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研究生: 高文雄
Wen-Shone Kao
論文名稱: 飛秒雷射製作透明材料內部光學元件
Optical Components fabricated by Femtosecond laser in Transparent material
指導教授: 鄭正元
Jeng-Ywan Jeng
口試委員: 鄭逸琳
Yih-Lin Cheng
黃忠偉 
Jong-Woei Whang 
洪基彬
none
學位類別: 碩士
Master
系所名稱: 工程學院 - 機械工程系
Department of Mechanical Engineering
論文出版年: 2011
畢業學年度: 99
語文別: 中文
論文頁數: 78
中文關鍵詞: 飛秒雷射PMMA聚焦元件內部加工
外文關鍵詞: femtoseond laser, internal processing, PMMA, light-converging
相關次數: 點閱:201下載:8
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本研究主要利用飛秒雷射之加工特性實現材料內部光學元件製作。飛秒雷射具有超短脈衝及光能量密度極高之特性,並擁有特殊的光化學剝離機制,而這些特性有別於一般雷射所帶來較小的熱影響區、加工尺寸精密度高、及熱應力較低等優勢,可以在透明材料內部達到較高精密度之加工。
而有別於一般光學元件製作,飛秒雷射於透明材料內部所製作之光學元件具有結構較不易的磨損,而且可以達到更好的空間利用率而製作出複合式光學元件。本研究成功的在透明材料PMMA中製作出聚焦元件,透過光學模擬設計後進行內部加工,並對所做之元件進行光學量測觀察其聚焦情形,最後進行模擬與實驗驗正。


This study aims to fabricate inner optical components by femtosecond laser. Femtosecond laser is characterized with ultra-short pulse and high fluence. And with the unique mechanism of photochemical peeling, femtosecond laser has advantages of small heat-affected zone, high precision, and low thermal stress. Therefore, optical components inside transparent materials can be manufactured precisely.

In contrast with the exterior structure of optical components, the inner structure inside transparent materials by femtosecond laser sustain abrasion and have better space utilization, which is suitable for manufacturing compound optical components. This study has successfully fabricated light-converging optical components in PMMA. And with incorporation of optical simulation, the components has calibrated and verified. Finally, comparisons between simulations and experiments have been done.

誌謝I 摘要II 英文摘要III 目錄IV 圖目錄VIII 表目錄XII 符號表XIII 第一章緒論1 1.1前言1 1.2研究動機與目的2 1.3研究方法3 1.4論文架構5 第二章文獻回顧6 2.1雷射的歷史6 2.1.1雷射脈衝分析及其特性7 2.2飛秒脈衝雷射之原理8 2.2.1鎖模雷射振盪器9 2.2.2脈衝雷射放大器系統11 2.3飛秒雷射加工其能量轉移過程12 2.4飛秒雷射對材料的剝離閥值( Ablation threshold )15 2.5透明材料加工機制16 2.6飛秒雷射技術文獻回顧18 2.7光學導管之原理20 第三章實驗規劃及儀器介紹22 3.1實驗設計與參數規劃22 3.1.1雷射參數23 3.1.2機台參數24 3.2飛秒雷射實驗機台26 3.3材料選用28 3.4檢測儀器設備介紹29 3.4.1超音波洗淨器29 3.4.2光學顯微鏡30 3.4.3光致螢光光譜儀(photoluminescence)31 3.4.4Beam profiler31 3.4.5光學模擬軟體(TracePro)32 3.4.63D confocal microscope33 第四章透明材料之內部光學元件製作34 4.1PMMA內部之實驗參數測試35 4.1.1雷射加工鏡頭之選用35 4.1.2雷射功率對PMMA加工之影響36 4.1.3掃描速度對PMMA加工之影響45 4.2PMMA內部結構型聚焦結構設計47 4.3內部聚焦結構光學模擬分析50 4.3.1模型建構50 4.3.2模擬參數設定51 4.3.3模擬分析53 4.4內部聚焦結構之製作56 4.5內部聚焦結構光學檢測分析61 第五章結論與未來展望73 5.1結論73 5.2未來展望74 參考文獻75

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