本研究使用微波電漿化學氣相沉積系統(Microwave plasma chemical vapor deposition, MPCVD)在CH4/Ar/N2氣體混合下合成氮摻雜的超奈米晶鑽石薄膜，藉由調整甲烷與氬氣的比例，分析鑽石薄膜外觀與特性的變化，固定甲烷的流量後再調整氮氣與氬氣的比例，得到CH4/Ar/N2為6/44/50具有良好導電率，導電率為1.17 x 101 (Ω．cm)-1。檢測鑽石薄膜品質的儀器包含場發射掃描式電子顯微鏡(Field emission scanning electron microscope)、顯微拉曼光譜儀(Raman spectrometer)、光放射光譜儀(OES)、X射線光電子能譜儀(X-ray Photoelectron Spectrum,XPS)以及霍爾量測分析儀(Hall effect measurement)來分析鑽石薄膜的特性。
將摻氮奈米鑽石薄膜使用微波電漿系統進行表面改質，利用氧電漿使鑽石薄膜表面與氧相關基團產生鍵結，其中羧基基團(COOH)能與葡萄糖氧化酶(GOx)之游離氨基(-NH2)產生鍵結製成葡萄糖感測器，氧電漿改質結果使用X射線光電子能譜儀進行檢測分析。氧電漿處理時間為60秒時鑽石薄膜表面擁有最多的羧基基團，在C1s中相對百分比為1.85 %。
將表面改質之摻氮奈米鑽石薄膜製成電化學工作電極，使用循環伏安法(Cyclic voltammetry, CV)使電極表面與葡萄糖氧化酶產生共價鍵結，經計算得到葡萄糖氧化酶表面覆蓋率為2.79 x 10-10 mol cm-2，以及使用不同掃描速率證明電極為擴散控制電子轉移。最後使用安培法(Amperometry)測量本研究之葡萄糖感測器的線性量測範圍區間、靈敏度、檢測極限值以及保存度測試。線性量測範圍為1.8–23.05 mM，靈敏度為0.348 μAmM-1cm-2，檢測極限為0.864 mM，存放一個禮拜與兩個禮拜後，其靈敏度則下降了88.94 %和97.18 %。

In this study, nitrogen-doped ultra nano-diamond (UNCD) films were synthesized on a thermally oxidized silicon substrate by using a microwave plasma chemical vapor deposition (MPCVD) under CH4/Ar/N2 gas mixture. The ratios of methane to argon were varied to change the surface morphology and characteristics of the diamond films. With a constant flow rate of methane, the ratio of nitrogen to argon was adjusted, and diamond film with good electrical conductivity of 1.17 x 101 (Ω.cm)-1 was obtained with CH4/Ar/N2 of 6/44/50. Instruments for investigation of the quality of diamond films include Field Emission Scanning Electron Microscopy (FESEM), Raman spectrometer, Optical emission spectroscopy (OES), X-ray photoelectron spectroscopy (XPS), and Hall effect measurement to analyze the structure and properties of diamond films.
The nitrogen-doped nano-diamond film is surface-modified with a microwave plasma system, and the surface of the diamond film is bonded with oxygen-related groups by oxygen plasma, wherein the carboxyl group (COOH) can be combined with the free amino group (-NH2) of glucose oxidase (GOx) for glucose sensors. The oxygen plasma modification result was detected by an XPS. When the oxygen plasma treatment time is 60 seconds, the surface of the diamond film has maximum amount of carboxyl group, and the relative percentage in C1s is 1.85 %.
After the surface-modified nitrogen-doped nano-diamond film was made into an electrochemical working electrode, cyclic voltammetry (CV) was used to make the electrode surface covalently bondsd with glucose oxidase. The surface coverage of glucose oxidase was calculated to be 2.79 x 10-10 mol cm-2 and the electrode was proved for diffusion-controlled electron transfer using different scan rates.
Finally, amperometry was used to measure the linear measurement range, sensitivity, limit of detection and preservation test of the glucose sensors. The linear measurement range was 1.8–23.05 mM, the sensitivity was 0.348 μA mM-1 cm-2, and the limit of detection was 0.864 mM. After one week of storage and two weeks later, the sensitivity decreased by 88.94 % and 97.18 %, respectively.

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