研究生: |
劉科震 Ko-chen Liu |
---|---|
論文名稱: |
利用FPGA晶片作單軸微/奈米定位平台之即時運動控制研究 Research on the Real-Time Control of a Closed-Loop Micro-/Nano-Positioning Stage using a FPGA Interface Card |
指導教授: |
修芳仲
Fang-Jung Shiou |
口試委員: |
曾垂拱
Chwei-Goong Tseng 陳朝榮 Chao-Jung Chen 林紀穎 Chi-Ying Lin |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2009 |
畢業學年度: | 97 |
語文別: | 中文 |
論文頁數: | 110 |
中文關鍵詞: | 微/奈米定位平台 、ANSYS 、橋型位移放大機構 、電容式位移感測器 、PID控制 、FPGA晶片 |
外文關鍵詞: | micro-/nano-positioning stage, ANSYS software, bridge displacement magnification mechanism, capacitive sensor system, PID control, FPGA chip |
相關次數: | 點閱:315 下載:4 |
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本研究旨在開發一閉迴路微/奈米定位系統,系統主要元件包含以有限元素分析設計之具位移放大機構之微/奈米定位平台、壓電致動器、電容式位移感測器系統、NI cRIO9074即時控制機盒與FPGA晶片、PC等,系統以Labview程式語言撰寫程式作定位系統之整合控制。
本研究利用對稱式橋型位移放大機構設計,以ANSYS有限元素分析軟體進行設計上的靜態及動態分析,並完成局部重要尺寸改良的設計。
依據實驗結果,所研製之定位平台其位移可達119.4 μm,三軸之旋轉角最大為Z軸的4.852〞。此定位平台經測試後,在以NI cRIO9074 FPGA晶片燒入下所建立的閉迴路PID控制系統,步階定位能力可控制在2 nm,斜坡追蹤速度為5000 nm/s。
此整合系統之特點在於結構與控制邏輯簡單,並藉由電容位移感測器器量測系統作位置回授之閉迴路控制系統,與光纖干涉儀相較之下能在短時間內達到高精度控制的功能,對發展自主性之完整奈米定位系統,建立關鍵研發基礎。
The objective of this research is to develop a NI cRIO9074 based closed loop micro-/nano-positioning system. The developed system mainly consists of a piezoelectric actuator, a bridge mechanism for displacement magnification, a micro-/nano-positioning stage body analyzed by the FEM software ANSYS, a capacitive sensor system, NI cRIO9074 real-time control with FPGA chip, and a PC. A set of software written with the Labview programming language was developed to construct the PID closed-loop control of the developed positioning system.
A bridge displacement magnification mechanism has been designed to enlarge the travel of PZT actuator. After executing the simulation analyses of the displacement, stress, and the natural frequency, using the ANSYS software, the dimensions of the stage body have been designed and determined.
Based on the test results, the designed closed loop mi-cro-/nano-positioning system was capable of performing precision positioning within the travel of 119.4 μm. The positioning capability was about 2 nm under the slope tracing speed of 5000 nm/s using the NI cRIO9074 FPGA based PID control. The maximum Yaw error of the stage moving along Z-direction was about 4.852 arc-seconds.
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