本研究主要利用飛秒雷射加工技術的超短脈衝與能量密度極高等特性，這些加工特性於材料上會產生熱影響區極小、無重鑄層、加工尺寸小、加工精密度高等優勢適用於玻璃材料內部，欲解決一般長脈衝雷射於加工過程中會產生熱效應，而導致加工尺寸精度不佳或是材料強度降低與殘留應變力等問題。本研究乃是分析飛秒雷射加工於玻璃材料內部產生的交互作用，且測試使用不同雷射參數(即雷射能量功率、掃描速度、聚焦深度等)對材料加工後，產生加工尺寸的變化與加工情況，觀察微結構的變化與現象而尋找出良好的內部加工參數，並且於玻璃材料內部製作光柵結構；同時，使用DiffractMOD模擬軟體對玻璃內部光柵結構進行干涉與繞射之分析，對模擬出的繞射效率與實際玻璃內部單層光柵之繞射效率進行比對分析，除了第一階數所產生的繞射效率較低以外，從第二階數起，所觀察到的內部光柵之繞射效率都與模擬出的繞射效率趨勢相近。
本研究於玻璃材料內部也設計多層光柵之微結構，並且在玻璃內部製作出雙層光柵進行繞射效率量測與分析，後續更設計出非規律性多層光柵之微結構，以證明飛秒雷射對於玻璃材料內部製作規律性或非規律性多層光柵之微結構的可行性，而期望未來可廣泛應用於半導體產業、光電產業以及數位訊號產業等不同領域的微奈米製造技術。

In this study, we use of femtosecond ultrashort pulse laser(FUPL) processing technology and high energy density and other characteristics.
An integrated approach based on the experimental results is applied to determine the optimal processing parameters for the femtosecond ultrashort pulse laser (FUPL) of glass material. The proposed method consists of two stages. In the first stage, an investigation is performed into the effects of interaction on the difference parameters (i.e., laser energy power, scanning speed, and depth of focus, etc.) of glass material by producing grating structure. In preparing the specimens, the grating structure is fabricated using femtosecond ultrashort pulse laser (FUPL). In the second stage, the experimental results acquired are used to construct an internal grating model of the interference and the diffraction by simulation (Diffract MOD software).
Compared, both two model results and analysis (i.e., experimental and simulation), which were used to analyze the diffraction and interference inside layer of the glass. The diffraction results obtained from the numerical simulation were analyzed and compared with the experimental results. The numerical simulation result show that the diffraction intensity was higher compared to the experimental one for single layer. Conversely, the numerical simulation indicates a same level of diffraction intensity with the diffraction intensity obtained in the experiment for the second layer. It can be state that femtosecond laser technology can be used to process the materials with more customized procedure besides the original procedure.

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