本研究旨在開發一應用於雷射光學定位的新型壓電掃描振鏡系統，並探討鏡面鍍膜壓電元件結合於類自由邊界薄膜上產生的振動特性。我們透過多種實驗量測及數值計算得知不同極化方向設計壓電材料的共振頻率及共振模態，分析本研究研製之壓電動態變形振鏡的振動效能；實驗上則是將雷射光源以角度及位置的搭配入射於不同振動模態特性所產生變形的光學鏡面，因振動特性變形下產生的光學反射路徑，透過光學位置感測器驗證壓電振鏡在光學路徑訊號的現象。我們首先開發一套光學鏡面鍍膜程序，使雷射光能在壓電元件上反射，在不影響原壓電材料振動特性下，成功以化學反應的方式將金屬膜依附於壓電元件上，形成一光學反射鏡面。本論文探討鏡面鍍膜於表面之壓電雙層圓盤之振動模態特性，設計三種不同極化方向型式的壓電雙層圓盤變形振鏡來進行比較，分別為實驗組之(1)自製型雙層圓盤所製作的串聯、並聯混合壓電雙層圓盤變形振鏡，以及對照組利用商用型壓電雙層圓盤製作(2)串聯型壓電雙層圓盤變形振鏡和(3)並聯型壓電雙層圓盤變形振鏡。此三種設計的邊界條件皆採用自由邊界振動特性的概念，並透過等向繃膜技術及黏貼位置比例的條件為了減少不良邊界效應產生的干擾。在振動特性的量測部分本研究透過全域式電子斑點干涉術記錄壓電材料與不同極化特性下的共振頻率與振動模態，以及採用雷射都普勒振動儀以單點量測壓電材料的面外共振頻率值。本研究實驗量測結果皆與有限元素數值計算進行分析比較，並將得到的振動特性結果應用於不同型之振鏡，分別於不同的實驗變因如光學入射角、位置及相位變化，探討不同模態驅動下振鏡的反射方向及反射程度，實現開迴路系統的光學路徑控制，此研究結果對於壓電振鏡提供了一個新的設計可能性。

This study presents development of a new piezoelectric galvanometric scanner which utilizes a two-layer piezoelectric-driven mirror to explore its dynamic characteristics for laser scanning applications. To this end a coating procedure is developed for a ceramic piezoelectric disk plate applied as a scanning mirror. The vibration characteristics of this self-made scanning mirror are analyzed through the measurement techniques of amplitude-fluctuation electronic speckle pattern interferometry (ESPI) and laser Doppler vibrometer (LDV). The consistent measurement results compared with the numerical simulation ones of an uncoated piezoelectric disk demonstrate the success of the developed coating procedure. Because piezoelectric galvanometric scanner produces different types of optical distortion caused by different resonant vibrations, this research proposes a visualization method to evaluate the performance of the developed new piezoelectric galvanometric scanner. The galvanometer is controlled by adjusting several parameters associated with the optical path signal and the positioning performance is verified through a Position Sensitive Detector (PSD) and ESPI technique. The presented results in this study provide a new direction for the development of scanning mirrors.

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