隨著創新產品開發朝向輕、薄、短、小之趨勢與光纖雷射技術成熟且高品質合理價格，造就超短脈衝雷射技術在精微加工之應用迅速發展。奈秒雷射加工受熱效應區(HAZ)影響，面臨加工精度不易控制，而飛秒雷射具低熱效應特性，為近年來積極開發之雷射加工技術。
本研究係運用飛秒雷射於材料內部及表面形成微結構之應用，並聚焦在雷射聚焦深度、雷射功率、雷射加工速度、雷射脈衝頻率等參數之變化對加工之影響，以探討飛秒雷射應用之可行性。
本研究發現雷射功率不高於被加工材料之分子鍵結能量及適當之雷射加工間距，飛秒雷射確可於壓克力透明材料內部形成微結構製作光學擴散片；運用飛秒雷射於金屬玻璃表面形成微溝槽及雷射誘發週期性表面微結構，可提升剪切帶啟動及增生，可避免局部化剪切帶形成，亦可阻卻局部化剪切移位，提升彎曲延展性近10%；此外，適當之雷射功率及加工速度，以飛秒雷射製作光柵之節距與設定之節距相當接近，顯示運用飛秒雷射確可製作光學尺之光柵達20µm。

The innovative development towards light, thin, short and small products . and creates the rapid demand of micro-processing applications using ultrafast pulse laser technology. But nanosecond laser processing faces the bottleneck of controlling machining accuracy due to heat affected zone (HAZ). The characteristics of low HAZ make the femtosecond laser be a popular choice for micro-processing.
In this study, the applications of femtosecond laser processed internal and surface micro-structure were studied. Effects of focus, laser power, laser processing speed, laser pulse width and other parameters were investigated. Feasibility of application of femtosecond laser was also discussed.
It was found that if the laser power is not higher than the molecular bonding energy of the processed material and each laser processed is properly spaced, the femtosecond laser can process internal micro-structure well in transparent material to form an optical diffuser. In another case, the ductility of the laser processed metallic glass can increase nearly 10% with a micro-structure on the surface of metallic glass due to the shear zone growth and spacing reduction of shear band. In addition, optical encoder can be produced with femtosecond laser due its high accurate grating pitch. and 20µm grating pitch of encoder was successfully fabricated by femtosecond laser.

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