近年來，由於鹵化物鈣鈦礦(Halide Perovskite)其優異的光電性能，例如在紫外至可見光的高吸收係數、長載流子擴散長度和低激子結合能，在新世代薄膜太陽能電池中表現出優異的性能。在過往文獻探討中，鈣鈦礦薄膜通常採用溶液製程加工(Solution process)，簡易製備的優勢雖加速學研上的進展，然而此製程需要引入各種有毒有機溶劑產生疑慮，有悖綠能能源的初衷。
本論文藉由使用多源真空沉積(multisource vacuum deposition)系統以探討非溶劑製程條件製備鈣鈦礦薄膜的可行性。透過混合不同前驅物比例以調整鈣鈦礦薄膜穿透、吸收特性，並進一步探討以此薄膜作為太陽能電池主動層的特性，透過調整電洞傳輸層（HTL）和不同廠商提供之鈣鈦礦前驅物，我們成功以 p-i-n 倒置結構，在 AM1.5G 標準太陽光輻射強度下將功率轉換效率提升至 10.85%。此外，利用連續熱蒸鍍製程優勢，我們將鈣鈦礦薄膜的厚度提升至 2 μm，可以完全阻擋紫外至可見光波段(300-650 nm)入射光，達到 OD4 等級，並且在 780 nm 近紅外波長下保有 80%的穿透度。此外，此鈣鈦礦濾光片在標準 AM 1.5G 高強度太陽光連續照射八週後，薄膜穿透度仍保持不變，展示真空製備鈣鈦礦薄膜之高度穩定性。

In recent years, the halide perovskites have shown the outstanding properties for solar cells due to their excellent optoelectronic properties, high absorption coefficients, long charge-carrier diffusion lengths, and low exciton binding energies. The perovskite films are usually prepared by the spin-coating method. Drawback of this method is that the film preparation requires a glove box environment and the use of various toxic organic solvents. As a result, the stability of the film is often insufficient and the process cannot be easily transferred to industry for mass production.
The purpose of this thesis is to use the novel multisource vacuum deposition system for the fabrication of perovskite films. We have found that this vacuum deposition system enables to produce a high quality and better stability perovskite film.Note that we have measured the absorption curve of the film to verify the quality of the
synthesis. Then, by adjusting the hole transport layer (HTL) and different brand of FAI, we have fabricated p-i-n solar cells with the power conversion efficiency of 10.85%.
Furthermore, we have shown that for perovskite film with thickness of 2 um the visible
light can be blocked and the transparence at 780 nm is ~80%. And, finally, this
perovskite filter has also been soaked under the AM 1.5G solar illumination for
continuous operation, that is, data recoded once a week for eight weeks has revealed no
any degradation of transparency

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