研究生: |
孫翊峰 Yi-Feng Sun |
---|---|
論文名稱: |
金屬玻璃鍍層應用於鑽石切割刀:提升切削性質與鍍層品質研究 Metallic Glass Coating for Diamond Dicing Blades: A Study for Improving Dicing Performance and Coating Quality |
指導教授: |
朱瑾
Jinn Chu |
口試委員: |
朱瑾
Jinn Chu 陳炤彰 Chao-Chang A. Chen 朱閔聖 Min-Sheng Chu |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 材料科學與工程系 Department of Materials Science and Engineering |
論文出版年: | 2022 |
畢業學年度: | 110 |
語文別: | 英文 |
論文頁數: | 156 |
中文關鍵詞: | 晶圓切割 、基板切割 、鑽石切割刀 、金屬玻璃 、緩衝層 、低摩擦係數 |
外文關鍵詞: | wafer dicing, substrate dicing, diamond dicing blade, thin film metallic glass (TFMG), buffer layer, low coefficient of friction (CoF) |
相關次數: | 點閱:276 下載:0 |
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