本論文設計及製作具均勻光柵及部分光柵之分佈反饋式高速直調雷射，以AlInGaAs作為主動層材料，比較不同雷射腔長之均勻及部份光柵的特性，當雷射元件之主動層體積較小時，應有較大之鬆弛震盪頻率，然而受限於劈裂之精確度，要得到腔長小於200 μm之雷射成本過高，故本研究期望藉由部分光柵之有效鏡面縮短整體有效長度，以提高鬆弛震盪頻率而提高操作頻寬。
從同樣是均勻光柵，不同雷射腔長的量測結果中，確認腔長愈短則具有愈高的鬆弛震盪頻率，其最大值可達14.062 GHz，換算成相對應之調變頻寬則約為21.8 GHz，並且在單位施加電流下，具有最短腔長的200 μm雷射擁有最佳的鬆弛震盪頻率增加量，同時證實鬆弛震盪頻率與開根號的主動層體積具有接近反比的關係。
對於同樣雷射腔長為200 μm之均勻及部分光柵的比較，在頻寬的表現上證實部分光柵無法有效增加鬆弛震盪頻率，且具有較低之輸出光功率及較差之旁模抑制比，本論文之部分光柵雷射因在無光柵區不具蝕刻停止層，造成較大之電阻及易在高電流時因熱效應而影響元件特性。

To realize the light sources to fulfill the demand of high speed data transmission including short reach optical connects, this thesis fabricated and analyzed distributed feedback direct modulation lasers (DMLs) with uniform grating and partial grating. The material of AlInGaAs used as the active layer because this material has the merits of larger differential gain and temperature robustness for high-speed and uncool operation.
When the lasers have a small volume of active layer, there should be a large relaxation oscillation frequency. However, due to the accuracy of the cleavage, the cost of the cavity length less than 200 μm is too high. This study expects to shorten the overall effective length by using an effective mirror of the partial grating to increase the relaxation oscillation frequency.
For different cavity length of DMLs with uniform grating, we proved that the shorter cavity length accompanied by the higher relaxation oscillation frequency. We can obtain the modulation bandwidth, which is about 21.8 GHz when the cavity length equal to 200 μm.
We measure the laser characteristics for different partial grating lengths. The results indicate that DMLs with partial grating cannot increase the relaxation oscillation frequency obviously. Because the lack of etching stop layer on the top of no grating section, the larger series resistance cause the more severe thermal effect of partial grating DMLs at high bias current.

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