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研究生： 詹益明
Yi-ming Chan
論文名稱： 氧化亞銅-氧化鋅異質接面太陽能電池之研製
Study of p-Cu2O / n-ZnO Heterojunction Solar Cells
指導教授： 周賢鎧
Shyankay Jou
口試委員: 胡毅
Yi Hu
黃柏仁
Bohr-Ran Huang
學位類別： 碩士
Master
系所名稱： 應用科技學院 - 應用科技研究所
Graduate Institute of Applied Science and Technology
論文出版年： 2010
畢業學年度： 98
語文別： 中文
論文頁數： 98
中文關鍵詞： 異質接面 、太陽能電池 、載子濃度 、遷移率
外文關鍵詞： heterojuction, solar cell, carrier concentration, mobility
相關次數： 點閱：239  下載：2 
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    • 　　本研究探討製備p-Cu2O/n-ZnO及p-Cu2O/n-AZO異質接面型太陽能電池，首先製備p-Cu2O主要分為兩種方式，分別為RF氧氣電漿與微波電漿；其次n-ZnO與n-AZO主要以濺鍍法製備，並比較其差異性。
    　　對於薄膜之物性分析，本實驗利用XRD與SEM探討p-Cu2O薄膜之元素成分及表面結構，接著針對n-ZnO與n-AZO薄膜之元素成分及表面結構分析，也利用UV及Hall量測，分別探討n-ZnO與n-AZO薄膜的光性、載子濃度及遷移率，並比較其差異性。
    　　對於元件之電性分析，最後利用濺鍍法及網印法製備ITO薄膜及金屬電極，以利完成太陽電池之製作，再利用I-V量測系統探討電池之特性。本實驗分別討論不同方式製備p-Cu2O/n-ZnO及p-Cu2O/n-AZO異質接面型太陽能電池，由結果得到，以微波電漿製備938 nm 之氧化亞銅薄膜並在其上濺鍍一層400 nm AZO薄膜之太陽電池，可得獲Voc = 0.3 V、Isc = 2.48 mA、填充因子FF = 0.341及效率η = 0.301%。

    　　This study described p-Cu2O/n-ZnO and p-Cu2O/n-AZO heterojuction solar cells that were fabricated by two kinds of methods. Fabrication of p-Cu2O thin film has been conducted by RF O2 plasma oxidizing and microwave plasma oxidizing, respectively. On the other hand, fabrication of n-ZnO and n-AZO thin films have been achieved by sputter deposition.
    　　For the analyses of thin films, elements and surface structure of p-Cu2O thin films was characterized by SEM and XRD measurements. Composition and surface structure of n-ZnO and n-AZO thin films and surface structure were analyzed by SEM and XRD. Mobility, carrier concentrations and optoical properties of ZnO and AZO films were measured by UV and Hall measurement.
    　　For the analysis of solar cells, ITO thin film and metal electrode were added by sputter and screen printing for I-V measurement. Performance of p-Cu2O/n-ZnO and p-Cu2O/n-AZO heterojuction solar cells were compared. The best results were Voc = 0.3 V、Isc = 2.48 mA、FF = 0.34 and η = 0.301% for the solar cell with 938 nm p-Cu2O by microwave plasma and 400 nm n-AZO.

    目錄 摘 要 i Abstract ii 致謝 iii 目錄 iv 表目錄 vii 圖目錄 viii 第一章　前言 1 第二章　文獻回顧 2 2.1　太陽能電池 2 2.1.1　太陽光譜 2 2.1.2　太陽能電池發電原理 3 2.1.3　太陽能電池I-V與效率計算 6 2.1.4　影響及提升太陽能電池效率 8 2.2　氧化鋅薄膜 12 2.2.1　氧化鋅之簡介 12 2.2.2　氧化鋅薄膜的發光機制 13 2.3　氧化亞銅薄膜 17 2.3.1　氧化亞銅之簡介 17 2.3.2　氧化亞銅的應用 18 2.3.3　氧化亞銅文獻回顧 18 2.4　濺鍍與電漿氧化技術 20 2.4.1　電漿原理 20 2.4.2　濺射機制 22 2.4.3　射頻與直流濺鍍法 22 2.4.4　微波電漿法 23 2.4.5　薄膜成長機制 24 2.4.6　電漿氧化 26 第三章　實驗步驟與方法 27 3.1　實驗用材料與藥品規格 27 3.2　實驗流程 28 3.3　實驗步驟 30 3.3.1　氧化亞銅薄膜之製備 30 3.3.2　ZnO/AZO薄膜之製備 31 3.3.3　ITO導電薄膜之製備 31 3.3.4　網版及網印電極之製作 32 3.3.5　元件之退火處理 32 3.4　實驗儀器與裝置 33 3.4.1　RF氧氣電漿氧化系統 33 3.4.2　微波電漿系統 34 3.4.3　磁控式濺鍍系統 35 3.4.4　石英管爐系統 36 3.5　分析與鑑定 37 3.5.1　X光繞射儀 37 3.5.2　掃瞄式電子顯微鏡 38 3.5.3　表面輪廓儀 39 3.5.4　紫外光與可見光光譜儀 40 3.5.5　霍爾量測 41 3.5.6　太陽光模擬器及I-V量測儀 42 第四章　結果與討論 43 4.1　氧化亞銅薄膜分析 43 4.1.1　RF氧氣電漿製備氧化亞銅薄膜 43 4.1.2　微波電漿製備氧化亞銅薄膜 47 4.2　氧化鋅薄膜分析 55 4.2.1　光學性質分析 55 4.2.2　電學性質分析 59 4.2.3　XRD結晶分析 62 4.2.4　SEM表面結構分析 67 4.3　太陽能電池分析 71 4.3.1　PartA　結構為RF氧氣電漿/濺鍍ZnO薄膜之電池分析 71 4.3.2　PartB　結構為微波電漿/濺鍍ZnO薄膜之電池分析 80 4.3.3　PartC　結構為RF氧氣電漿/濺鍍AZO薄膜之電池分析 83 4.3.4　PartD　結構為微波電漿/濺鍍AZO薄膜之電池分析 85 第五章　結論 88 參考文獻 90

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