多年以來太陽能矽基板為重要之替代能源，但矽基板加工效率和耗能問題一直是綠能產業無法普及因素之一，本研究首次提出傳統固定磨料(Diamond Wire Sawing, DWS)結合游離磨料(Slurry Wire Sawing, SWS)以電泳反應方式進行切片，研發出電泳輔助鑽石線鋸加工製程，並將固相化學反應應用於加工矽基板製程上，稱電泳反應式鑽石線鋸(Reactive Electrophoretic Diamond Wire Sawing, REP-DWS)，由碳酸鈣反應磨料將硬質矽晶碇表面轉為軟質性質，並利用接觸角、維克氏硬度、X-ray電子能譜儀等驗證固相化學反應機制(Solid Phase Chemical Reaction, SPCR)。本研究先改裝實驗用REP-DWS單線測試機台，由實驗結果顯示，透過此REP-DWS之製程，提高反應磨料使用效率，並於單線加工實驗使用四種參數來比較製程，使用電壓25V與30wt%碳酸鈣漿料之製程參數時可提升表面粗糙度6%和降低表面鋸痕57%。然後將REP-DWS製程導入商用複線式線鋸加工機台並進行改裝設計，實驗結果可得，電泳反應式輔助鑽石線鋸製程(REP-DWS)與傳統鑽石線鋸製程(DWS)相較下，多晶矽材料移除率可增益13%，線鋸磨削比可增益59%。本研究相關成果可供日後複線式線鋸製程發展，減少基板表面鋸痕、減少次表面缺陷與發展更有效率太陽能基板品質之製程參考。

Solar cells have been one of the most important alternative energy for many years. However, efficiency and energy exhaustive of fabrication silicon substrates have always been a major problem in promotility such green products. This study develops a Reactive Electrophoretic Diamond Wire Sawing (REP-DWS) to slice first time, which integrates both Diamond Wire Sawing (DWS) and Slurry Wire Sawing (SWS) with Solid Phase Chemical Reaction (SPCR) to be a novel slicing process of silicon substrates. Calcium carbonates are used as reactive abrasive to soften the surface of silicon ingot with solid-state reaction layer and then removed by diamond abrasive to improve the Material Removal Rate (MRR). Tests of contact angle, Vickers indentation and XPS have been used to verify the existence of reaction layer. In this study, REP-DWS single-wire saw test machine has been remodeled, for experimental parameters, using voltage 25V and slurry with 30wt% CaCO3 concentration can improve surface roughness about 6% and reduce surface saw marks of sliced substrates about 57%. Then a commercial multi-wire saw experimental apparatus has been retrofitted, for experiments of results, REP-DWS can increase MRR about 13% and reduce the wear of diamond grits on wire by 59% as compared with DWS. The REP-DWS process improves saw marks on surface and also reduce sub-surface crack. Results of this study can be further develop of multi-wire saw process.

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