本研究利用多孔質陽極氧化鋁(Porous Anodic Alumina, PAA)製程以4吋鍍鋁矽晶圓(Wafer Based Aluminum)為基板，製作柱狀、二階以及錐狀結構形貌之次波長結構(Sub Wavelength Structure,SWS)PAA模板，接著再以等效介質理論(Effective Medium Theory,EMT)之光學設計方法，估算反射率及穿透率值，另將PAA模板，透過反向模造製程(Reverse Mokding,RVM)在聚甲基丙烯酸甲酯(Polymethylmethacrylate,PMMA)材料上，製作出柱狀、二階以及錐狀結構之4吋抗反射鏡片(Anti-reflection Lens,AR Lens)，經由光學量測結果，製作的AR Lens，穿透率皆高於Ref_PMMA，其中柱狀結構之AR Lens的穿透率為最高，於波長400nm~700nm區段可提升穿透率3.76%，可將太陽能電池之發電效率提升0.58%；另將下轉換螢光粉(Down-conversion phosphor)粉末加入PMMA材料上，以柱狀結構之PAA模板為基板，再以反向模造製作出複合型光學元件(Complex Anti-reflection Lens,CARL)，得到大徑92nm、間距121nm、高度為300nm、間距121nm之次波長抗反射結構，可將太陽能電池之發電效率提升0.67%，此研究成果未來可應用於太陽能電池模組產業。

This study is to develop a fabrication process of sub-wavelength structure anti-reflection(SWS-AR) structures on PMMA combined with phosphor wafer based porus anodic alumina (PAA) template and replicated by reverse molding (RVM) method. The effective medium theory (EMT) have been applied to obtain theoretical design values of reflection rate (R%) and transmittance rate(T%) for specified AR film. The PAA process has been developed to fabricate three gradient index anti-reflection structures including columnar step and taper on 4-inch wafer based aluminum layers. The PAA template are used as a mold plate for RVM of PMMA combibed whth phosphor to produce the desired SWS-AR lens. The spectrophotometer instruments have been used to investigate the properties of AR Lens. Results show that the columnar structure of SWS-AR can increase the transmittance by 3.76% as compared with non-structured PMMA film. In the measurement of the efficiency of solar cell, the columnar structure of AR Lens can increase the efficiency by 0.58% as compared with non-structure PMMA film.Then the columnar structure of PAA template is used as a mold plate for RVM of the composite material of down conversion phosphor and PMMA to produce the Complex Anti-reflective Lens(CARL) to produce sub-wavelength structure with 92nm outer diameter and 121nm pitch and 300nm height. The CARL can increase the efficiency of solar cell by 0.67% as compared with that of original solar cell. Future study can focus on integrated application.

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