常壓電漿噴射束(Atmospheric Pressure Plasma Jet, APPJ)滲氮為近年興起的一項金屬表面硬化研究，但由文獻與過去研究指出使用APPJ滲氮雖然可以於一大氣壓的環境下進行滲氮處理，但因需要維持工作氣氛與保持製程溫度，所以會使用遮罩將電漿噴頭與欲處理試片至於密閉環境中，導致APPJ滲氮快速且能夠自由活動的優勢消失。因此本研究比較將遮罩移除前後對滲氮處理的影響，且為了將補償原先遮罩的保溫效果，因此導入加熱平台輔助製程，並與未使用遮罩與加熱平台之製程比較，另外因APPJ滲氮製程要大面積製程時，冷卻方式會以慢速空冷為主，因此本研究也會針對不同的冷卻方式進行實驗。在APPJ滲氮製程中會使用光學放射光譜儀與溫度感測器及熱顯像儀進行電漿製程的檢測，經不同製程的試片會使用場發式電子顯微鏡、X光繞射儀與X射線光電子能譜儀進行改質層的基本的材料分析，接續則會使用維克氏硬度機、Pin-on-Disk磨耗分析儀及恆電位儀分別針對改質層的機械性質與化學性質進行研究與探討。
研究結果顯示APPJ在接觸試片表面時並未於電漿放光譜中偵測到氧相關訊號因此可證實在APPJ滲氮時，氮氫混合氣電漿會完全覆蓋試片表面，還原氧化物的生成。根據晶體繞射檢測結果使用遮罩進行製程可檢測到完整之氮化物的訊號，未使用遮罩之製程因無法維持工作氣氛，因此有接近SKD11之訊號顯現並有於冷卻時生成的氧化物訊號。橫切面金相顯示使用遮罩與未使用遮罩皆可於SKD11工具鋼表面形成三層的化合物層、擴散層與心部組織，證實使用遮罩與未使用遮罩皆可成功滲氮，並且滲氮深度受到處理溫度影響，經硬度測試也可發現有材料表面硬化的效果；放大倍率後可從未使用遮罩的試片表面發現氧化物的生成，與電漿放光譜量測結果對照，證實在未使用的遮罩下進行冷卻會有氧化層形成，且由X射線光電子能譜儀結果顯示，氧化物的生成是先生成Fe3O4接著與氧原子的持續反應再生成Fe2O3。磨耗試驗結果顯示具有氧化層之試片摩擦係數會有所降低，且磨耗率也會大幅降低；電化學測試結果中，具有氧化層試片的表面電荷轉移電阻大幅提升，且從極化曲線結果中也可發現腐蝕電流大幅下降的趨勢。

Atmospheric Pressure Plasma Jet (APPJ) nitriding is a recent emerging research in metal surface hardening. Although APPJ nitriding can be performed at atmospheric pressure, it requires a cover to maintain the working atmosphere and process temperature, which eliminates the advantage of rapid and unrestricted movement of the APPJ. Therefore, this study compares the effects of nitriding treatment with and without the cover. A heating platform is introduced to compensate for the cover's insulation effect, and different cooling methods are compared. Optical emission spectroscopy, thermal meter, and thermal imager are used to monitor the plasma process. The modified layer is analyzed using field emission scanning electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy. Furthermore, Vickers hardness testing, Pin-on-Disk wear analysis, and potentiostat techniques are employed to investigate the mechanical and chemical properties of the modified layer.
The research results indicate that no oxygen-related signals were detected in the plasma emission spectrum when APPJ contacted the sample surface. This confirms that during APPJ nitriding, the nitrogen-hydrogen mixed gas plasma completely covers the sample surface, reducing oxide formation. X-ray diffraction analysis showed that using a mask during the process resulted in a complete signal of nitrides. In contrast, the process without a cover, which couldn't maintain the working atmosphere, exhibited signals close to the pristine material and showed the generation of oxide signals during cooling. Cross-section metallography revealed a three-layer morphology consisting of a compound layer, diffusion layer, and core structure on the surface both with and without the mask, confirming successful nitriding. Treatment temperature influenced nitriding depth, and hardness testing demonstrated surface hardening. Amplification of the sample surface without a mask revealed oxide formation, consistent with the plasma emission spectroscopy measurements. X-ray photoelectron spectroscopy indicated the initial formation of Fe3O4 followed by subsequent transformation to Fe2O3 due to continuous oxygen atom reactions. Wear test results showed a reduction in friction coefficient and a significant decrease in wear rate for samples with oxide layers. Electrochemical testing demonstrated a substantial increase in surface charge transfer resistance for samples with oxide layers, and the polarization curves exhibited a trend toward the upper-left direction.

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