研究生: |
范綱宇 Gang-Yu Fan |
---|---|
論文名稱: |
多自由度共面偵測式微型化干涉儀 Miniaturized Multi-Degree-of-Freedom Coplanar Detection Type Laser Interferometer |
指導教授: |
謝宏麟
Hung-Lin Hsieh |
口試委員: |
李朱育
Ju-Yi Lee 鄧昭瑞 Geo-Ry Tang 許正治 Cheng-Chih Hsu |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2019 |
畢業學年度: | 107 |
語文別: | 中文 |
論文頁數: | 218 |
中文關鍵詞: | 光柵干涉儀 、共面偵測 、高解析度 、位移 、旋轉角 、幾何誤差 |
外文關鍵詞: | Grating interferometer, Coplanar detection type, High resolution, Displacement, Rotation angle, Geometric errors |
相關次數: | 點閱:279 下載:0 |
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