原子力顯微鏡通常用於掃描奈米樣品，例如生物細胞，DNA等。由於掃描樣品的尺寸非常小，並且探針與表面之間的力有敏感的變化，因此原子力顯微鏡的準確性需求非常高，才可以獲取清晰的表面輪廓。本論文模擬出AFM系統，掃描模式為輕敲式，並用比例積分控制器做z軸壓電掃描器的控制。之後針對此項變異度高的探針的即時訊號，做經驗模態拆解，得到他的瞬時頻率，捨棄一般的震幅方面所需收斂條件，將瞬時頻率做回授訊號，增加掃描速度與精度。最後做實驗來得到最重要的z軸壓電驅動器之系統鑑定，得到他的波德圖，放入到模擬的控制系統做比對，以及應用瞬時頻率回授與振幅回授在鑑定系統中。

Atomic force microscopes are commonly used to scan nano samples, such as biological cells, DNA, etc. Because the size of the scanned sample is very small, and the force between the probe and the surface is sensitive to changes, the accuracy of the atomic force microscope needs to be very high to obtain a clear surface profile. This thesis simulates the AFM system, the scanning mode is tapping , and the proportional integral controller is used to control the z-axis piezoelectric scanner. Then, for the real-time signal of the probe with high variability, the signal is analyzed by Empirical Mode Decomposition to obtain its instantaneous frequency, and the general convergence conditions for amplitude are discarded. The instantaneous frequency is used as the feedback signal to increase the scanning speed and accuracy. Finally, experiment to get the system identification of the most important z-axis piezoelectric driver, get his Bode diagram, and put it into the simulated control system for comparison, and apply it to instantaneous frequency feedback and amplitude feedback in the identification system.

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