研究生: |
林益正 Yi-cheng Lin |
---|---|
論文名稱: |
氮化鋁製程與性能之研究 Processing Parameters on the Performance of Aluminum Nitride |
指導教授: |
林舜天
Shun-tian Lin |
口試委員: |
黃坤祥
Kuen-shyang Hwang 顏怡文 Yee-wen Yen 賴振興 none |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2005 |
畢業學年度: | 93 |
語文別: | 中文 |
論文頁數: | 71 |
中文關鍵詞: | 碳添加 、介電常數 、陶瓷射出成型 、熱傳導 、燒結 、還原氣氛 、熱碳還原 、氧含量 、氮化鋁 |
外文關鍵詞: | Aluminum Nitride, Carbon addition, Sintering, Thermal conductivity, Oxygen content, Carbothermal reduction, Reduction atmosphere, dielectric constant, Powder injection molding |
相關次數: | 點閱:451 下載:11 |
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氮化鋁本身極易受到水解而使得含氧量增加,本研究發現表面鍍膜可以增加粉末的保存壽命,降低氧之污染。如果粉末受到氧化,可依照粉末中氧的含量來添加不同比例的奈米碳粉進行高溫之脫氧還原處理,脫氧會隨著添加碳含量的增加而增加。而含多種成份黏結劑之射出件在經過溶劑脫脂後,因為所殘留的碳含量僅達1wt%,所以經過1500℃,氮氣-3%氫氣之混合氣體脫氧還原後,則因為所有的碳被氫分解而使得碳不足以還原氧。所以添加不易與氫反應之奈米碳粉於射出件中並進行脫氧還原,其添加量要以射出前粉末中氧含量的多寡及碳氧結合比例的關係式來決定。
而以燃燒合成法合成後之氮化鋁產物顆粒較粗糙且較難研磨,所以需要較多的研磨程序,然而粉末研磨的過程當中容易與研磨的機具產生金屬污染(如:鐵、矽等),會嚴重的降低熱傳導係數(~68W/m•K)。而經過熱碳還原之氮化鋁因為氧含量的降低,其熱傳導較高,可達156W/m•K,但碳與鐵的污染量過高卻會使得氮化鋁的介電常數拉高。而在未添加氧化釔的熱壓試片因為晶粒不易成長而使得過多的晶界面阻礙了熱的傳遞使得熱傳導的提昇受到限制(~79 W/m•K)。
Aluminum Nitride(AlN) is easy to hydrolyze that causes increase in oxygen content, but surface coating can increase the preserving life and decrease the contamination of oxygen. In case of oxidation of AlN powder, nano carbon powder can be added according to its oxygen content to proceed thermal reduction. The result of reduction increases with increase in the added carbon. Powder injection molded specimens that uses multi-component binder yielded a carbon content of 1wt% after solvent debind, when debound in an atmosphere of N2-3%H2, most of the carbon is decomposed by hydrogen that causes insufficient carbon to reduce oxygen at 1500℃. Therefore, nano carbon powder was added that is hard to react with hydrogen in order to reduce oxygen. The content of added carbon must be decided by the reactive equation of C and O after injection molding.
AlN powder produced in combustion synthesis is coarse and hard to grind to fine size. Consequently, it needs a prolong grinding, resulting in more contaminations like iron and silicon. It will seriously decrease the thermal conductivity of AlN to a value of about 68W/m•K. The AlN with carbothermal reduction has a higher thermal conductivity of 156W/m•K due to the decreased oxygen content. Nevertheless, contamination of carbon and iron will increase the dielectric constant of AlN. Besides, the hot-pressed AlN specimen without Y2O3 addition has limited grain growth and thus, a low thermal conductivity of about 79 W/m•K.
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