簡易檢索 / 詳目顯示

研究生: MUHAMMAD HAWARY ASSA
MUHAMMAD HAWARY ASSA
論文名稱: 硫化鈷薄膜之雙極式電阻式記憶體
Cobalt Sulfide Based Bipolar Resistive Switching Memory
指導教授: 周賢鎧
Shyan-Kay Jou
口試委員: 黃柏仁
Bohr-Ran Huang
蔡孟霖
Meng-Lin Tsai
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2023
畢業學年度: 111
語文別: 英文
論文頁數: 151
外文關鍵詞: Cobalt sulfide (CoSx), multi level
相關次數: 點閱:166下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報

  • Cobalt sulfide (CoSx) compromising CoS2 and Co9S8 was fabricated and used for resistive switching memory. A Co film was firstly deposited by e-beam evaporation. Then the Co surface was sulfurized form a CoSx layer. Then a Ag or Cu film was deposited on top of the CoSx film as the top electrode together with remaining Co film as the bottom electrode to form memory devices.
    The structural properties of the CoSx film were characterized using field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), high-resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The electrical properties were characterized using ultraviolet photoelectron spectroscopy (UPS), UV-Vis spectroscopy and photoluminescence spectroscopy. The devices were cyclically subjected to current-voltage (I-V) measurements using an Agilent B1500A. During the I-V measurements, the top electrode was swept with dc voltage in 20 mV steps while the bottom electrode was grounded.
    Both Ag/CoSx/Co and Cu/CoSx/Co cells exhibited bipolar resistive switching behavior. The conduction mechanisms for both Ag/CoSx/Co and Cu/CoSx/Co cells follow Ohmic conduction in low resistance state and Schottky emission in high resistance state. Electrical conduction of both Ag/CoSx/Co and Cu/CoSx/Co cells suggested the presence of a local metallic filamentary path in LRS. Both Ag/CoSx/Co and Cu/CoSx/Co cells also demonstrated multi-level resistive switching.

    ABSTRACT i ACKNOWLEDGEMENTS ii LIST OF CONTENTS iii LIST OF FIGURES vi LIST OF TABLES ix CHAPTER 1 – PREFACE 1 1.1 Intoduction 1 1.2 Research motivation 3 CHAPTER 2 – LITERATURE REVIEW 4 2.1 Introduction and types of memory 4 2.1.1 Ferroelectric Random Access Memory (FeRAM) 5 2.1.2 Magnetoresistive Random Access Memory (MRAM) 5 2.1.3 Phase-Change Random Access Memory (PRAM) 6 2.1.4 Resistive Random Access Memory (RRAM) 7 2.2 Resistance Switching Mechanism 9 2.2.1 Filamentary Conducting Path 10 2.2.2 Interface-type Conducting Path 11 2.2.3 Ionic Migration 12 2.3 Leakage Current Conduction Mechanism 13 2.3.1 Ohmic contact 14 2.3.2 Poole-Frenkel Emission 16 2.3.3 Space Charge Limited Conduction (SCLC) 17 2.3.4 Schottky Emission 20 2.3.5 Fowler-Nordheim Tunneling (FNT) 22 2.4 Material Structural Properties of Cobalt Sulfide (CoSx) 23 2.4.1 Basic properties of CoSx film 24 2.4.2 Relevant research on the preparation CoSx film 31 2.4.3 Related research on Co and metal sulfide as resistance layer 36 2.5 Research Purposes 40 CHAPTER 3 – EXPERIMENTAL METHODS AND INSTRUMENTS 41 3.1 Experimental materials and chemicals spesifications 41 3.2 Laboratory equipment and analytical instrument 42 3.3 Experimental principle 44 3.4 Experimental procedure 57 CHAPTER 4 – RESULT AND DISCUSSION 64 4.1 Basic material characterization of CoSx film 64 4.1.1 Raman spectra analysis of CoSx film 64 4.1.2 XRD analysis of CoSx film 65 4.1.3 XPS analysis of CoSx film 66 4.1.4 AFM analysis of CoSx film 69 4.1.5 FE-SEM analysis of CoSx film 70 4.1.6 HRTEM analysis of CoSx film 71 4.2 Electrical characterization of CoSx film 73 4.2.1 UPS analysis of CoSx film 73 4.2.2 UV-Vis analysis of CoSx film 75 4.2.3 PL analysis of CoSx film 77 4.3 Analysis of resistive memory Ag/CoSx/Co RRAM cell 79 4.3.1 FE-SEM cross sectional of Ag/CoSx/Co RRAM cell 79 4.3.2 HRTEM analysis of Ag/CoSx/Co RRAM cell 80 4.3.3 XPS depth profile of Ag/CoSx/Co RRAM cell 82 4.3.4 RRAM analysis of Ag/CoSx/Co RRAM cell 95 4.4 Analysis of resistive memory Cu/CoSx/Co RRAM cell 101 4.4.1 FE-SEM cross sectional of Cu/CoSx/Co RRAM cell 101 4.4.2 XPS depth profile of Cu/CoSx/Co RRAM cell 102 4.4.3 RRAM analysis of Cu/CoSx/Co RRAM cell 116 4.5 Discussion on switching mechanism of Ag CoSx/Co and Cu/CoSx/Co RRAM cell 122 CHAPTER 5 – CONCLUSION 124 FUTURE OUTLOOK 125 REFERENCES 126 APPENDIX 136

    1. Chen, Y., ReRAM: History, status, and future. IEEE Transactions on Electron Devices, 2020. 67(4): p. 1420-1433.
    2. Levy, M., Designing with flash memory: A tool exhibition. EDN, 1996. 41(14): p. 81-84.
    3. Micheloni, R., et al., Architectural and integration options for 3D NAND flash memories. Computers, 2017. 6(3): p. 27.
    4. Wu, H., et al., Resistive random access memory for future information processing system. Proceedings of the IEEE, 2017. 105(9): p. 1770-1789.
    5. Strukov, D.B., et al., The missing memristor found. Nature, 2008. 453(7191): p. 80-83.
    6. Li, Y., et al., Top electrode effects on resistive switching behavior in CuO thin films. Applied Physics A, 2011. 104: p. 1069-1073.
    7. Sawa, A., Resistive switching in transition metal oxides. Materials today, 2008. 11(6): p. 28-36.
    8. Oh, J. and S.M. Yoon, Resistive memory devices based on reticular materials for electrical information storage. ACS Applied Materials & Interfaces, 2021. 13(48): p. 56777-56792.
    9. Borghetti, J., et al., Memristive’switches enable stateful logic operations via material implication. Nature, 2010. 464(7290): p. 873-876.
    10. Cao, Q., et al., Nonvolatile multistates memories for high-density data storage. ACS Applied Materials & Interfaces, 2020. 12(38): p. 42449-42471.
    11. Bekiaris, N., et al. Cobalt fill for advanced interconnects. IEEE International Interconnect Technology Conference (IITC), Hsinchu, Taiwan, 2017, pp. 1-3.
    12. Mont, F.W., et al. Cobalt interconnect on same copper barrier process integration at the 7nm node. IEEE International Interconnect Technology Conference (IITC), Hsinchu, Taiwan, 2017, pp. 1-3.
    13. Jezewski, C.J., et al., Cobalt based interconnects and methods of fabrication thereof. U.S. Patent, 2016, No. 9,514,983. Washington, DC: U.S. Patent and Trademark Office.
    14. Griggio, F., et al. Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology. IEEE International Reliability Physics Symposium (IRPS), Burlingame, CA, USA, 2018, pp. 6E.3-1-6E.3-5.
    15. Pacco, A., et al., Controlled cobalt recess for advanced interconnect metallization. Microelectronic Engineering, 2019. 217: p. 111131.
    16. Ren, H., et al. Resistance scaling of Cu interconnect and alternate metal (Co, Ru) benchmark toward sub 10nm dimension. IEEE International Interconnect Technology Conference (IITC), Santa Clara, CA, USA, 2018, pp. 166-168.
    17. Wang, Z., et al., Resistive switching materials for information processing. Nature Reviews Materials, 2020. 5(3): p. 173-195.
    18. Yu, S., Neuro-inspired computing using resistive synaptic devices. 2017: Springer. 978-3-319.
    19. Lee, S.H., X. Zhu, and W.D. Lu, Nanoscale resistive switching devices for memory and computing applications. Nano Research, 2020. 13: p. 1228-1243.
    20. Meena, J.S., et al., Overview of emerging nonvolatile memory technologies. Nanoscale research letters, 2014. 9: p. 1-33.
    21. Zhang, H. and G. Zhang, Review of research on storage development. Scalable Computing: Practice and Experience, 2021. 22(3): p. 365-385.
    22. Spessot, A. and H. Oh, 1T-1C dynamic random access memory status, challenges, and prospects. IEEE Transactions on Electron Devices, 2020. 67(4): p. 1382-1393.
    23. Keeth, B., et al., DRAM circuit design: fundamental and high-speed topics. John Wiley & Sons, 2007. Vol : 13.
    24. Chen, A., A review of emerging non-volatile memory (NVM) technologies and applications. Solid-State Electronics, 2016. 125: p. 25-38.
    25. Wang, S., et al., Comparative evaluation of spin-transfer-torque and magnetoelectric random access memory. IEEE Journal on Emerging and Selected Topics in Circuits and Systems, 2016. 6(2): p. 134-145.
    26. Fujisaki, Y., Review of emerging new solid-state non-volatile memories. Japanese Journal of Applied Physics, 2013. 52(4R): p. 040001.
    27. Setter, N., et al., Ferroelectric thin films: Review of materials, properties, and applications. Journal of applied physics, 2006. 100(5): p. 051606.
    28. Tylczyński, Z., A collection of 505 papers on false or unconfirmed ferroelectric properties in single crystals, ceramics and polymers. Frontiers of Physics, 2019. 14: p. 1-38.
    29. Vasudevan, R.K., et al., Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale. Applied Physics Reviews, 2017. 4(2): p. 021302.
    30. Lata, L.K., et al., Resistive switching characteristics of HfO2 based bipolar nonvolatile RRAM cell. Materials Today: Proceedings, 2020. 30: p. 217-220.
    31. Si, M. and D.Y. Peide, The critical role of charge balance on the memory characteristics of ferroelectric field-effect transistors. IEEE Transactions on Electron Devices, 2021. 68(10): p. 5108-5113.
    32. Ferdaus, F., B.M.S.B. Talukder, and M.T. Rahman, Approximate MRAM: High-performance and Power-efficient Computing with MRAM Chips for Error-tolerant Applications. IEEE Transactions on Computers, 2022. 72(3): p. 668-681.
    33. Wang, Y., et al., Magnetic Random-Access Memory-Based Approximate Computing: An overview. IEEE Nanotechnology Magazine, 2021. 16(1): p. 25-32.
    34. Ikegawa, S., et al., Magnetoresistive random access memory: Present and future. IEEE Transactions on Electron Devices, 2020. 67(4): p. 1407-1419.
    35. Ikegawa, S., F.B. Mancoff, and S. Aggarwal. Commercialization of mram–historical and future perspective. In: 2021 IEEE International Interconnect Technology Conference (IITC). IEEE, 2021. p. 1-3.
    36. Gemo, E., et al., A plasmonically enhanced route to faster and more energy-efficient phase-change integrated photonic memory and computing devices. Journal of Applied Physics, 2021. 129(11): p. 110902.
    37. Wang, J., L. Wang, and J. Liu, Overview of phase-change materials based photonic devices. IEEE Access, 2020. 8: p. 121211-121245.
    38. Wuttig, M. and C. Steimer, Phase change materials: From material science to novel storage devices. Applied Physics A, 2007. 87: p. 411-417.
    39. Wang, Q., et al., Phase change random access memory for neuro‐inspired computing. Advanced Electronic Materials, 2021. 7(6): p. 2001241.
    40. Liu, B., et al., Universal memory based on phase-change materials: From phase-change random access memory to optoelectronic hybrid storage. Chinese Physics B, 2021. 30(5): p. 058504.
    41. Kumar, D., et al., Metal oxide resistive switching memory: materials, properties and switching mechanisms. Ceramics International, 2017. 43: p. S547-S556.
    42. Hu, S.G., et al., Review of nanostructured resistive switching memristor and its applications. Nanoscience and Nanotechnology Letters, 2014. 6(9): p. 729-757.
    43. Aldana, S., et al., A 3D kinetic Monte Carlo simulation study of resistive switching processes in Ni/HfO2/Si-n+-based RRAMs. Journal of Physics D: Applied Physics, 2017. 50(33): p. 335103.
    44. Pan, F., et al., Recent progress in resistive random access memories: Materials, switching mechanisms, and performance. Materials Science and Engineering: R: Reports, 2014. 83: p. 1-59.
    45. Lahbacha, K., et al. Reliable 3D 1D1R-1R1D solution for victim layers in monolithic RRAM integration. In: 2020 IEEE International Conference on Design & Test of Integrated Micro & Nano-Systems (DTS). IEEE, 2020. p. 1-4.
    46. Nielen, L., et al. Live demonstration: An associative capacitive network based on nanoscale complementary resistive switches. In: 2014 IEEE International Symposium on Circuits and Systems (ISCAS). IEEE, 2014. p. 439-439.
    47. Garrido, M., J. Grajal, and O. Gustafsson, Optimum circuits for bit-dimension permutations. IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 2019. 27(5): p. 1148-1160.
    48. Spiga, S., et al., Memristive Devices for Brain-Inspired Computing: From Materials, Devices, and Circuits to Applications-Computational Memory, Deep Learning, and Spiking Neural Networks. 2020: Woodhead Publishing.
    49. Feng, P.A.N., et al., Nonvolatile resistive switching memories-characteristics, mechanisms and challenges. Progress in Natural Science: Materials International, 2010. 20: p. 1-15.
    50. Ahn, H., et al., Resistive switching by percolative conducting filaments in organometal perovskite unipolar memory devices analyzed using current noise spectra. Advanced Functional Materials, 2022. 32(4): p. 2107727.
    51. Kang, T., et al., A resistive device with electrolyte as active electrode. International Journal of Modern Physics B, 2020. 34(28): p. 2050267.
    52. Asapu, S. and T. Maiti, Multifilamentary conduction modeling in transition metal oxide-based RRAM. IEEE Transactions on Electron Devices, 2017. 64(8): p. 3145-3150.
    53. Gao, B., et al. Oxide-based RRAM switching mechanism: A new ion-transport-recombination model. In: 2008 IEEE International Electron Devices Meeting. IEEE, 2008. p. 1-4.
    54. Romero, F.J., et al., Resistive Switching in Graphene Oxide. Frontiers in Materials, 2020. 7.
    55. Qi, H., et al., Percolation theory based model of conduction mechanism and characteristic contradiction in ZnO RRAM. Applied Physics Letters, 2021. 119(21): p. 213503.
    56. Dongale, T.D., et al., Investigating the temperature effects on ZnO, TiO2, WO3 and HfO2 based resistive random access memory (RRAM) devices. 2016.
    57. Singh, B. and B.R. Mehta, Relationship between nature of metal-oxide contacts and resistive switching properties of copper oxide thin film based devices. Thin Solid Films, 2014. 569: p. 35-43.
    58. Ebrahim, R., et al., Copper oxide phase content and its effect on the electric pulse induced resistive switching characteristics of CuxO resistive random access memory. Thin solid films, 2013. 539: p. 337-341.
    59. Lin, C.-C., P.-H. Wu, and Y.-P. Chang, Effects of Crystallization and Non-Lattice Oxygen Atoms on CuxO-Based Resistive Switching Memory. Journal of Nanoscience and Nanotechnology, 2013. 13(1): p. 483-486.
    60. Cabout, T., et al., Role of Ti and Pt electrodes on resistance switching variability of HfO2-based resistive random access memory. Thin Solid Films, 2013. 533: p. 19-23.
    61. Chand, U., et al., Suppression of endurance degradation by utilizing oxygen plasma treatment in HfO2 resistive switching memory. Applied Physics Letters, 2015. 106(15): p. 153502.
    62. Trapatseli, M., et al., Engineering the switching dynamics of TiOx-based RRAM with Al doping. Journal of Applied Physics, 2016. 120(2): p. 025108.
    63. Yang, K., et al., Anatomy of resistive switching behavior in titanium oxide based RRAM device. Materials Science in Semiconductor Processing, 2022. 143: p. 106492.
    64. Loy, D.J.J., et al., Oxygen Vacancy Density Dependence with a Hopping Conduction Mechanism in Multilevel Switching Behavior of HfO2-Based Resistive Random Access Memory Devices. ACS Applied Electronic Materials, 2020. 2(10): p. 3160-3170.
    65. Prakash, A., D. Jana, and S. Maikap, TaOx-based resistive switching memories: prospective and challenges. Nanoscale Research Letters, 2013. 8(1): p. 418.
    66. Ku, B., et al., Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors. Journal of Alloys and Compounds, 2018. 735: p. 1181-1188.
    67. Ye, C., et al., Physical Mechanism and Performance Factors of Metal Oxide Based Resistive Switching Memory: A Review. Journal of Materials Science & Technology, 2016. 32(1): p. 1-11.
    68. Yuan, F., et al., Interface-induced two-step RESET for filament-based multi-level resistive memory. Superlattices and Microstructures, 2016. 91: p. 90-97.
    69. An, C. Ionic memories: Status and challenges. in 2008 9th Annual Non-Volatile Memory Technology Symposium (NVMTS). 2008.
    70. Waser, R. and M. Aono, Nanoionics-based resistive switching memories. Nature Materials, 2007. 6(11): p. 833-840.
    71. Symanczyk, R., Electrical characterization of solid state ionic memory elements. Non-volatile Memory Technical Symposium, Oct, 2003, 2003.
    72. Li, X., et al., Chemical anti-corrosion strategy for stable inverted perovskite solar cells. Science Advances, 2020. 6: p. eabd1580.
    73. Li, G.-J., et al., The study of a new n/p tunnel recombination junction and its application in a-Si:H/μc-Si:H tandem solar cells. Chinese Physics B, 2009. 18(4): p. 1674.
    74. de Vrijer, T., et al., The fundamental operation mechanisms of nc-SiOX≥0:H based tunnel recombination junctions revealed. Solar Energy Materials and Solar Cells, 2022. 236: p. 111501.
    75. Qiu, K., et al., Rational-design heteroatom-doped cathode and ion modulation layer modified Zn anode for ultrafast zinc-ion hybrid capacitors with simultaneous high power and energy densities. Journal of Power Sources, 2022, 536: 231484.
    76. Rideout, V.L., A review of the theory and technology for ohmic contacts to group III–V compound semiconductors. Solid-State Electronics, 1975. 18(6): p. 541-550.
    77. Chiu, F.-C., A Review on Conduction Mechanisms in Dielectric Films. Advances in Materials Science and Engineering, 2014. 2014: p. 1-18.
    78. Furlan, J., Tunnelling generation–recombination currents in a-Si junctions. Progress in Quantum Electronics, 2001. 25(2): p. 55-96.
    79. Furlan, J., et al., Tunnelling-assisted generation-recombination in pn a-Si junctions. Solid-State Electronics, 1999. 43(9): p. 1673-1676.
    80. De Zwart, S., et al., Basics of electron transport over insulators. Philips journal of research, 1996. 50(3-4): p. 307-335.
    81. Duijnstee, E.A., et al., Toward understanding space-charge limited current measurements on metal halide perovskites. ACS Energy Letters, 2020. 5(2): p. 376-384.
    82. Musiienko, A., et al., Deciphering the effect of traps on electronic charge transport properties of methylammonium lead tribromide perovskite. Science advances, 2020. 6(37): p. 6393.
    83. Parmenter, R.H. and W. Ruppel, Two‐Carrier Space‐Charge‐Limited Current in a Trap‐Free Insulator. Journal of Applied Physics, 1959. 30(10): p. 1548-1558.
    84. Stavitski, N., et al. Specific contact resistance measurements of metal-semiconductor junctions. in 2006 IEEE International Conference on Microelectronic Test Structures. 2006. IEEE.
    85. Hagino, Y., N. Ohno, and S. Takamura, Proposal of Modified Child‐Langmuir Formula describing Space‐Charge Limited Current in Plasma. Contributions to Plasma Physics, 2004. 44(1‐3): p. 144-149.
    86. Kwan, C.P., et al., Space-charge limited conduction in epitaxial chromia films grown on elemental and oxide-based metallic substrates. AIP Advances, 2019. 9: p. 055018.
    87. Rafiq, M., Carrier transport mechanisms in semiconductor nanostructures and devices. Journal of Semiconductors, 2018. 39(6): p. 061002.
    88. Chiu, F.-C., A Review on Conduction Mechanisms in Dielectric Films. Advances in Materials Science and Engineering, 2014. 2014: p. 578168.
    89. Yeganeh, M. and S. Rahmatollahpur, Barrier height and ideality factor dependency on identically produced small Au/p-Si Schottky barrier diodes. Journal of semiconductors, 2010. 31(7): p. 074001.
    90. Nicholls, J., et al., Description and verification of the fundamental current mechanisms in silicon carbide Schottky barrier diodes. Scientific reports, 2019. 9(1): p. 3754.
    91. White, M. and J. Bernstein, Microelectronics Reliability: Physics-of-Failure Based Modeling and Lifetime Evaluation. 2008.
    92. Abza, T., et al., Characterization of cobalt sulfide thin films synthesized from acidic chemical baths. Advances in Materials Science and Engineering, 2020. 2020: p. 1-9.
    93. Pu, J., et al., Multifunctional Co3S4@ sulfur nanotubes for enhanced lithium-sulfur battery performance. Nano energy, 2017. 37: p. 7-14.
    94. Dou, S., et al., Etched and doped Co9S8/graphene hybrid for oxygen electrocatalysis. Energy & Environmental Science, 2016. 9(4): p. 1320-1326.
    95. Li, L., et al., N-Doped porous carbon nanosheets decorated with graphitized carbon layer encapsulated Co9S8 nanoparticles: An efficient bifunctional electrocatalyst for the OER and ORR. Nanoscale, 2019. 11(3): p. 901-907.
    96. Lyapin, S.G., et al., Raman studies of nearly half-metallic ferromagnetic CoS2. Journal of Physics: Condensed Matter, 2014. 26(39): p. 396001.
    97. Liu, J., et al., Anchoring CoS on three-dimensional porous rGO thin films as efficient counter electrodes for dye-sensitized solar cells. Journal of Materials Science: Materials in Electronics, 2020. 31: p. 1-8.
    98. Nandhini, S. and G. Muralidharan, Co3S4-CoS/rGO hybrid nanostructure: promising material for high-performance and high-rate capacity supercapacitor. Journal of Solid State Electrochemistry, 2021. 25(2): p. 465-477.
    99. Bolagam, R. and S. Um, Hydrothermal Synthesis of Cobalt Ruthenium Sulfides as Promising Pseudocapacitor Electrode Materials. Coatings, 2020. 10: p. 200.
    100. Jin, Z. and X. Wang, In situ XPS proved efficient charge transfer and ion adsorption of ZnCo2O4/CoS S-Scheme heterojunctions for photocatalytic hydrogen evolution. Materials Today Energy, 2022. 30: p. 101164.
    101. Liu, S., et al., Hollow heterostructure CoS/CdS photocatalysts with enhanced charge transfer for photocatalytic hydrogen production from seawater. International Journal of Hydrogen Energy, 2022. 47(15): p. 9220-9229.
    102. Song, Y., et al., Ultrafast electron extraction by 2D carbon nitride modified with CoS cocatalyst for efficient photocatalytic performance. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2021. 617: p. 126151.
    103. Abza, T., et al., Preparation of cadmium zinc sulfide (Cd1− xZnxS) thin films from acidic chemical baths. Thin Solid Films, 2018. 666: p. 28-33.
    104. Nasr, T.B., et al., Effect of pH on the properties of ZnS thin films grown by chemical bath deposition. Thin solid films, 2006. 500(1-2): p. 4-8.
    105. Ferhati, H. and F. Djeffal, Graded band-gap engineering for increased efficiency in CZTS solar cells. Optical materials, 2018. 76: p. 393-399.
    106. Neuwirth, M., et al., Band-gap tuning of Cu2ZnSn (S, Se) 4 solar cell absorbers via defined incorporation of sulphur based on a post-sulphurization process. Solar Energy Materials and Solar Cells, 2018. 182: p. 158-165.
    107. Khaorapapong, N., A. Ontam, and M. Ogawa, Very slow formation of copper sulfide and cobalt sulfide nanoparticles in montmorillonite. Applied Clay Science, 2011. 51(1-2): p. 182-186.
    108. Ariponnammal, S. and T. Srinivasan, Growth and characterization of cobalt sulphide nanorods. Research Journal of Recent Sciences. 2013. 2277: p. 2502.
    109. Zhou, Y.-s., et al., In situ synthesis of cobalt sulfide nanostructure-filled carbon nanotubes and their luminescence property. Materials Letters, 2012. 86: p. 139-141.
    110. Tarasov, A., et al., Highly uniform trilayer molybdenum disulfide for wafer‐scale device fabrication. Advanced Functional Materials, 2014. 24(40): p. 6389-6400.
    111. Van Der Zande, A.M., et al., Grains and grain boundaries in highly crystalline monolayer molybdenum disulphide. Nature materials, 2013. 12(6): p. 554-561.
    112. Wu, C.-R., et al., Establishment of 2D crystal heterostructures by sulfurization of sequential transition metal depositions: preparation, characterization, and selective growth. Nano letters, 2016. 16(11): p. 7093-7097.
    113. Hong, M., et al., Microscopic insights into the catalytic mechanisms of monolayer MoS2 and its heterostructures in hydrogen evolution reaction. Nano Research, 2019. 12: p. 2140-2149.
    114. Zhan, Y., et al., Large‐area vapor‐phase growth and characterization of MoS2 atomic layers on a SiO2 substrate. Small, 2012. 8(7): p. 966-971.
    115. Jiao, K., et al., The role of MoS2 as an interfacial layer in graphene/silicon solar cells. Physical Chemistry Chemical Physics, 2015. 17(12): p. 8182-8186.
    116. Diaz, H.C., R. Addou, and M. Batzill, Interface properties of CVD grown graphene transferred onto MoS 2 (0001). Nanoscale, 2014. 6(2): p. 1071-1078.
    117. Qin, P., et al., In situ growth of double-layer MoO 3/MoS 2 film from MoS 2 for hole-transport layers in organic solar cell. Journal of Materials Chemistry A, 2014. 2(8): p. 2742-2756.
    118. Liu, L., et al., Robust resistive switching in MoS2-based memristor with Ti top electrode. Applied Surface Science, 2022. 605: p. 154698.
    119. Feng, X., et al., A fully printed flexible MoS2 memristive artificial synapse with femtojoule switching energy. Advanced Electronic Materials, 2019. 5(12): p. 1900740.
    120. Son, D., et al., Colloidal Synthesis of Uniform-Sized Molybdenum Disulfide Nanosheets for Wafer-Scale Flexible Nonvolatile Memory. Advanced Materials, 2016. 28(42): p. 9326-9332.
    121. Pradhan, G. and A.K. Sharma, Temperature controlled 1T/2H phase ratio modulation in mono- and a few layered MoS2 films. Applied Surface Science, 2019. 479: p. 1236-1245.
    122. Xu, X.-Y., et al., Resistive switching memories in MoS2 nanosphere assemblies. Applied Physics Letters, 2014. 104(3).
    123. Wang, H., et al., Semimetal or Semiconductor: The Nature of High Intrinsic Electrical Conductivity in TiS2. The Journal of Physical Chemistry Letters, 2019. 10(22): p. 6996-7001.
    124. Feng, L.-p., et al., Tuning the electronic properties of Ti–MoS2 contacts through introducing vacancies in monolayer MoS2. Physical Chemistry Chemical Physics, 2015. 17(10): p. 6700-6704.
    125. Wang, X.-F., et al., Interface Engineering with MoS2–Pd Nanoparticles Hybrid Structure for a Low Voltage Resistive Switching Memory. Small, 2018. 14(2): p. 1702525.
    126. Bogaerts, A., The glow discharge: an exciting plasma. Journal of Analytical Atomic Spectrometry, 1999. 14(9): p. 1375-1384.
    127. Kobashi, K., et al., Fibrous structures on diamond and carbon surfaces formed by hydrogen plasma under direct-current bias and field electron-emission properties. Journal of Materials Research, 2003. 18: p. 305-326.
    128. Crewe, A., The current state of high resolution scanning electron microscopy. Quarterly Reviews of Biophysics, 1970. 3(1): p. 137-175.
    129. S. Baron, A., Synthesis and Characterization of methyl ammonium lead tri halide Perovskite Compounds and their Applications in Photonic Devices. 2019.
    130. Pandey, A., et al., Structural characterization of polycrystalline thin films by X-ray diffraction techniques. Journal of Materials Science: Materials in Electronics, 2021. 32: p. 1341-1368.
    131. Shen, Q., et al., Effects of Cutting Edge Microgeometry on Residual Stress in Orthogonal Cutting of Inconel 718 by FEM. Materials, 2018. 11: p. 1015.
    132. Halim, J., An X-Ray Photoelectron Spectroscopy Study of Multilayered Transition Metal Carbides (MXenes). Drexel University. 2016. 10139938.
    133. Sergio Braga, M., et al., Multispectral colorimetric portable system for detecting metal ions in liquid media. In: 2019 4th International Symposium on Instrumentation Systems, Circuits and Transducers (INSCIT). IEEE, 2019. p. 1-6.
    134. Veale, M., Charge Transport and low Temperature Phenomena in Single Crystal CdZnTe. University of Surrey (United Kingdom). 2009. 10073540
    135. Wan, F., et al., A Novel Method to Directly Analyze Dissolved Acetic Acid in Transformer Oil without Extraction Using Raman Spectroscopy. Energies, 2017. 10(7): p. 967.
    136. Abudayyeh, H., ‫Synthesis and Analysis of ZnO Nanowires. 2012. BSc, Birzeit University. S-4373‬
    137. Ishida, N. and V. Craig, Direct Measurement of Interaction Forces between Surfaces in Liquids Using Atomic Force Microscopy. KONA Powder and Particle Journal, 2019. 36: 187-200.
    138. Lyapin, S., et al., Raman studies of nearly half-metallic ferromagnetic CoS2. Journal of Physics: Condensed Matter, 2014. 26(39): p. 396001.
    139. Fu, G., et al., Novel hydrogel-derived bifunctional oxygen electrocatalyst for rechargeable air cathodes. Nano letters, 2016. 16(10): p. 6516-6522.
    140. Manna, S., et al., rGO/ReO3 nano composite modified electrode for the ultra-sensitive determination of dopamine and uric acid. Biosensors and Bioelectronics: X, 2022. 11: p. 100156.
    141. Karim, N.A., et al., Effects Of Deposition Time On Of Cobalt Sulfide Thin Film Electrode Formation. Malaysian Journal of Analytical Sciences, 2018. 22(1): p. 80-86.
    142. Shao, G., Work function and electron affinity of semiconductors: Doping effect and complication due to fermi level pinning. Energy & Environmental Materials, 2021. 4(3): p. 273-276.
    143. Abadi, S.K.N., et al., Studying the effects of plasma produced species on the optical characteristics and bonding structure of diamond-like carbon films deposited by direct current unbalanced magnetron sputtering. Materials Chemistry and Physics, 2019. 229: p. 348-354.
    144. Woodbridge, C., et al., HREELS and XPS Studies of Ferrocene on Ag (100). The Journal of Physical Chemistry B, 2000. 104(14): p. 3085-3093.
    145. Kim, J., et al., Memory characteristics of cobalt-silicide nanocrystals embedded in HfO2 gate oxide for nonvolatile nanocrystal flash devices. Applied Physics Letters, 2008. 92(1).
    146. Waser, R., et al., Redox‐based resistive switching memories–nanoionic mechanisms, prospects, and challenges. Advanced materials, 2009. 21(25-26): p. 2632-2663.
    147. Xia, Y., et al., Field-induced resistive switching based on space-charge-limited current. Applied physics letters, 2007. 90(2): p. 022907.
    148. Nagashima, K., et al., Unipolar resistive switching characteristics of room temperature grown SnO2 thin films. Applied Physics Letters, 2009. 94(24): p. 242902.
    149. Lee, T.S., et al., Compliance current-controlled conducting filament formation in tantalum oxide-based RRAM devices with different top electrodes. ACS Applied Electronic Materials, 2020. 2(4): p. 1154-1161.
    150. Lin, Q., et al., Human hair keratin for physically transient resistive switching memory devices. Journal of Materials Chemistry C, 2019. 7(11): p. 3315-3321.
    151. Bid, A., A. Bora, and A. Raychaudhuri, Temperature dependence of the resistance of metallic nanowires of diameter⩾ 15 nm: Applicability of Bloch-Grüneisen theorem. Physical Review B, 2006. 74(3): p. 035426.
    152. Tran, K.M., et al., Influence of top electrode on resistive switching effect of chitosan thin films. Journal of Materials Research, 2019. 34(23): p. 3899-3906.
    153. Ghodselahi, T., et al., XPS study of the Cu@ Cu2O core-shell nanoparticles. Applied Surface Science, 2008. 255(5): p. 2730-2734.
    154. Liu, Q., et al., Real‐time observation on dynamic growth/dissolution of conductive filaments in oxide‐electrolyte‐based ReRAM. Advanced Materials, 2012. 24(14): p. 1844-1849.
    155. Liu, S., et al., Eliminating negative‐SET behavior by suppressing nanofilament overgrowth in cation‐based memory. Advanced Materials, 2016. 28(48): p. 10623-10629.

    無法下載圖示 全文公開日期 2025/08/22 (校內網路)
    全文公開日期 2025/08/22 (校外網路)
    全文公開日期 2025/08/22 (國家圖書館:臺灣博碩士論文系統)
    QR CODE