本研究以數值模擬方式分析三維高溫石墨純化爐內部的熱傳問題，因為純化爐內部為高溫及低壓環境，因此以層流與不可壓縮流並使用漫射及灰體假設進行惰性氣體與石墨坩堝間的共軛質傳與熱傳模擬。純化爐內部流場可由連續、動量以及能量方程式加以描述，運用有限體積法進行離散，以求解速度、壓力以及溫度場。本研究使用氬氣為工作氣體探討石墨加熱器功率、氣體流量、工作壓力以及保溫材厚度對坩堝表面氣體流速、溫度的影響，此外本研究忽略高溫純化爐內的化學反應。本研究發現：當石墨加熱器功率由5kW增為20kW時，坩堝表面平均溫度由950C增為2300C；當氣體流量大於10L/min時，伴隨著流速快速上升，坩堝表面溫度同時產生顯著下降現象，改變工作壓力可對於流速分布產生顯著影響，但對於坩堝表面溫度分布幾乎沒有影響，所以在適當的流量下，減少腔體內部壓力是有助於提升石墨純化的效率；當保溫材厚度由50mm增加至150mm，因加熱器部分能量被保溫材所吸收，導致坩堝表面溫度降低，坩堝表面平均溫度降低約10%。

The conjugate heat and mass transfer problem arising in the process chamber for the purpose of graphite purification is numerically investigated in this research, where laminar flow is assumed in a high-temperature and low-pressure environment. For the sake of preliminary study, the chemical reaction is neglected in this paper. The steady flow and heat transfer problem is governed by the continuity equation, momentum equations and energy equation to describe the pressure and velocity fields with the temperature distribution in the purification process. The coupled governing equations are segregated solved by a finite volume method, where the radiation heat transfer among surfaces is modeled by the assumption of diffuse and gray surfaces. This study shows that the average temperature of the crucible surface increases from 950C to 2300C when the heater power grows from 5kW to 20kW. The increase of flow rate can lead to substantial growth of flow velocity near the crucible, while the surface temperature of crucible will significantly decrease for the flow rate over 10 L/min. The working pressure has negative impact on the flow velocity in the vicinity of crucible without bringing any considerable change in the surface temperature of crucible. When the thickness of insulation increases from 50mm to 150mm, the average temperature of crucible surface decreases by 10%.

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