R. Wang, M. Muneeb, A. Vasiliev, A. Malik, S. Sprengel, G. Boehm, L. Simonyte, A. Vizbaras, R. Baets, M. Amann, and G. Roelkens, “III-V/Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2µm Wavelength range”, Proceeding of Smart Photonic and Optoelectronic Integrated Circuit, Vol.10536, Feb. 2018
[22] W. Li, W. P. Huang, and X. Li, “Digital filter Approach for Simulation of a Complex Integrated Laser Diode Based on The Travelling-Wave Model”, IEEE Journal of Quantum Electronic, Vol.40, No.5, May 2004
[23] X. Wang, Y. Zhao, S. Xiao, and J. Dong, “Tunable Optical Delay Line Based on Integrated Grating-Assisted Contradirectional Couplers”, OSA : Photonics Research, Vol.6 Issue.9, pp.880-886, 2018
[24] N. H. Sun, J. K. Butler, G. A. Evans, L Pang, and P. Congdon, “Analysis of Grating-Assisted Directional Couplers Using The Floquet-Bloch Theory”, Journal of Lightwave Technology, Vo.15, No.12, Dec. 1997
[25] N. H. Sun, C. C. Chou, H. W. Chang, J. K. Butler, and G. A. Evans, “ Radiation Loss of Grating-assisted Directional Couplers Using the Floquet-Bloch Theory”, Journal of Lightwave Technology, Vol.24, No.6, June 2006
[26] S. Keyvaninia, G. Roelkens, D. V. Thourhout, C. Jany, M. Lamponi, A. L. Liepvre, F. Lelarge, D. Make, G. H. Duan, J. M. Fedeli “Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser”, Opt. Express Vo.21 No.3, 2013
[27] Y.-H. Jan, “ InP/InGaAsP Broadly Tunable Filters/Receivers with Grating-Assisted Codirectional Couplers”, Electrical and Computer Engineering Technical Report, University of California, Santa Barbara, California, 1996
[28] J. D. Davis, A. Grieco, M. C. M. Souza, C. Newton, and Y. Fainman, “Hybrid Multimode Resonators Based on Grating-Assisted Counter-Directional Couplers”, Optics Express, Vol.25, Issue 14, pp.16484-16490, 2017
[29] P. Kaur and M. R. Shenoy, “Grating-Assisted non-Linear Directional Coupler Based Optical Switch with Reduced Critical Power”, Journal of Modern Optics, Vol.65, Issue15, April 2018

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