本研究旨在開發一長行程閉迴路奈米定位平台系統，此平台使用雙框架兩軸獨立驅動單移動台機構，其中平台底座由空氣軸承支撐，使平台與花崗岩基座呈現非接觸狀態，驅動方式則由ANCA 5DX驅動器與PC-Based介面之ANCA 5DX CNC控制器對線性馬達進行移動控制，移動後之訊號經由光學尺迴授，形成一閉迴路控制系統。
依據實驗結果，所研製之定位平台其X軸行程可達到移可達100 mm，Y軸行程則達到50 mm，Z方向之平台穩定度可達到20 nm，X軸之旋轉角最大為3.77角秒，Y軸為1.04角秒。此定位平台經測試後，在以PC-Based介面之ANCA 5DX CNC控制器下所建立的閉迴路PID控制系統，X軸之步階定位能力可控制在2 nm，Y軸之步階定位能力可控制在5 nm，循圓軌跡測試在循圓半徑20 mm時，真圓度誤差為223 nm，追蹤誤差測試X軸速度在0.05 mm/min時1倍標準差之誤差為3 nm，Y軸速度在0.05 mm/min時1倍標準差之誤差為9 nm。

The objective of this research is to develop a PC-based closed-loop nano-positioning system using the dual-frame two-axis drive single mobile independent framework. The stage body was supported by an air bearing on a granite base to reduce the frictional force. The developed stage was driven by the PC-Based interface of ANCA 5DX CNC controller the ANCA 5DX Digital Servo drive, for the precision motion control of the linear motors. The laser scales were used as the feedback sensors so that the closed loop control of the developed system was possible.
Based on the test results, the designed closed loop nano-positioning system was capable of precision positioning within the travel of 100 mm along X-axis and the travel of 50 mm along Y-axis. The Z-direction stage stability of the developed system was 20 nm, the maximum yaw error of the stage moving along X-axis was about 3.77 arc-seconds, and the maximum pitch error of the stage moving along Y-axis was about 1.04 arc-seconds, based on the test results. By utilizing the PC-Based interface of ANCA 5DX CNC controller based closed-loop of PID control system, the positioning capability of X-axis was about 2 nm, the positioning capability of Y-axis was about 5 nm. Performing the circular test with radius of 20 mm, the circular positioning test of deviation was 223 nm. Based on the tracing speed test results, the standard deviation along X-axis was 3 nm under tracing speed of 0.05 mm/min, whereas the standard deviation along Y-axis was 9 nm under tracing speed of 0.05 mm/min.

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