研究生: |
高文雄 Wen-Shone Kao |
---|---|
論文名稱: |
飛秒雷射製作透明材料內部光學元件 Optical Components fabricated by Femtosecond laser in Transparent material |
指導教授: |
鄭正元
Jeng-Ywan Jeng |
口試委員: |
鄭逸琳
Yih-Lin Cheng 黃忠偉 Jong-Woei Whang 洪基彬 none |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2011 |
畢業學年度: | 99 |
語文別: | 中文 |
論文頁數: | 78 |
中文關鍵詞: | 飛秒雷射 、PMMA 、聚焦元件 、內部加工 |
外文關鍵詞: | femtoseond laser, internal processing, PMMA, light-converging |
相關次數: | 點閱:201 下載:8 |
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本研究主要利用飛秒雷射之加工特性實現材料內部光學元件製作。飛秒雷射具有超短脈衝及光能量密度極高之特性,並擁有特殊的光化學剝離機制,而這些特性有別於一般雷射所帶來較小的熱影響區、加工尺寸精密度高、及熱應力較低等優勢,可以在透明材料內部達到較高精密度之加工。
而有別於一般光學元件製作,飛秒雷射於透明材料內部所製作之光學元件具有結構較不易的磨損,而且可以達到更好的空間利用率而製作出複合式光學元件。本研究成功的在透明材料PMMA中製作出聚焦元件,透過光學模擬設計後進行內部加工,並對所做之元件進行光學量測觀察其聚焦情形,最後進行模擬與實驗驗正。
This study aims to fabricate inner optical components by femtosecond laser. Femtosecond laser is characterized with ultra-short pulse and high fluence. And with the unique mechanism of photochemical peeling, femtosecond laser has advantages of small heat-affected zone, high precision, and low thermal stress. Therefore, optical components inside transparent materials can be manufactured precisely.
In contrast with the exterior structure of optical components, the inner structure inside transparent materials by femtosecond laser sustain abrasion and have better space utilization, which is suitable for manufacturing compound optical components. This study has successfully fabricated light-converging optical components in PMMA. And with incorporation of optical simulation, the components has calibrated and verified. Finally, comparisons between simulations and experiments have been done.
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