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研究生: 陳思婷
Szu-Ting Chen
論文名稱: 級進式射壓成形應用於具有次波長微米結構之複合式菱鏡研究
Study on Progressive Injection Compression Molding for Hybrid Prism with Sub-wavelength Micro Structures
指導教授: 陳炤彰
Chao-Chang Chen
口試委員: 楊申語
Sen-Yeu Yang
黃忠偉
Jong-Woei Whang
學位類別: 碩士
Master
系所名稱: 工程學院 - 機械工程系
Department of Mechanical Engineering
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 185
中文關鍵詞: 級進式射出壓縮成形複合式菱鏡矽晶圓模仁次微米結構光學品質
外文關鍵詞: Progressive injection compression molding, Hybrid prism, Silicon mold insert, Sub-wavelength micro structures, Optical quality
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  • 本研究主要在研發級進式射出壓縮成形(Progressive Injection Compression Molding, PICM)成形方式配合模具設計,針對具有次波長微米結構(Sub-wavelength Micro Structures)之複合式菱鏡之成形與光學品質作探討,針對成品厚度之不同,利用具有不同壓縮行程之模仁以級進的方式做壓縮,並比較射出成形、射出壓縮成形與級進式射出壓縮成形三種不同成形方式對複合式菱鏡的模穴壓力變化,以及成品入光面之平面度探討,最後進行殘留應力檢測。此外藉由具有次波長微奈米結構之矽晶圓模仁進行級進式射出壓縮成形實驗,以探討微結構對於光學品質之影響。實驗結果得知PICM可有效降低成品入光面平面度誤差,相對於傳統射出成形最佳值提升了46.34%,而在次微米結構複製性實驗中最佳微結構複製性為86.15%,且其接觸角由原先83.3°提升至118.7°,提升了42.50 %。光學檢測方面,藉由照度量測可得知添加次微米結構之成品可吸收更多光能量並有效將光集中,相較於無添加次微米結構之成品照度提升80.8%。本研究成果未來可進一步使用在成品厚度變化較為複雜的菱鏡型光學元件與非球面透鏡元件。


    This research is to design a progressive injection compression molding (PICM) for hybrid prism with micro structures to obtain better surface uniformity for improving optical quality. The compression stroke is based on the different part thickness of prism and the mold cavity pressure has been observed by two sets of pressure sensor modules to acquire the relationship of pressure and compression effects. In this research, three kinds of molding process including injection molding (IM), injection compression molding (ICM) and progressive injection compression molding (PICM) have been investigated to discuss the parameters of injection velocity, mold temperature, and compression time based on performance of non-uniformity (NU) and sub-wavelength micro structures (SWMS) of filling ratio (SFR) by experimental design. The SWMS is replicated by a silicon mold insert with nano or sub-micro structures of porous anodic alumina (PAA). Residual stress has been measured by photoelastic instrument and discussed. Experimental results show that the PICM could effectively improve the incident surface uniformity 46.34% as compared with IM process and also improve the SFR from 82% to 92%, The contact angle incident surfaces of prism by IM and PICM increased from 83.3゚to 118.7 ゚, as increased by 42.50%. The hybrid prism with best SFR can improve the illumination 80.8 % as compared with prism without sub-microstructure. Further study can apply on injection molding of the hybrid thickness of prism aspheric elements.

    摘要 I Abstract II 致謝 III 目錄 V 圖目錄 X 表目錄 XVII 符號表 XIX 第一章 導論 1 1.1 研究背景 1 1.2 研究動機 6 1.3研究目的 8 1.4 研究方法 9 1.5 論文架構 11 第二章 文獻回顧 13 2.1射出壓縮成形相關文獻回顧 13 2.2微結構複製相關文獻回顧 20 2.3抗反射模造相關製程回顧 23 2.4相關專利回顧 27 2.5文獻回顧總結 30 2.5.1文獻統整 30 2.5.2本研究重點統整 30 第三章 級進式射壓成形模具與模流分析介紹 36 3.1級進式射壓成形介紹 36 3.1.1設計背景 36 3.1.2設計概念 39 3.1.3級進式射壓成形模穴壓力分析 43 3.3模流分析 44 3.4模具設計 49 3.4.1微結構模板設計 49 3.4.2微結構模板放置槽 50 第四章 實驗設備與規劃 54 4.1實驗設備 54 4.1.1射出成形設備 54 4.1.2壓力感測設備及監控系統 55 4.1.3陽極處理主設備 56 4.2量測設備 62 4.3實驗規劃 66 4.3.1取樣方法 66 4.3.2短射實驗 67 4.3.3成形視窗實驗 67 4.3.4實驗參數訂定 67 4.3.5實驗步驟 69 4.3.6實驗總表 76 4.4變異數分析 77 4.5成形性檢測 81 4.5.1成品平面度量測 81 4.5.2次微米結構複製量測 82 4.6光學品質檢測 85 4.7功能性檢測 88 第五章 實驗結果與討論 89 5.1各成形方法之模穴壓力探討 89 5.1.1射出成形之模穴壓力結果 89 5.1.2射壓成形之模穴壓力結果 92 5.1.3級進式射壓成形之模穴壓力結果 96 5.1.4統整模穴壓力結果比較 100 5.2複合式菱鏡導光元件成形性探討 101 5.2.1射出成形之入光面平面度誤差結果 101 5.2.2射壓成形之入光面平面度誤差結果 107 5.2.3級進式射壓成形之入光面平面度誤差結果 112 5.2.4入光面平面度誤差綜合結果討論 117 5.3 次微米結構複製性量測結果 118 5.4 光學性質量測結果 122 5.4.1殘留應力檢測結果 122 5.4.2照度量測結果 129 5.5 功能性量測結果 131 5.6 綜合結果討論 133 第六章 結論與建議 135 6.1結論 135 6.2建議 136 參考文獻 137 附錄A 實驗模具設計圖 141 附錄B 矽晶圓特性表 142 附錄C 射出機規格FANUC ROBOSHOT α-15iA 143 附錄D Teijin Panlite PC AD-5503材料特性表 144 附錄E 石英壓力感測器KISTLER 9204B 145 附錄F 電荷放大器KISTLER 5039A 146 附錄G 三次元量測儀Mitutoyo Beyond Crysta C 544 147 附錄H 平面度量測數據 148 附錄I 次波長微米結構SEM量測結果 157 作者簡介 159

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